Study of nanostructure formation processes on thin film surfaces irradiated with femtosecond laser pulses and development of its physical model

飞秒激光脉冲照射薄膜表面纳米结构形成过程的研究及其物理模型的建立

基本信息

批准号：
15360030
负责人：
MIYAZAKI Kenzo
金额：
$ 9.73万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

项目摘要

For the purposes of developing a new nanotechnology using femtosecond (fs) lasers, this research project was aiming at making clear experimental conditions and constructing a physical model for the periodic nanostructure formation and the selective change in bonding structure that we have recently found on hard thin films irradiated with fs laser pulses. The main results obtained are as follows.・The nanostructure size observed was λ/10〜λ/5 of the laser wavelength λ when fs laser pulses were irradiated on the thin films such as TiN and diamond-like carbon (DLC) at a low fluence near ablation threshold. We have shown that the nanostructure and its size could be controlled with the laser polarization, wavelength and fluence.・In addition, we have found that the DLC consisting of sp^3 and sp^2 can be modified into the conductive glassy carbon (GC) through the selective transition of sp^3 into sp^2 under almost the same experimental condition as for the nanostructure formation.・Reflectivity of DLC film surface was measured as a function of fluence and laser pulse shots. The results have shown that the reflectivity change is closely associated with the nanostructure formation, and that the superimposed laser shots and resulting incubation effect mainly contribute to the nanostructure formation.・The reflectivity of DLC was also measured using a pump and probe technique. The results have shown a characteristic reflectivity change due to the formation of a grating on the surface, where the selective change in the bonding structure from sp^3 to sp^2 induces a swelling of the film surface.・The measurements have demonstrated that the nanostructure formation on the DLC surface is certainly preceded by the change in the bonding structure.・On the basis of the experimental results obtained we have been developing a physical model for the nanostructure formation that relies on a localized field created in the interaction.

为了使用飞秒（FS）激光器开发新的纳米技术，该研究项目的目的是制定明确的实验条件，并为周期性纳米结构形成和粘合结构的选择性变化构建物理模型，我们最近在用FS激光脉冲辐射的硬薄膜上发现了粘结结构。所获得的主要结果如下。・当FS激光脉冲在薄膜（如TIN和钻石样碳（DLC））附近的低频阈值接近时，观察到的纳米结构尺寸为激光波长λ的λ/10〜λ/5。我们已经表明，纳米结构及其尺寸可以通过激光极化，波长和速度来控制。此外，我们发现，由SP^3和SP^2组成的DLC可以通过将SP^3的sp^3的sp^3中的sp^3变成sp^2的实验性distion distion distion diestion diveriention dive dive。通量和激光脉冲射击的功能。结果表明，反射率的变化与纳米结构的形成密切相关，并且叠加激光射击和产生的孵育效果主要有助于纳米结构的形成。・还使用泵和探测技术测量了DLC的反射率。结果表明，由于表面上的栅格的形成导致了特征的反射率变化，在这种情况下，从sp^3到sp^2的粘结结构的选择性变化会导致膜表面肿胀。・测量结果表明，纳米结构在DLC表面上的纳米结构形成肯定是在粘结结构中的变化，而在实验上取得了实验。这取决于在交互中创建的局部字段。

项目成果

期刊论文数量（94）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Nanoscale modification of DLC film surfaces with femtosecond laser pulses

用飞秒激光脉冲对 DLC 薄膜表面进行纳米级改性

DOI：
发表时间：
2004
期刊：
Proceedings of SPIE 5662
影响因子：
0
作者：
N.Yasumaru;K.Miyazaki;J.Kiuchi;H.Magara
通讯作者：
H.Magara

Femtosecond-laser- induced alignment in Coulomb explosion of nitrogen molecules

氮分子库仑爆炸中的飞秒激光诱导排列

DOI：
发表时间：
2003
期刊：
Proc.CLEO/Pacific Rim 2003 (Nat.Taiwan Unv.Taipei, 2003)
影响因子：
0
作者：
N.Yasumaru;et al.;N.Yasumaru et al.;K.Miyazaki et al.;N.Yasumaru et al.;N.Yasumaru et al.;K.Miyazaki et al.;N.Yasumaru et al.;N.Yasumaru et al.;K.Miyazaki et al.
通讯作者：
K.Miyazaki et al.

Materials control with high-intensity femtosecond laser pulses. I. Ultrafast alignment of molecules and its real-time detection

使用高强度飞秒激光脉冲进行材料控制。