Spatial Frequency Multiplex Heterodyne Technique for Absolute Measurement of Instantaneous Phase Distribution, and Its Applications

瞬时相位分布绝对测量的空间频率复用外差技术及其应用

• 批准号: 09650043
• 负责人: TAKEDA Mitsuo
• 金额: $ 2.43万
• 依托单位: The University of Electro-Communications
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650043/
• 关键词: Heterodyne Interferometry; Spatial Frequency Multiplexing; 3-D Shape Measurement; Optical Metrology; Phase Unwrapping; Optical Profilometry; ヘテロダイン法

The purpose of this research project is to develop a new scheme of heterodyne profilometry that can perform the instantaneous measurement of the absolute phase distribution of an object with large height discontinuities and/or surface isolations. The main accomplishments are summarized in the following :1. Invention of Spatial Frequency Multiplex and Scan Method for Absolute Phase MeasurementAs an alternative to the conventional temporal frequency scan method using a frequency tunable light source, a spatial frequency scan method was proposed for the absolute phase measurement. By means of spatial frequency multiplexing, the proposed technique can determine the absolute phase from a single fringe pattern, which makes possible the measurement of instantaneous phase distribution.2. Clarification of the Relation between the Temporal and Spatial Frequency Scan MethodsA unified theory was given to the basic principles of the various absolute phase measurement technique using temporal and spatial frequency scanning methods.3. Development of New Phase Unwrapping AlgorithmA new phase unwrapping algorithm that eliminates phase singular points was developed and experimentally verified.4. Experimental Demonstration of the Instantaneous Shape Measurement of Objects in Dynamic MotionAn experimental system was constructed and the validity of the proposed spatial frequency multiplex and scan method was demonstrated for objects in fast motion.

该研究项目的目的是开发一种新的外差轮廓测量方案，可以对具有大高度不连续性和/或表面隔离的物体的绝对相位分布进行瞬时测量。主要成果概括如下： 1．用于绝对相位测量的空间频率复用和扫描方法的发明作为使用频率可调光源的传统时间频率扫描方法的替代，提出了用于绝对相位测量的空间频率扫描方法。通过空间频率复用，该技术可以从单个条纹图案中确定绝对相位，这使得瞬时相位分布的测量成为可能。 2．阐明时空频率扫描方法之间的关系对时空频率扫描方法中各种绝对相位测量技术的基本原理给出了统一的理论。 3．新型相位展开算法的研制开发了一种消除相位奇异点的新型相位展开算法并进行了实验验证。 4．动态运动中物体瞬时形状测量的实验演示构建了一个实验系统，并证明了所提出的空间频率复用和扫描方法对于快速运动物体的有效性。

项目成果

T. Aoki, T. Sotomaru, T. Ozawa, T. Komiyama, Y. Miyamoto, and M. Takeda: "Two-dimensional phase unwrapping by direct elimination of rotational vector fields from phase gradients obtained by heterodyne techniques"Opt. Rev.. Vol.5, No.6. 374-379 (1998)

T. Aoki、T. Sotomaru、T. Ozawa、T. Komiyama、Y. Miyamoto 和 M. Takeda：“通过从外差技术获得的相位梯度中直接消除旋转矢量场来展开二维相位”

M. Takeda: "Recent progress in fringe analysis for optical metrology"Congresso Brasileiro de Metrologia, Petropolis, Brazil. (Invited Paper). 126 (1997)

M. Takeda：“光学计量条纹分析的最新进展”，巴西彼得罗波利斯巴西计量大会。

Mitsuo Takeda: "Frequency-multiplex Fourier transform profilometry:a single-shot three-dimensional shape measurement of objects with height discontinuities" Appl.Opt.36・22. 5347-5354 (1997)

Mitsuo Takeda：“频率多重傅里叶变换轮廓测量：具有高度不连续性的物体的单次三维形状测量”Appl.Opt.36・22 (1997)。

Mitsuo Takeda: "Photonic sensing and metrology using novel liquid crystal devices"Optics and Optelectronics. 2. 1377-1387 (1998)

Mitsuo Takeda：“使用新型液晶器件的光子传感和计量”光学和光电子学。

Mitsuo Takeda: "Recent progross in fringe analysis for optical metrology" Congresso Brasileiro de Metrologia,Petropolis Brazil. 126-126 (1997)

Mitsuo Takeda：“光学计量条纹分析的最新进展”，巴西石油城巴西计量大会。