System for 3D femtosecond laser-based micromachining

基于飞秒激光的 3D 微加工系统

• 批准号: 537273289
• 金额: --
• 依托单位: Technische Universität Ilmenau
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2024
• 资助国家: 德国
• 起止时间: 2023-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/537273289?language=en
• 关键词: System; 3D; femtosecond; laser; based

The precise 3D micromachining of complex glasses and glass ceramics represents an internationally important research area for microsystems technology, but also for the state of Thuringia in terms of its regional innovation strategy. The field of application ranges from microsensors and actuators, optics and precision metrology to lifesciences, energy harvesting and quantum technologies. Reproducible and precise glass micromachining is still a major challenge and is carried out using, for example, fluorine plasma-based processes. However, the creation of 3D structures in glass by these methods is currently only possible to a very limited extent and is disproportionately elaborate. The application therefore aims to acquire a system for resource-saving, fluorine-gas-free and efficient 3D micromachining of glasses and glass ceramics. Using a focused femtosecond laser, glasses can be modified in a highly localized area. 3D processing is performed by guiding the laser focus in 3D, primarily focusing on so-called "selective laser(-induced) etching" (SLE) and hermetic welding of glasses. Secondary are local refractive index modifications, selective material ablation (e.g. metal thin films) and two-photon polymerization (2PP). This allows complex and novel 3D functional structures to be created, which cannot be produced with the processes currently available at the TU Ilmenau, or only with disproportionately high effort. Last but not least, the facility thus also permits new approaches in the design and construction of interdisciplinary microsystems, which are worth exploring. The combination of this laser-based 3D micromachining with the existing research work in the field of plasma-based glass microstructuring, photostructurable glasses and an electron beam-based glass nanostructuring, for which a patent has recently been filed, allows innovative degrees of freedom and thus the implementation of new types of interdisciplinary and cooperative research projects at the TU Ilmenau and the Microsystems Technology Group. The facility will be operated in the clean room laboratory of the Microsystems Technology Group in close proximity to the Center for Micro- and Nanotechnologies (DFG Core Facility) to implement cooperative and interdisciplinary research work in a controlled laboratory environment, which also provides all peripheral technologies. Furthermore, a seamless integration into the ongoing research topics is guaranteed. Of course, the facility will be available for in-house and also external research collaborations.

复杂玻璃和玻璃陶瓷的精确3D微加工代表了微系统技术的国际重要研究领域，也代表了图林基州的区域创新策略。应用领域的范围从微传感器和执行器，光学和精度计量学到生命，能量收集和量子技术。可重现和精确的玻璃微加工仍然是一个重大挑战，是使用基于氟等离子体的过程进行的。但是，目前只能在非常有限的程度上使用这些方法在玻璃中创建3D结构，并且详尽地详细说明。因此，该应用程序旨在获取一种用于节省资源，无氟氟和高效的玻璃和玻璃陶瓷微加工系统的系统。使用集中的飞秒激光器，可以在高度局部的区域进行修饰玻璃。 3D处理是通过引导3D中的激光焦点来进行的，主要集中于所谓的“选择性激光（ - 诱导）蚀刻”（SLE）和玻璃杯的密封焊接。次要是局部折射率修改，选择性材料消融（例如金属薄膜）和两光子聚合（2pp）。这允许创建复杂而新颖的3D功能结构，这不能与当前在Tu Ilmenau上可用的过程产生，或者仅以不成比例的努力而产生。最后但并非最不重要的一点是，该设施还允许在跨学科微型系统的设计和构建中采用新的方法，值得探索。 The combination of this laser-based 3D micromachining with the existing research work in the field of plasma-based glass microstructuring, photostructurable glasses and an electron beam-based glass nanostructuring, for which a patent has recently been filed, allows innovative degrees of freedom and thus the implementation of new types of interdisciplinary and cooperative research projects at the TU Ilmenau and the Microsystems Technology Group.该设施将在Microsystems Technology Group的清洁室实验室经营，靠近微型和纳米技术中心（DFG核心设施），以在受控的实验室环境中实施合作和跨学科研究工作，这也提供了所有外围技术。此外，可以保证与正在进行的研究主题无缝集成。当然，该设施将用于内部和外部研究合作。