Nano Machining of Channels by Rubbing at Ultrasonic Frequency Under Control of Surface Fracture at Nano Scale

纳米级表面断裂控制下超声波摩擦通道的纳米加工

• 批准号: 18560067
• 负责人: MURAOKA Mikio
• 金额: $ 2.45万
• 依托单位: Akita University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560067/
• 关键词: Atomic force microscopy; Nano machining at ultrasonic freauency; Concentrated-mass cantilever; Nano channel; Shear force control; Second mode of flexural vibration; Nano machining of groove; Cyclic rubbing of tip; 超音波加工; 走査型プローブ顕微鏡

The aim of this project is to present a method of nano machining by rubbing at ultrasonic frequency and to show the ability of fabrication of nano channels and the application. The results are summarized as follows:1. Concentrated-mass cantilever for nano machiningWe developed a unique cantilever for nano machining. The cantilever has a rod-like mass on the tip equipped at the free end. The attached mass enhances the moment of inertia in addition to the translational inertia. In the second mode of flexural vibration, the free end of the cantilever behaves like a pined end due to the inertia of the attached mass. The vertical motion of the tip is depressed and the tip rotates around the gravitational center of the attached mass. The tip apex vibrates laterally and is able to sense interactive shear force between the tip apex and a sample surface. When the moment of inertia of the attached mass is 4 times larger than that of the cantilever, the dynamics of the concentrated-mass cantilever becomes the same as that the one-freedom mass-spring system even in the case that the tip is bought into contact with a sample surface. This means that the concentrated-mass cantilever is able to provide sufficient rubbing force when it is used in the cyclic contact mode.2. Nano-machining of channelsAlthough the vertical motion of the free end of the cantilever is depressed, the deflection angle can be detected. The normal operation mode for cyclic contact was applied to the concentrated-mass cantilever, where the shear force was controlled. We demonstrated fabrication of nano channels with a width of a few hundreds of nanometers and a depth of a few tens of nanometers on a resin surface.

该项目的目的是提出一种通过超声频率摩擦进行纳米加工的方法，并展示纳米通道的制造能力和应用。研究结果如下： 1．用于纳米加工的集中质量悬臂梁我们开发了一种独特的用于纳米加工的悬臂梁。悬臂的自由端配备有尖端上的杆状质量。除了平移惯性之外，附加质量还增强了惯性矩。在弯曲振动的第二种模式中，由于附着质量的惯性，悬臂的自由端表现得像销钉端。尖端的垂直运动被抑制，并且尖端绕所附质量的重心旋转。尖端顶点横向振动，并且能够感测尖端顶点和样品表面之间的交互剪切力。当附着质量的转动惯量比悬臂的转动惯量大4倍时，即使在尖端被买进的情况下，集中质量悬臂的动力学也变得与一自由度质量弹簧系统相同。与样品表面接触。这意味着集中质量悬臂梁在循环接触模式下使用时能够提供足够的摩擦力。 2．通道纳米加工虽然悬臂自由端的垂直运动被压低，但可以检测到偏转角度。循环接触的正常操作模式应用于集中质量悬臂梁，其中剪切力受到控制。我们展示了在树脂表面制造宽度为几百纳米、深度为几十纳米的纳米通道。

项目成果

Residual-Strain-Induced Nanocoils of Metallic Nanowires

金属纳米线的残余应变诱导纳米线圈

• 发表时间: 2008
• 期刊: Journal of Nanoscience and Nanotechnology 8
• 作者: M. Muraoka(N. Settsu;M. Saka)
• 通讯作者: M. Saka)

Vibraitonal dynamics of concentrated-mass cantilevers in atomic force acoustic microscopy: Presence of modes with selective enhancement of vertical or lateral tip motion

原子力声学显微镜中集中质量悬臂的振动动力学：选择性增强垂直或横向尖端运动的模式的存在

• 发表时间: 2007
• 期刊: J. Phys.: Conf. Ser. 61
• 作者: M.;Muraoka
• 通讯作者: Muraoka

シアフォース制御下の超音波ナノマシーニング

剪切力控制下的超声纳米加工

• 发表时间: 2006
• 期刊: 2006年度精密工学会東北支部学術講演会講演論文集
• 作者: 石川広美;岡村幹夫
• 通讯作者: 岡村幹夫

Nano Machining by Rubbing at Ultrasonic Frequency under Controlled Shear Force

在受控剪切力下通过超声波摩擦进行纳米加工

• 发表时间: 2006
• 期刊: Proc. International Conference on Advanced Mechanical Engineering and Mechanics 2006(CD-ROM) SD73
• 作者: Y.Ju (T.Kobayashi;H.Soyama);B. -F. Ju (Y. Ju and M. Saka);B. -F. Ju (Y. Ju and M. Saka);B.-F. Ju(Y. Ju and M. Saka);M. Saka(R. Nakanishi);M. Muraoka(H. Ishikawa)
• 通讯作者: M. Muraoka(H. Ishikawa)

Vibrational Dynamics of Concentrated-Mass Cantilevers in Atomic Force Acoustic Microscopy : Presence of Modes with Selective Enhancement of Vertical or Lateral Tip Motion

原子力声学显微镜中集中质量悬臂的振动动力学：选择性增强垂直或横向尖端运动的模式的存在

• 发表时间: 2007
• 期刊: Journal of Physics : Conference Series 61
• 作者: M. Muraoka