Vector tactile sensing with single MEMS sensor using resonant frequencyshift

使用谐振频移的单个 MEMS 传感器进行矢量触觉传感

• 批准号: 23656239
• 负责人: YAMASHITA Kaoru
• 金额: $ 2.5万
• 依托单位: Kyoto Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Challenging Exploratory Research
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23656239/
• 关键词: 触覚; 共振; 圧電; MEMS

A new technique for vector tactile sensing with MEMS devices was proposed. While tactile vectors had been conventionally measured with a combination of plural sensor elements each of which detected force in only one direction, the proposed technique enabled a single sensor element to measure a tactile vector based on resonant frequency shift of a vibratory microcantilever. The principle was confirmed in finite element analysis and the cantilever sensors were fabricated and evaluated. It was found that nonlinearity in the frequency response of the sensors drastically affected the tactile vector estimation, and an improved sensor structure to reduce the nonlinearity was designed and fabricated.

提出了一种利用 MEMS 器件进行矢量触觉传感的新技术。虽然传统上是通过多个传感器元件的组合来测量触觉矢量的，每个传感器元件仅检测一个方向上的力，但所提出的技术使得单个传感器元件能够基于振动微悬臂梁的谐振频移来测量触觉矢量。其原理在有限元分析中得到证实，并制造和评估了悬臂梁传感器。研究发现传感器频率响应的非线性极大地影响了触觉矢量估计，因此设计并制造了一种改进的传感器结构以减少非线性。

项目成果

Piezoelectric Vibratory-Cantilever Force Sensors and Axial Sensitivity Analysis for Individual Triaxial Tactile Sensing

• DOI: 10.1109/icsens.2011.6127030
• 发表时间: 2011-10
• 期刊: IEEE Sensors Journal
• 影响因子: 4.3
• 作者: K. Yamashita;Yi Yang;T. Nishimoto;K. Furukawa;M. Noda

Vibratory Mode Design for Precision Improvement of Triaxial Tactile Measurement Using Individual Vibratory Microcantilever Sensor

使用单独振动微悬臂梁传感器进行三轴触觉测量精度提高的振动模式设计

• 发表时间: 2012
• 作者: Yi-Li Pan;T. Noda;K. Sasagawa;T. Tokuda;and J. Ohta;福岡賢明,梶野顕明,安 保宇,井上真澄,藤巻 朗;Yi Yang
• 通讯作者: Yi Yang

共振周波数変化型触覚センシング用圧電カンチレバー構造の設計

谐振频率变化型触觉传感压电悬臂梁结构设计

• 发表时间: 2013
• 作者: T. Noda;K. Sasagawa;T. Tokuda;Y. Terasawa;H. Takashiro;H. Kanda;T. Fujikado;and J. Ohta;紀宏俊
• 通讯作者: 紀宏俊

Piezoelectric Vibratory Microcantilever-type Tactile Sensors and Three-axis Sensitivity by a Single Sensor Element Using Resonant Frequency Shift

压电振动微悬臂梁型触觉传感器和使用谐振频移的单个传感器元件的三轴灵敏度

• 发表时间: 2011
• 作者: 藤沢 匠;他;Yi Yang
• 通讯作者: Yi Yang

Curvature Controlled Microstructures for Improved Triaxial Sensitivity in Piezoelectric Vibratory Cantilever-Type Tactile Sensors Based on Resonant Frequency Shift

基于谐振频移的曲率控制微结构可提高压电振动悬臂梁式触觉传感器的三轴灵敏度

• 发表时间: 2013
• 作者: T. Noda;K. Sasagawa;T. Tokuda;Y. Terasawa;H. Takashiro;H. Kanda;T. Fujikado;and J. Ohta;Hikaru Tanaka
• 通讯作者: Hikaru Tanaka