Microscopic Analysis of Surface Hydrogen and its Application to Nano-Fabrication Techniques

表面氢的显微分析及其在纳米加工技术中的应用

• 批准号: 10355002
• 负责人: OURA Kenjiro
• 金额: $ 22.72万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A).
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10355002/
• 关键词: surface hydrogen; surface local process; metal; semiconductor interface; elastic recoil detection analysis; self-organization; hydrogen termination; STM; patterning; 水素生態; 選択エビタキレー; 水素経場

So far, several surface analytical techniques have been applied to obtain average information on surface hydrogen. However, in order to develop nano-fabrication techniques mediated by surface hydrogen, it is desired to establish a novel method that can analyze hydrogen residing locally on the surface. The purpose of this research project is to elucidate the behavior of locally residing surface hydrogen on atomic scale. For this purpose, (A) we have combined newly introduced low-energy elastic recoil detection analysis (LE-ERDA) for quantitative analysis of the amount of surface hydrogen with scanning tunneling microscopy (STM). (B) Using the new apparatus, we have developed understanding of the behavior of locally residing surface hydrogen, and attempted their application to nano-fabrication techniques mediated by surface hydrogen. The new findings worthy of special mention are as follows.(1) With a good grasp of correlation between macroscopic information obtained by LE-ERDA and microscopic information from STM, we analyzed several processes in surface local area induced by hydrogen-mediated surface modification such as surface passivation, structure stabilization, selforganization. In particular, as for the hydrogen-induced self-organization, for metal/semiconductor surfaces such as In/Si (100), Al/Si (100) and Ag/6H-SiC (0001), we found the formation of metal nano-clusters and the peculiar hydrogen-terminated surface phases dependent on the initial surface structure.(2) Based on the above results, we attempted a nano-fabrication of surface local area using hydrogenmediated surface modification processes. We aimed establishment of nano-fabrication processes using local hydrogen extraction by STM.We succeeded in the STM patterning of the Si (100) 4xl-H surface, and found the peculiar local surface phase of the Si (100) c (8x2) on the hydrogen extracted area.These results cause the key of better understanding o the behavior of locally residing surface hydrogen.

到目前为止，已经应用了几种表面分析技术来获取表面氢的平均信息。然而，为了开发由表面氢介导的纳米制造技术，需要建立一种能够分析局部存在于表面的氢的新方法。该研究项目的目的是阐明原子尺度上局部存在的表面氢的行为。为此，（A）我们结合了新推出的低能弹性反冲检测分析（LE-ERDA）与扫描隧道显微镜（STM）对表面氢含量进行定量分析。 (B) 使用新设备，我们了解了局部存在的表面氢的行为，并尝试将其应用于由表面氢介导的纳米制造技术。值得特别提及的新发现如下：(1)通过很好地掌握LE-ERDA获得的宏观信息与STM获得的微观信息之间的相关性，我们分析了氢介导的表面改性引起的表面局部区域的几个过程，例如如表面钝化、结构稳定、自组织。特别是，对于氢诱导自组织，对于In/Si (100)、Al/Si (100)和Ag/6H-SiC (0001)等金属/半导体表面，我们发现金属纳米颗粒的形成-团簇和特殊的氢封端表面相取决于初始表面结构。(2)基于上述结果，我们尝试使用氢介导的表面改性工艺对表面局部区域进行纳米制造。我们的目标是利用STM局部氢萃取建立纳米制造工艺。我们成功地对Si(100)4xl-H表面进行STM图案化，并发现了Si(100)c(8x2)表面奇特的局部表面相。这些结果是更好地理解局部存在的表面氢行为的关键。