Development of Nano-periodic X-ray Multilayer Films for Hard X-ray Optics

用于硬X射线光学的纳米周期X射线多层膜的开发

• 批准号: 18560117
• 负责人: OHNISHI Naoyuki
• 金额: $ 2.39万
• 依托单位: Chubu University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560117/
• 关键词: x-ray multilayer; ion-beam sputtering; x-ray reflectivity; X線反射率; パルスアークプラズマ蒸着

High-precision Pt/C multilayer films for the hard x-ray optical applications were fabricated using ECR ion beam sputtering system. Grazing incidence x-ray reflectometry (GDR) and transmission electron microscopy (TEM) studies were performed for measurement of thin film thickness, and evaluation of multilayer structures. From the result of TEM observations, multilayer film was smoothly laminated with no macroscopic structural defect. For the fitting analysis of GIXR intensity profiles, multiply divided structure models were employed to evaluate the deviation of stacking period. It was demonstrated that the deviation of the period, in the 50 layer-pairs, was less than 0.25% (0.01nm), after a development of deposition conditions.

使用ECR离子束溅射系统制造了用于硬X射线光学应用的高精度PT/C多层膜。进行了放牧的发射率X射线反射法（GDR）和透射电子显微镜（TEM）研究，以测量薄膜厚度，并评估多层结构。从TEM观察结果中，多层膜被平滑地层压，没有宏观结构缺陷。为了对GIXR强度曲线进行拟合分析，采用乘以分裂的结构模型来评估堆叠期的偏差。已经证明，在沉积条件发展后，该周期的偏差小于0.25％（0.01nm）。

项目成果

ECRイオンビームスパッタ法によるPt/C硬X線多層膜の成膜と評価

ECR离子束溅射法沉积Pt/C硬X射线多层膜并评价

• 发表时间: 2007
• 作者: S. Ito;et. al.;神谷 佳裕
• 通讯作者: 神谷 佳裕

Fabrication of Nano-periodic X-ray Multilayer Films by ECR Ion-beam Sputtering

ECR离子束溅射制备纳米周期X射线多层膜

• 发表时间: 2007
• 作者: Y. Kamiya;et. al.
• 通讯作者: et. al.

Epitaxial Growth of Er, Ti Doped LiNbO_3 Films Prepared by Sol-Gel Method

溶胶-凝胶法外延生长Er、Ti掺杂LiNbO_3薄膜

• 发表时间: 2006
• 期刊: Jpn. J. Appl. Phys. Part 1 Vol.45, No.9B
• 作者: M. Takahashi;et. al.
• 通讯作者: et. al.

Epitaxial Growth of Er,Ti Doped LiNbO_3 Films Prepared by Sol-Gel Method

溶胶-凝胶法外延生长Er,Ti掺杂LiNbO_3薄膜

• 发表时间: 2006
• 期刊: Jpn.J.Appl.Phys.Part 1 Vol.45,No.9B
• 作者: 有泉直輝;吉田政弘;鈴木,鶴巻,吉田;有泉,吉田;花岡,吉田;M.Takahashi
• 通讯作者: M.Takahashi

HRTEM Study of Calcium Fluoride Single Crystal Surfaces Processed by Ultraprecision Machining

超精密加工氟化钙单晶表面的 HRTEM 研究

• 发表时间: 2006
• 期刊: Proc. 16th Int. Microscopy Cong. Vol.3
• 作者: M. Takahashi;et. al.;M.Takahashi;N.Ohnishi
• 通讯作者: N.Ohnishi