Fabrication of Advanced In-Pipe Working Micromachine Using Electro-Rheological Fluids

使用电流变流体制造先进的管内工作微型机器

基本信息

批准号：
10555058
负责人：
YOSHIDA Kazuhiro
金额：
$ 8.32万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

项目摘要

To realize advanced in-pipe working micromachines with 10mm in diameter, a simple micro fluid control system is fabricated by using ER (Electro-Rheological) fluids whose apparent viscosity can be controlled by the applied electric field strength.1. Advanced actuator using particle-type ER fluids: A simple advanced actuator METERA (Movable Electrode-Type ER Actuator) is proposed. With applying voltage to movable electrodes between which particle-type ER fluids flow, the movable electrodes are moved by the differential pressure. R-METERA (rotary type) and L-METERA (Linear type) are fabricated and the characteristics are experimentally investigated.2. Micro ER valve using homogeneous ER fluids: A simple microvalve using homogeneous ER fluids is proposed. The microvalve has a pair of parallel plate electrodes and homogeneous ER fluids flow between them. By the applied electric field strength, the differential pressure and flowrate are controlled. Micro ER valves are fabricated by conventional machining and micromachining and the characteristics are experimentally investigated.3. Piezoelectric micropump using resonance drive: As a fluid power source, a high output piezoelectric micropump is proposed. The micropump utilizes large volume change of a bellows caused by resonance with a piezoelectric element and an additional mass. Through experimental investigations, the validity is confirmed.4. Structure of advanced in-pipe working micromachines: A micro position control system composed of a micro ER valve, a piezoelectric micropump using resonance drive and a bellows microactuator is fabricated and the validity is experimentally confirmed. Also, a 3-DOF bending and propelling mechanism is fabricated and tested.

为了实现直径10mm的先进管内工作微型机械，利用ER（电流变）流体制作了一种简单的微流体控制系统，其表观粘度可以通过施加的电场强度来控制。 1．使用颗粒型电流变流体的先进致动器：提出了一种简单的先进致动器 METERA（可移动电极型电流变致动器）。通过向粒子型ER流体在其间流动的可动电极施加电压，可动电极通过压差而移动。制作了R-METERA（旋转型）和L-METERA（直线型）并对其特性进行了实验研究。 2．使用均质 ER 流体的微型 ER 阀：提出了一种使用均质 ER 流体的简单微型阀。微型阀有一对平行板电极，均匀的 ER 流体在它们之间流动。通过施加的电场强度，可以控制压差和流量。采用常规机械加工和微机械加工方法制作了微型ER阀，并对其特性进行了实验研究。 3．使用共振驱动的压电微型泵：作为流体动力源，提出了一种高输出压电微型泵。微型泵利用了由于与压电元件和附加质量的共振而引起的波纹管的大体积变化。通过实验研究，验证了该方法的有效性。 4．先进管内工作微机械的结构：制作了由微型ER阀、采用谐振驱动的压电微型泵和波纹管微执行器组成的微位置控制系统，并通过实验验证了其有效性。此外，还制造并测试了三自由度弯曲和推进机构。