High-speed preparation of biocompatible ceramic coatings by laser CVD

激光CVD高速制备生物相容性陶瓷涂层

基本信息

批准号：
18360310
负责人：
GOTO Takashi
金额：
$ 10.64万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18360310/
关键词：
biocompatible ceramic coatings laser CVD

项目摘要

In the present study, calcium base oxides, e.g. CaTiO_3, α-TCP and HAp films were prepared by metalorganic chemical vapor deposition (MOCVD) and laser enhanced CVD (LCVD). Effects of preparation conditions on the crystal phase, microstructure and deposition rate were investigated. Furthermore, the bone conductivity and biocompatibility were evaluated by the formation behavior of apatite on those films in a Hanks'' solution.CaTiO_3, α-TCP and HAp films were obtained first by MOCVD. Apatite wholly covered the surface of CaTiO_3 films with a smooth surface after 6 weeks, CaTiO_3 films with a complicated surface after 3 days, α-TCP films after 2 weeks and HAp films after 6 hours. The apatite predominantly formed at the micro-sized hollows, indicating significant effect of surface morphology on the apatite formation rate except of the intrinsic bone conductivity of the ceramics films.HAp and α-TCP films were obtained also by LCVD at a high deposition rate. Laser power (P_L) showed significant effect on the crystal phase of Ca-P-O films: at P_L=200W α-TCP formed in wide conditions, at P_L=150W α-TCP formed at high temperatures and HAp formed at low temperatures, at P_L=100W HAp in a main phase formed in wide conditions. Any film showed a dense microstructure. The deposition rate increased with increasing the precursor concentration, deposition temperature, laser power and total pressure in chamber (P_<tot>), showing the highest value of 1200μm/h at P_L=200W and P_<tot>=0.6 kPa. Apatite formed on the Hap films prepared by LCVD in Hanks'' solution after 6 hours.In a summary, it is confirmed that CaTiO_3, α-TCP and HAp films can be prepared by chemical vapor deposition, and the effects of preparation conditions on the crystal phase, microstructure and deposition rate were clarified. The CaTiO_3, α-TCP and HAp films prepared by CVD were proved to have excellent bone conductivity by revealing high apatite formation rate in pseudo body solutions.

本研究通过金属有机化学气相沉积（MOCVD）和激光增强CVD（LCVD）制备了钙基氧化物CaTiO_3、α-TCP和HAp薄膜，研究了制备条件对晶相、微观结构和沉积速率的影响。此外，通过汉克斯溶液中磷灰石的形成行为来评估CaTiO_3、α-TCP和HAp薄膜的骨传导性和生物相容性。 6周后,首先通过MOCVD获得了表面光滑的CaTiO_3薄膜,3天后得到了复杂表面的CaTiO_3薄膜,2周后得到了α-TCP薄膜,6小时后形成了HAp薄膜。在微米尺寸的空洞处，表明除了陶瓷膜的固有骨传导性之外，表面形貌对磷灰石形成速率有显着影响。HAp和α-TCP膜也通过以下方法获得高沉积速率下的 LCVD 对 Ca-P-O 薄膜的晶相显示出显着影响：在 P_L=200W 时，在宽条件下形成 α-TCP，在 P_L=150W 时，在高温和 HAp 下形成 α-TCP。在低温下形成，在 P_L=100W HAp 下形成的主相在宽条件下形成，沉积速率随着前驱体浓度、沉积温度的增加而增加。激光功率和腔室总压力 (P_<tot>)，在 P_L=200W 和 P_<tot>=0.6 kPa 时显示出最高值 1200μm/h，之后在 Hanks'' 溶液中通过 LCVD 制备的 Hap 薄膜上形成了磷灰石。 6小时。综上，证实了化学气相沉积法可以制备CaTiO_3、α-TCP和HAp薄膜，以及制备条件对晶体的影响阐明了CVD制备的CaTiO_3、α-TCP和HAp薄膜在假体溶液中的高磷灰石形成率，证明其具有优异的骨传导性。