Control of hydrogen content in the carbon nitride materials and its development to the field emission devices based on the high-resolution laser spectroscopy

氮化碳材料中氢含量的控制及其基于高分辨率激光光谱的场发射器件的开发

基本信息

批准号：
14550721
负责人：
ITO Haruhiko
金额：
$ 2.62万
依托单位：
Nagaoka University of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

项目摘要

The present study aims to optimize the electric-field-emission property of hydrogenated amorphous carbon nitrides (a-CN_x : H) by controlling the quantity of the hydrogen atoms contained. Carbon nitrides including negligible amount of hydrogen atoms have a property of mechanical hardness. On the other hand, those include hydrogen atoms are, in general, mechanically soft : they have excellent electric-field emission characteristic when the hydrogen atoms are included in the forms of the NH or OH groups. In particular, the hybridized material which consists of the electrically-conducting Al-doped ZnO single-crystal whiskers (Fig.1) coated by the a-CN_x : H or a-CN_x : O : H thin films has a possibility of the FED device. In addition, a-CN_x : H materials containing CH_n(n=1-3) groups have the hydrogen-storage characteristic. Therefore, the control of the hydrogen quantity in the a-CN_x : H or a-CN_x : O : H materials is the key technology to synthesize the materials having the physical p … More roperties hoped.In the present study, carbon nitrides are synthesized by using the plasma enhanced CVD processes by applying the decomposition of cyanides such as BrCN and CH_3CN with the microwave or ECR plasmas of rare gases. In 2004, following studies are made. (1)The decomposition process of BrCN by the microwave-discharged products of Ar and the formation and quenching processes of the precursor CN radicals were investigated based on the laser-induced fluorescence (LIF) spectroscopy and the electrostatic-probe method. The dominant process of decomposition of BrCN is the charge transfer from Ar^+ followed by the BrCN^+-e^-recombination. The dominant quenching process of CN radicals is the reaction with unreacted BrCN. (2)The sticking probability (s) of the CN radicals onto the a-CN_x : H film was determined from the LIF spectroscopy of CN radicals, flow speed, and the weight of the a-CN_x : H film deposited. The s value is in the range of 0.032-0.019 being negatively dependent on the pressure of Ar in the range of 0.3-0.7 Torr. This negative pressure dependence of s can be explained by the reactivity of the CN radicals on the film surface. (3)ECR plasma CVD of the mixed gases of He and BrCN was found to be effective for the synthesis of a-CN_x : O : H with the hydrogen amount in a controlled fashion. Less

本研究旨在通过控制所含氢原子的数量来优化氢化无定形碳氮化物（a-CN_x：H）的电场发射性能，包含可忽略量的氢原子的碳氮化物具有机械硬度的特性。另一方面，包含氢原子的那些通常是机械软的：当氢原子以NH或OH基团的形式包含时，它们具有优异的电场发射特性。特别是杂化材料。由涂有a-CN_x：H或a-CN_x：O：H薄膜的导电Al掺杂ZnO单晶晶须（图1）组成，具有FED器件的可能性。含有CH_n(n=1-3)基团的-CN_x:H材料具有储氢特性，因此控制a-CN_x:H或a-CN_x:中的氢量。 O : H材料是合成具有人们希望的物理性能的材料的关键技术。本研究采用等离子增强CVD工艺，通过分解BrCN和CH_3CN等氰化物来合成氮化碳。 2004年，对稀有气体的微波或ECR等离子体进行了以下研究：(1)微波放电产物Ar的分解过程及生成和形成。基于激光诱导荧光（LIF）光谱和静电探针方法研究了前体 CN 自由基的猝灭过程。BrCN 分解的主要过程是 Ar^+ 的电荷转移，然后是 BrCN^+-e。 CN自由基的主要猝灭过程是与未反应的BrCN的反应(2)CN自由基在a-CN_x上的粘附概率(s)。：H 膜由 CN 自由基的 LIF 光谱、流速和沉积的 a-CN_x ：H 膜的重量确定。s 值在 0.032-0.019 范围内，与 Ar 中的压力负相关。范围为 0.3-0.7 Torr。 s 的这种负压依赖性可以通过混合膜表面的 CN 自由基的反应性来解释。研究发现，He 和 BrCN 气体对于以受控方式合成 a-CN_x : O : H 是有效的。

项目成果

期刊论文数量（19）

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伊藤治彦, 二木裕史, 並木恵一, 伊藤典子, 斎藤秀俊: "Hydrogenated Amorphous Carbon Nitride Films Formed from the Dissociative Excitation Reaction of CH_3CN with the Microwave-Discharge Flow of Ar : Correlation of the [N]/([N]+[C]) Ratio with the Relative Number Densities of th

Haruhiko Ito、Hiroshi Niki、Keiichi Namiki、Noriko Ito、Hidetoshi Saito：“CH_3CN 的解离激发反应与 Ar 微波放电流形成的氢化非晶氮化碳薄膜：[N]/([N] + [C]) 与相对数密度的比率

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伊藤治彦, 三木裕史, 伊藤治彦: "Dependence of the Electronic Transition Moment for the C^3Δ-X_3Δ System of TiO on the Internuclear Distance"Chemical Physics Letters. 370巻. 62-67 (2003)

Haruhiko Ito、Hiroshi Miki、Haruhiko Ito：“TiO 的 C^3Δ-X_3Δ 系统的电子跃迁矩对核间距离的依赖性”化学物理快报 370. 62-67 (2003)。

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Work function of amorphous carbon nitride with various functional groups

DOI：
10.1143/jjap.41.6169
发表时间：
2002-10-01
期刊：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
影响因子：
0
作者：
Saitoh, H;Akasaka, H;Ito, H
通讯作者：
Ito, H

Hydrogen Storage in Amorphous Phase of Hydrogenated Carbon Nitride

氢化碳氮化物非晶相储氢