Study on Functional Surface Formation by Liquid Cluster Ion Beams

液态团簇离子束形成功能表面的研究

基本信息

批准号：
16360152
负责人：
TAKAOKA Gikan
金额：
$ 9.02万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2006
项目状态：
已结题

项目摘要

A cluster is an aggregate of a few tens to several thousands of atoms, and constitutes a new phase of matter, with significantly different properties than solids, liquids and gases. They are tiny particles, which are in a position to a link between atomic state and bulk state. Cluster beams are useful tools for the investigation of the fundamentals of solid state physics, chemistry and related materials science. In this study, we have developed a liquid cluster ion beam system, and have produced liquid clusters such as alcohol, water and paraffin clusters by adiabatic expansion phenomenon. Furthermore, we have applied the liquid cluster ion beam technique to various industrial fields such as electric and electronic engineering, optical and mechanical engineering, and chemical engineering.In order to clarify the interactions of the liquid cluster ions with solid surfaces such as Si(100), Si0_2 and/or metal surfaces, sputtering and cleaning effects were investigated using the time-of-flight and the retarding potential methods. The physical and chemical sputtering, which was much enhanced by the liquid cluster ion irradiation, was different depending on the species of the cluster and the substrate materials. For example, for the chemical sputtering of the Si surfaces by the ethanol cluster ion beams, the energy per molecule in a cluster was of much importance, and the optimum energy range was between 1 eV/molecule and 10 eV/molecule. For the case of Au surfaces, the sputtered depth decreased with the increase of the retarding voltage, and the physical sputtering was influenced by the minimum size of the cluster. Thus, the surface reaction dynamics between the liquid clusters and the surface atoms were significantly different from that of conventional wet processes.

团簇是几十到几千个原子的集合体，构成物质的新相，其性质与固体、液体和气体显着不同。它们是微小的粒子，处于原子态和体态之间的联系。簇束是研究固体物理、化学和相关材料科学基础知识的有用工具。在这项研究中，我们开发了一种液体团簇离子束系统，并通过绝热膨胀现象产生了液体团簇，例如酒精、水和石蜡团簇。此外，我们已将液体团簇离子束技术应用于电气和电子工程、光学和机械工程、化学工程等各个工业领域。为了阐明液体团簇离子与固体表面（例如Si（100）的相互作用）使用飞行时间和延迟电位方法研究了 SiO_2 和/或金属表面、溅射和清洁效果。液体簇离子辐照大大增强了物理和化学溅射，该溅射根据簇的种类和基底材料而不同。例如，对于乙醇簇离子束对硅表面的化学溅射，簇中每个分子的能量非常重要，最佳能量范围在1 eV/分子到10 eV/分子之间。对于Au表面的情况，溅射深度随着延迟电压的增加而减小，并且物理溅射受到团簇最小尺寸的影响。因此，液体团簇和表面原子之间的表面反应动力学与传统的湿法工艺显着不同。

项目成果

期刊论文数量（26）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Size Analysis of Ethanol Cluster Ions and Their Sputtering Effects on Solid Surfaces

乙醇簇离子的尺寸分析及其对固体表面的溅射效应

DOI：
发表时间：
2006
期刊：
Proc. 16th Int Conf. on Ion Implant. Technol.(AIP)
影响因子：
0
作者：
G.H.Takaoka;M.Kawashita et al.
通讯作者：
M.Kawashita et al.

Formation of Almost Delta-Layered Nanoparticles in SiO_2 Thin Film on Si Substrate by Metal Negative-Ion Implantation

金属负离子注入在Si衬底上SiO_2薄膜中形成近δ层状纳米粒子

DOI：
发表时间：
2005
期刊：
Nuclear Instruments and Methods in Physics Research B 237
影响因子：
0
作者：
G.H.Takaoka;M.Kawashita et al.;J.Ishikawa et al.
通讯作者：
J.Ishikawa et al.

Photocatalytic Properties of TiO_2 Films Prepared by O_2 Cluster Ion Beam Assisted Deposition Method

O_2簇离子束辅助沉积法制备TiO_2薄膜的光催化性能

DOI：
发表时间：
2005
期刊：
Proc.15^<th> Int.Workshop on Inelastic Ion-Surface Collisions, IISC-15 (発表予定)
影响因子：
0
作者：
G.H.Takaoka;M.Kawashita et al.
通讯作者：
M.Kawashita et al.

interactions of Argon Cluster Ion Beams with Silicon Surfaces

氩团簇离子束与硅表面的相互作用