Absolute surface figure measurement of aspherical surfaces with diffracted wavefronts as reference waves emitted from two optical fibers

以衍射波前作为从两根光纤发射的参考波对非球面进行绝对面形测量

• 批准号: 16360067
• 负责人: KATAOKA Toshihiko
• 金额: $ 8.06万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360067/
• 关键词: point diffraction interferometry; phase-shifting interferometry; single-mode optical fiber; absolute surface figure measurement; aspherical surface measurement; fiber optic plate; measurement error; spherical diffraction wave; 非球面観測; 点回折球面波干渉計

In this year, we have concentrated on to prevent unwanted interference fringes which occurs in phase-shifting interferometry of PS/PDI system. The interference fringes used in PS/PDI are projected on FOP (Fiber Optic Plate). The FOP is used to transfer the interference fringes from its front surface to rear surface. The FOP consists of a large number of optical fibers bundled together. Coherency of the transferred interference fringes decreased at the rear surface of FOP. Therefore CCD image of the fringes did not contain the unwanted fringes or patterns caused by end reflection of optics. Source of vibration was removed by using (1) CCD camera with electronic shutter, and (2) redesigning of shifting program for PZT stage. As a result, repeatability of concave mirror (diameter:200mm, ROC: 1500mm) measurement was estimated to be 0.38nm rms.With the results described above, we have tried to estimate measurement error of the PS/PDI system by phase shifting interferometry between two diffr … More acted waves emitted from optical fibers. As a result, b y removing (1) specifically-patterned error caused by FOP, and (2) fringe error caused by mechanical vibration of experimental environment, the measurement error of the PS/PDI was estimated to be 0.35nm rms. This value may not decrease until we protect an emergent mechanical vibration during the measurement procedure.In principle, the PS/PDI does not give us absolute surface figure directly in the measurement of aspherical surfaces because of a huge distortion of the diagnostic wavefront. Therefore we have tried to reconstruct the absolute surface figure using the PS/PDI result. We have made an original phase diagnostic program based on Helmholtz-Kirchhoff integral theorem. This program reconstructs very spherical surface figure using the result of PS/PDI and an intensity distribution of diagnostic spherical wavefront which reflected on the sample mirror. In the near future, an effectiveness of the program will be checked in the measurement of actual surface such as parabolic reflector. Less

今年，我们致力于防止PS/PDI系统中的相移干涉测量中出现不必要的干涉条纹。PS/PDI中使用的干涉条纹被投射到FOP（光纤板）上，FOP用于传输。 FOP由大量捆绑在一起的光纤组成，传输的干涉条纹的相干性在FOP的后表面降低。通过使用 (1) 带电子快门的 CCD 相机，以及 (2) 重新设计 PZT 平台的移动程序，消除了由光学器件末端反射引起的不需要的条纹或图案。凹面镜（直径：200mm，ROC：1500mm）测量的重复性估计为0.38nm rms。根据上述结果，我们尝试估计了凹面镜的测量误差PS/PDI 系统通过两个扩散器之间的相移干涉测量光纤发射的波，从而消除 (1) 由 FOP 引起的特定图案误差，以及 (2) 由实验环境的机械振动引起的条纹误差。 ，PS/PDI 的测量误差估计为 0.35nm rms，除非我们在测量过程中保护紧急机械振动，否则该值可能不会减小。原则上，PS/PDI 不会给我们带来影响。由于诊断波前的巨大畸变，直接在非球面测量中使用绝对面形，因此我们尝试使用PS/PDI结果重建绝对面形，我们制作了基于Helmholtz-Kirchhoff的原始相位诊断程序。该程序使用 PS/PDI 的结果和样本镜上反射的诊断球面波前的强度分布来重建非常球形的表面形状。在不久的将来，将在该程序中检查该程序的有效性。抛物面反射器等实际表面的测量 较少。

项目成果

Development of PS-PDI (Phase-Shifting Point Diffraction Interferometer) with optical fibers and FOW (Fiber Optic Window) as projection plane for absolute surface figure measurement of large apertured optics (in Japanese)

开发以光纤和 FOW（光纤窗口）为投影面的 PS-PDI（移相点衍射干涉仪），用于大孔径光学器件的绝对面形测量（日语）

• 发表时间: 2006
• 期刊: Proc. of fall meet of JSPE 2006 161
• 作者: 岡垣覚;中村崇亮;松浦敏晋;片岡俊彦;押鐘寧;井上晴行;中野元博;T.Matsuura et al.;T.Nakamura et al.;S.Okagaki et al.
• 通讯作者: S.Okagaki et al.

Development of PS-PDI (Phase-Shifting Point Diffraction Interferometer) with optical fibers and FOW (Fiber Optic Window) for absolute surface figure measurement (in Japanese)

开发用于绝对表面形状测量的光纤和 FOW（光纤窗口）PS-PDI（相移点衍射干涉仪）（日语）

• 发表时间: 2006
• 期刊: Proc. of annual meet of JSPE Kansai division 2006 B03
• 作者: 岡垣覚;中村崇亮;松浦敏晋;片岡俊彦;押鐘寧;井上晴行;中野元博;T.Matsuura et al.;T.Nakamura et al.
• 通讯作者: T.Nakamura et al.

FOW(Fiber Optic Window)投影面を用いた大口径ミラー絶対形状計測用ファイバ型PS-PDI(Phase-Shifting Point Diffraction Interferometer)装置の開発

开发利用FOW（光纤窗口）投影面测量大口径反射镜绝对形状的光纤型PS-PDI（移相点衍射干涉仪）装置

• 发表时间: 2006
• 期刊: 2006年度精密工学会秋季大会学術講演会 講演論文集
• 作者: 岡垣覚;中村崇亮;松浦敏晋;片岡俊彦;押鐘寧;井上晴行;中野元博
• 通讯作者: 中野元博

Absolute Figure Measurement of A Large Apertured Mirror by Point Diffraction Interferometer with Optical Fiber Sources

光纤源点衍射干涉仪对大孔径镜的绝对图形测量

• 发表时间: 2004
• 期刊: Proc. of fall meet of JSPE 2005 N14
• 作者: 押鐘寧;片岡俊彦;中村崇亮;井上晴行;中野元博;Y.Oshikane et al.
• 通讯作者: Y.Oshikane et al.

Development of PS-PDI (Phase-Shifting Point Diffraction Interferometer) with optical fibers -Estimation of measurement errors by interference between two spherical diffracted waves from optical fibers-(in Japanese)

使用光纤开发 PS-PDI（移相点衍射干涉仪） -通过光纤发出的两个球面衍射波之间的干涉来估计测量误差 -（日语）

• 发表时间: 2007
• 期刊: Proc. of spring meet of JSPE 2007 G25
• 作者: 松浦敏晋;岡垣覚;中村崇亮;押鐘寧;井上晴行;中野元博;片岡俊彦;T.Matsuura et al.;T.Matsuura et al.
• 通讯作者: T.Matsuura et al.