Modeling and design of a power modulator for a KrF excimer laser

KrF 准分子激光器功率调制器的建模和设计

基本信息

批准号：
522738-2017
负责人：
Dawson, Francis
金额：
$ 1.38万
依托单位：
University of Toronto
依托单位国家：
加拿大
项目类别：
Collaborative Research and Development Grants
财政年份：
2020
资助国家：
加拿大
起止时间：
2020-01-01 至 2021-12-31
项目状态：
已结题

来源：
https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=697439
关键词：
Modeling design power modulator KrF

项目摘要

The proposed research is supported by LightMachinery, a private Canadian company, located in Nepean Ontario. LightMachinery is a manufacturer of high power, pulsed, gas discharge TEA CO2 and Excimer lasers. The research focus is on the design of a power modulator for a new excimer laser system and the physical properties of the laser gas plasma that forms the gain medium for the laser. The overarching objective of this project is to optimize the power modulator design to achieve an improved shot to shot repeatability, longer electrode lifetime, higher end-to-end efficiency and reduced operating stresses on the main triggering electronic switch, a thyratron. Potentially, the thyratron can be replaced by a semiconductor power switch. A new laser cavity and power modulator topology proposed by LightMachinery offers the possibility, once optimized, of an efficient, scalable design which can be sized to address high energy industrial markets. LightMachinery has succeeded in maintaining an annual growth rate of 20% largely through continued investment and technical advancement of the excimer product line. This project represents the next step in this investment with the goal to continue growing the company at 20% per year. An additional benefit to the Canadian economy, while meeting this growth target, has been the employment of highly qualified people. LightMachinery has historically hired 1 to 2 skilled technical and engineering resources per year.

拟议的研究得到了位于安大略省 Nepean 的加拿大私营公司 LightMachinery 的支持。 LightMachinery 是一家高功率脉冲气体放电 TEA CO2 和准分子激光器制造商。研究重点是新型准分子激光系统的功率调制器的设计以及形成激光器增益介质的激光气体等离子体的物理特性。该项目的总体目标是优化功率调制器设计，以实现改进的发射重复性、更长的电极寿命、更高的端到端效率并降低主触发电子开关（闸流管）的操作压力。闸流管有可能被半导体功率开关取代。 LightMachinery 提出的新型激光腔和功率调制器拓扑结构一旦优化，就可以实现高效、可扩展的设计，其尺寸可以满足高能工业市场的需求。 LightMachinery之所以能成功保持20%的年增长率，很大程度上得益于准分子产品线的持续投资和技术进步。该项目代表了该投资的下一步，目标是使公司继续以每年 20% 的速度增长。在实现这一增长目标的同时，加拿大经济的另一个好处是高素质人才的就业。 LightMachinery 历来每年聘用 1 至 2 名熟练的技术和工程资源。