System for 3D femtosecond laser-based micromachining

基于飞秒激光的 3D 微加工系统

• 批准号: 537273289
• 金额: --
• 依托单位: Technische Universität Ilmenau
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2024
• 资助国家: 德国
• 起止时间: 2023-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/537273289?language=en
• 关键词: System; 3D; femtosecond; laser; based

The precise 3D micromachining of complex glasses and glass ceramics represents an internationally important research area for microsystems technology, but also for the state of Thuringia in terms of its regional innovation strategy. The field of application ranges from microsensors and actuators, optics and precision metrology to lifesciences, energy harvesting and quantum technologies. Reproducible and precise glass micromachining is still a major challenge and is carried out using, for example, fluorine plasma-based processes. However, the creation of 3D structures in glass by these methods is currently only possible to a very limited extent and is disproportionately elaborate. The application therefore aims to acquire a system for resource-saving, fluorine-gas-free and efficient 3D micromachining of glasses and glass ceramics. Using a focused femtosecond laser, glasses can be modified in a highly localized area. 3D processing is performed by guiding the laser focus in 3D, primarily focusing on so-called "selective laser(-induced) etching" (SLE) and hermetic welding of glasses. Secondary are local refractive index modifications, selective material ablation (e.g. metal thin films) and two-photon polymerization (2PP). This allows complex and novel 3D functional structures to be created, which cannot be produced with the processes currently available at the TU Ilmenau, or only with disproportionately high effort. Last but not least, the facility thus also permits new approaches in the design and construction of interdisciplinary microsystems, which are worth exploring. The combination of this laser-based 3D micromachining with the existing research work in the field of plasma-based glass microstructuring, photostructurable glasses and an electron beam-based glass nanostructuring, for which a patent has recently been filed, allows innovative degrees of freedom and thus the implementation of new types of interdisciplinary and cooperative research projects at the TU Ilmenau and the Microsystems Technology Group. The facility will be operated in the clean room laboratory of the Microsystems Technology Group in close proximity to the Center for Micro- and Nanotechnologies (DFG Core Facility) to implement cooperative and interdisciplinary research work in a controlled laboratory environment, which also provides all peripheral technologies. Furthermore, a seamless integration into the ongoing research topics is guaranteed. Of course, the facility will be available for in-house and also external research collaborations.

复杂玻璃和玻璃陶瓷的精确 3D 微加工代表了微系统技术的国际重要研究领域，也代表了图林根州的区域创新战略。应用领域涵盖微传感器和执行器、光学和精密计量、生命科学、能量收集和量子技术。可重复且精确的玻璃微加工仍然是一个重大挑战，并且是使用基于氟等离子体的工艺等进行的。然而，目前通过这些方法在玻璃中创建 3D 结构的可能性非常有限，而且过于复杂。因此，本申请旨在获得一种资源节约型、无氟气且高效的玻璃和玻璃陶瓷 3D 微加工系统。使用聚焦飞秒激光，可以在高度局部化的区域修改眼镜。 3D 加工是通过在 3D 中引导激光焦点来执行的，主要集中于所谓的“选择性激光（诱导）蚀刻”(SLE) 和玻璃的气密焊接。其次是局部折射率修改、选择性材料烧蚀（例如金属薄膜）和双光子聚合（2PP）。这使得能够创建复杂而新颖的 3D 功能结构，而这些结构无法使用伊尔梅瑙工业大学目前可用的工艺来生产，或者需要付出不成比例的巨大努力才能生产。最后但并非最不重要的一点是，该设施还允许在跨学科微系统的设计和构建方面采用新方法，这是值得探索的。这种基于激光的 3D 微加工与基于等离子体的玻璃微结构、可光结构玻璃和基于电子束的玻璃纳米结构（最近已申请专利）领域的现有研究工作相结合，可实现创新的自由度和因此，伊尔梅瑙工业大学和微系统技术小组实施了新型跨学科和合作研究项目。该设施将在微系统技术集团的洁净室实验室中运行，靠近微纳米技术中心（DFG核心设施），在受控实验室环境中实施合作和跨学科研究工作，该实验室还提供所有外围技术。此外，还保证了与正在进行的研究主题的无缝集成。当然，该设施将可用于内部和外部研究合作。