Surface Debye temperature as a probe for defects in thin films

表面德拜温度作为薄膜缺陷的探针

• 批准号: 543992-2019
• 负责人: Goncharova, Lyudmila
• 金额: $ 1.82万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=681188
• 关键词: Surface; Debye; temperature; probe; defects

OCI Vacuum Microengineering Inc has been in business since 1990 and is the only Canadian designer and manufacturer of Low Energy Electron Diffraction (LEED) systems, and is a worldwide leading company in the field. OCI Vacuum is considering to expand LEED instrument capabilities to include Debye temperature measurements to a toolset. Using LEED as a diagnostic tool during deposition of epitaxial thin film devices allows optimization of device fabrication parameters during manufacturing, and makes it possible to implement LEED at various device growth systems. In this Engage grant, a collaborative project between Prof. Goncharova's group at Western University and OCI Vacuum, we will explore the relationship between near-surface defect characterization that is critical for many devices, and measurements of Debye temperature coming from LEED measurements. Several issues will be addressed: manufacturing defect calibration standards for a range of wide- and narrow-bandgap semiconductors (Si, Ge, AlN), and insulators (Al2O3), correlating defect densities with electron diffraction patterns and intensities; determining chemical and thermal stability of the structures; and comparing experimental results with existing theoretical models. This project will develop a robust methodology to implement LEED in various epitaxial thin film growth tools, enabling fabrication of devices such as infrared detectors, magnetic and optical sensors, and many others. The enhanced capability of OCI LEED systems will lead to increased sales.

OCI 真空微工程公司自 1990 年开始营业，是加拿大唯一一家低能电子衍射 (LEED) 系统设计商和制造商，也是该领域的全球领先公司。 OCI Vacuum 正在考虑扩展 LEED 仪器功能，将德拜温度测量纳入工具集中。在外延薄膜器件沉积过程中使用 LEED 作为诊断工具可以优化制造过程中的器件制造参数，并且可以在各种器件生长系统中实施 LEED。在这项 Engage 资助项目中，我们将探索对许多设备至关重要的近表面缺陷表征与来自 LEED 测量的德拜温度测量之间的关系。将解决以下几个问题：一系列宽带隙和窄带隙半导体（Si、Ge、AlN）和绝缘体（Al2O3）的制造缺陷校准标准，将缺陷密度与电子衍射图案和强度相关联；确定结构的化学和热稳定性；并将实验结果与现有理论模型进行比较。该项目将开发一种强大的方法，在各种外延薄膜生长工具中实施 LEED，从而能够制造红外探测器、磁性和光学传感器等设备。 OCI LEED 系统的增强功能将带来销量的增加。