Development of a hot filament element(s) and protocol for 2-dimensional nano-materials deposition for a low pressure vacuum deposition system (LPVD system).

开发用于低压真空沉积系统（LPVD 系统）的二维纳米材料沉积的热丝元件和协议。

• 批准号: 500735-2016
• 负责人: Bender, Timothy
• 金额: $ 7.55万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=618121
• 关键词: Development; hot; filament; element; protocol

The laboratories of Prof Timothy Bender (Chemical Engineering and Applied Chemistry, University of Toronto) and Prof Harry Ruda (Materials Science and Engineering, University of Toronto) will collaborate with Angstrom Engineering (Kitchener, Ontario) on a two-year collaborative research and development project focused on the development of a low pressure vacuum deposition system. The development will include design elements for the LPVD system as well as the establishment of standard operating procedures (SOPs) for organic and inorganic nanomaterials deposition onto substrates of interest to the electronics industry.

Timothy Bender 教授（多伦多大学化学工程与应用化学）和 Harry Ruda 教授（多伦多大学材料科学与工程）实验室将与 Angstrom Engineering（安大略省基奇纳）合作开展为期两年的合作研发项目重点是开发低压真空沉积系统。该开发将包括 LPVD 系统的设计元素，以及建立用于将有机和无机纳米材料沉积到电子行业感兴趣的基材上的标准操作程序 (SOP)。