Directional ion beam etching for nanodevice fabrication

用于纳米器件制造的定向离子束蚀刻

基本信息

批准号：
440446-2013
负责人：
Girt, Erol
金额：
$ 1.94万
依托单位：
Simon Fraser University
依托单位国家：
加拿大
项目类别：
Research Tools and Instruments - Category 1 (<$150,000)
财政年份：
2012
资助国家：
加拿大
起止时间：
2012-01-01 至 2013-12-31
项目状态：
已结题

来源：
https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=507232
关键词：
Directional ion beam etching nanodevice

项目摘要

We request a directional ion beam source for fabrication of metal and oxide nanostructures and devices. This source will be incorporated in an existing system at Surface Science Lab at SFU that has two vacuum chambers with Auger and e-beam evaporation capabilities. Auger spectroscopy will be used for insitu monitoring of the composition of etched layers and e-beam evaporation will be used for covering nanostructures with a protective layer before exposing them to air. Etching systems with similar capabilities do not exist in 4D Labs at SFU, AMPEL at UBC, or at UVic; therefore, nanostructure fabrication must currently be done overseas. This process can take up to six months, which can be a serious issue for both MSc students and postdocs. This etching system will support four projects: 1) fabrication of magnetic nanopillars for the study of spin torque transfer, 2) design of magnonic crystals for transmission, storage, and processing of information using spin waves, 3) fabrication of solid state memory with phase-change materials, and 4) fabrication of lateral spin valves for magnetic sensors. Currently 10 students, 2 postdocs, and 4 faculty members collaborate on these projects. With the addition of the directional ion beam etching system we will be able to deposit, fabricate, and study complex metal/oxide nanostructures all at SFU.

我们要求定向离子光束来源用于制造金属和氧化物纳米结构和设备。该来源将在SFU的Surface Science Lab的现有系统中纳入，该系统具有两个带有螺旋钻和电子束蒸发功能的真空室。螺旋光谱法将用于对蚀刻层组成的效果监测，并且电子束蒸发将用于覆盖具有保护层的纳米结构，然后再将其暴露于空气。在SFU的4D实验室，UBC的AMPEL或UVIC的4D实验室中，具有相似功能的蚀刻系统不存在；因此，目前必须在海外进行纳米结构制造。这个过程可能需要六个月的时间，这对于MSC学生和博士后来说都是一个严重的问题。该蚀刻系统将支持四个项目：1）制造用于研究自旋扭矩转移的磁性纳米圆柱，2）使用自旋波的宏伟晶体设计用于传输，存储和处理信息的磁性晶体，3）3）与相位的制造固态记忆 - 变化材料和4）制造磁性传感器的侧向自旋阀。目前，有10名学生，2个博士后和4位教职员工在这些项目上合作。通过添加定向离子束蚀刻系统，我们将能够在SFU上沉积，制造和研究复杂的金属/氧化物纳米结构。