High Throughput Energy Dispersive Spectrometer for Plasma Focused Ion Beam

用于等离子体聚焦离子束的高通量能量色散谱仪

• 批准号: RTI-2019-00941
• 负责人: Botton, Gianluigi
• 金额: $ 10.93万
• 依托单位: McMaster University
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=645869
• 关键词: Throughput; Energy; Dispersive; Spectrometer; Plasma

We are requesting a high-throughput energy dispersive X-ray spectrometry (EDS) detector for the plasma focused ion beam scanning electron microscope (PFIB) recently purchased by McMaster University, the first such tool in Canada. This analytical attachment is essential for X-ray analysis and mapping in order to identify the chemical composition of sample and to reconstruct chemical maps in 3-Dimensions during serial sectioning with the PFIB. This tool will also enable the chemical identification of the areas of interest for subsequent sectioning and milling using the spectroscopic chemical information as a guide to the researcher. The tool is also indispensable for the identification of phases in materials that need to be analysed subsequently in the transmission electron microscope and the 3D atom probe. Several research groups will benefit from the requested instrument. Projects include the analysis of the 3D structure of Li battery materials, the analysis of cracks in steam generator materials used in nuclear power plants, the development of light emitting diodes, the analysis of composite concrete materials, the analysis of the oldest geological materials on earth, lunar samples, photonic structures and metamaterials. The tools is urgently required to enable the correct identification of materials, the correct reconstruction of materials in 3-dimensions taking advantage of the unique high-throughput milling capabilities of the Plasma FIB. The tool will also enable faster feedback on their samples, more reliable interpretation of results and faster progress in research, leading to more relevant and internationally competitive publication. Beyond the 7 research groups with their 47 HQP, their 18 collaborators in the proposed projects (and their HQP) involved in the research and industrial partners relying on this tool, the instrument will be located at the Canadian Centre for Electron Microscopy (CCEM), a truly open-access facility supported by the Major Science Initiative with oversight from a user's group who highlighted the need for this tool and this application. The Centre supports over 430 users annually who use multiple tools in the facility, including the PFIB. They will also use this HT-EDS instrumentation for their work. The CCEM facility operates all instrument tools with dedicated technical staff who train users on the proper operation of all instruments it operates, thus ensuring that the equipment will be used widely and effectively.

我们要求为麦克马斯特大学最近购买的等离子体聚焦离子束扫描电子显微镜 (PFIB) 配备高通量能量色散 X 射线光谱 (EDS) 探测器，这是加拿大第一个此类工具。 该分析附件对于 X 射线分析和绘图至关重要，以便在使用 PFIB 进行连续切片期间识别样品的化学成分并重建 3 维化学图谱。该工具还可以使用光谱化学信息作为研究人员的指导，对感兴趣的区域进行化学识别，以便进行后续的切片和铣削。该工具对于识别材料中的相也是必不可少的，随后需要在透射电子显微镜和 3D 原子探针中进行分析。一些研究小组将受益于所需的仪器。项目包括锂电池材料的3D结构分析、核电站使用的蒸汽发生器材料的裂纹分析、发光二极管的开发、复合混凝土材料的分析、地球上最古老的地质材料的分析、月球样品、光子结构和超材料。迫切需要这些工具能够正确识别材料，利用等离子 FIB 独特的高通量铣削功能在 3 维中正确重建材料。该工具还将能够更快地反馈样本、更可靠地解释结果以及更快地取得研究进展，从而发表更具相关性和国际竞争力的出版物。除了拥有 47 个 HQP 的 7 个研究小组、参与研究的拟议项目（及其 HQP）的 18 名合作者以及依赖该工具的工业合作伙伴之外，该仪器将位于加拿大电子显微镜中心 (CCEM)，这是一个真正开放获取的设施，由重大科学计划支持，并受到用户组的监督，该用户组强调了对此工具和应用程序的需求。该中心每年为 430 多名在设施中使用多种工具（包括 PFIB）的用户提供支持。他们还将在工作中使用这种 HT-EDS 仪器。 CCEM 设施由专门的技术人员操作所有仪器工具，他们培训用户正确操作其操作的所有仪器，从而确保设备得到广泛和有效的使用。