Evaluation of tribological properties of thin hard coatings by a slurry jet erosion test and its application to surface processing

通过浆料喷射侵蚀试验评估薄硬涂层的摩擦学性能及其在表面加工中的应用

基本信息

批准号：
15360083
负责人：
IWAI Yoshiro
金额：
$ 7.36万
依托单位：
University of Fukui
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

项目摘要

We proposed slurry jet, a new type of solid particle erosion test, in order to quickly evaluate tribological properties of thin hard coatings. The slurry jet with 1μm alumina particles were impacted at high velocity perpendicular to thin PVD coatings.(1) The TiN deposited under the highest substrate temperature proved to have the highest wear resistance although it had a relatively low hardness, The wear rate varies with the TiN grain orientation, i.e. the {111} orientation shows higher wear resistance than the {100}, which correlates to a correspondingly higher cleavage fracture resistance within each grains.(2) The ranking of MSE wear resistance for CrN deposited by different conditions show good correlation to their ratio of micro hardness to elastic modulus (H/E).(3) For the TiN/TiCN coating, the wear rate of TiN of the TiN/TiCN coating coincided to that of the singlelayerd TiN. However, TiN/TiCN coatings by the different deposition system showed discontinuous wear curves which were characterized by TiN, TiCN coatings and their interface. The differences in the wear properties between the coatings may be caused by the original surface morphology.(4) We set up a new type of MSE test apparatus (pot type tests) which can obtain the wear volume per unit weight of erodent. As a result, it generates reproducible results.(5) The ranking of wear resistance among the various coatings was compared with those obtained by other coating evaluation tests such as micro abrasion test.As a result, our proposed micro slurry jet erosion (MSE) test proved to be very useful as a screening test when evaluating the properties of hard thin coatings. In addition, we tried to produce the surface textures of the glass surface by our MSE method and the possibility of processing was concluded.

我们提出了浆料射流，一种新型的固体颗粒侵蚀试验，以快速评估薄硬质涂层的摩擦学性能，以1μm氧化铝颗粒的浆料射流垂直于薄PVD涂层进行高速冲击。（1）TiN沉积。在最高基体温度下，虽然硬度较低，但具有最高的耐磨性，磨损率随TiN晶粒取向的不同而变化，即{111}取向比TiN取向表现出更高的耐磨性。 {100}，这与每个晶粒内相应较高的解理断裂抗力相关。(2)不同条件沉积的CrN的MSE耐磨性排名与其显微硬度与弹性模量(H/E)之比具有良好的相关性。 (3) 对于TiN/TiCN涂层，TiN/TiCN涂层的磨损率与单层TiN的磨损率一致，但不同沉积体系的TiN/TiCN涂层表现出磨损率。以TiN、TiCN涂层及其界面为特征的不连续磨损曲线。涂层之间磨损性能的差异可能是由原始表面形貌引起的。(4)建立了新型MSE测试装置(罐式测试)。），可以获得每单位重量的侵蚀物的磨损量，从而产生可重复的结果。（5）将各种涂层的耐磨性排名与其他涂层评价测试（例如微磨损）进行比较。结果，我们提出的微浆料喷射侵蚀（MSE）测试被证明作为评估硬薄涂层性能的筛选测试非常有用。此外，我们尝试通过我们的方法产生玻璃表面的表面纹理。总结了MSE方法和处理的可能性。