Evaluation of tribological properties of thin hard coatings by a slurry jet erosion test and its application to surface processing

通过浆料喷射侵蚀试验评估薄硬涂层的摩擦学性能及其在表面加工中的应用

基本信息

批准号：
15360083
负责人：
IWAI Yoshiro
金额：
$ 7.36万
依托单位：
University of Fukui
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

项目摘要

We proposed slurry jet, a new type of solid particle erosion test, in order to quickly evaluate tribological properties of thin hard coatings. The slurry jet with 1μm alumina particles were impacted at high velocity perpendicular to thin PVD coatings.(1) The TiN deposited under the highest substrate temperature proved to have the highest wear resistance although it had a relatively low hardness, The wear rate varies with the TiN grain orientation, i.e. the {111} orientation shows higher wear resistance than the {100}, which correlates to a correspondingly higher cleavage fracture resistance within each grains.(2) The ranking of MSE wear resistance for CrN deposited by different conditions show good correlation to their ratio of micro hardness to elastic modulus (H/E).(3) For the TiN/TiCN coating, the wear rate of TiN of the TiN/TiCN coating coincided to that of the singlelayerd TiN. However, TiN/TiCN coatings by the different deposition system showed discontinuous wear curves which were characterized by TiN, TiCN coatings and their interface. The differences in the wear properties between the coatings may be caused by the original surface morphology.(4) We set up a new type of MSE test apparatus (pot type tests) which can obtain the wear volume per unit weight of erodent. As a result, it generates reproducible results.(5) The ranking of wear resistance among the various coatings was compared with those obtained by other coating evaluation tests such as micro abrasion test.As a result, our proposed micro slurry jet erosion (MSE) test proved to be very useful as a screening test when evaluating the properties of hard thin coatings. In addition, we tried to produce the surface textures of the glass surface by our MSE method and the possibility of processing was concluded.

我们提出了一种新型的固体颗粒侵蚀测试，以快速评估薄硬涂层的摩擦学特性。具有1μm氧化铝颗粒的浆液射流在垂直于薄PVD涂层的高速度上受到影响。（1）在最高的底物温度下沉积的锡锡具有最高的耐磨性，尽管它具有相对较低的硬度，尽管其磨损速率具有相对较高的磨损速率，而与锡晶晶体方向相关。（2）通过不同条件沉积的CRN的MSE耐磨性排名与它们的微硬度与弹性模量的比率良好相关（H/E）。然而，不同沉积系统的锡/ticn涂层表明，不连续的磨损曲线以锡，tiCN涂层及其界面为特征。涂层之间的磨损特性差异可能是由原始表面形态引起的。（4）我们建立了一种新型的MSE测试设备（POT类型测试），该设备可以获得每单位重量较轻的磨损量。结果，它产生了可再现的结果。（5）将各种涂层中的耐磨性排名与其他涂层评估测试（例如微磨损测试）获得的耐磨性的排名。结果，我们提出的微浆液射流侵蚀（MSE）测试被证明是非常有用的，可以作为筛选测试在评估硬涂层的特性时非常有用。此外，我们试图通过MSE方法产生玻璃表面的表面纹理，并结束了处理的可能性。