SMART MICRO CHIP BY SELECTIVE GROWN Si-MICROPROBE ELECTRODE ARRAY ON INTEGRATED CIRCUIT

集成电路上选择性生长硅微探针电极阵列的智能微芯片

基本信息

批准号：
14205044
负责人：
ISHIDA Makoto
金额：
$ 31.03万
依托单位：
Toyohashi University of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14205044/
关键词：
Smart chip Microprobe electrode Single crystalline silicon probe array Vapor-liquid-solid growth Analysis of neurons Retina, neuroscience MOSFET on Si(111)Micro-Nano technology 細胞電立計測単結晶シリコンプローブレイ網膜,脳科学

项目摘要

Study of nervous system by highly complex structures is a key problem in modern neuroscience. Understanding of nervous systems involves analysis of the great number of neurons in the tissue. Here we proposed a new electrode device, which is a high-density penetrating silicon (Si) microprobe electrode array, each with diameter similar to neuron, by selective Si growth using catalytic-gold (Au) and disilane (Si_2H_6) gas source. Diameter, position, and length of the Si probes were controlled. The diameter and density were reduced by 1/10, respectively, compared with previous microelectrodes. Low conductance of the probes was realized, and the mechanical strength of the probe was enough to withstand the neural penetration. In addition, the Si microprobes were fabricated on integrated circuits (IC), improving the performance of the electrode device. We also show the first neural recording demonstrated with a retina of carp (Cyrpinus carpio). Consequently, the Si probes recorded neural signals in the retina. In neuroscience, the Si microprobe array chip becomes an effective technique to provide accurate information from the neurons and allow understanding the mechanism of nervous system.

通过高度复杂的结构研究神经系统是现代神经科学的一个关键问题。对神经系统的理解涉及对组织中大量神经元的分析。在这里，我们提出了一种新的电极装置，它是一种高密度穿透硅（Si）微探针电极阵列，每个电极阵列的直径与神经元相似，通过使用催化金（Au）和乙硅烷（Si_2H_6）气源选择性生长硅。控制硅探针的直径、位置和长度。与之前的微电极相比，直径和密度分别减小了1/10。实现了探针的低电导，并且探针的机械强度足以承受神经穿透。此外，硅微探针被制作在集成电路（IC）上，提高了电极装置的性能。我们还展示了鲤鱼（Cyrpinus carpio）视网膜的第一个神经记录。因此，硅探针记录了视网膜中的神经信号。在神经科学领域，硅微探针阵列芯片成为一种有效的技术，可以提供来自神经元的准确信息并帮助了解神经系统的机制。

项目成果

期刊论文数量（96）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Selective vapor-liquid-solid epitaxial growth of micro-SI probe electrode arrays with on-chip MOSFETs on Si(111) substrates

DOI：
10.1109/ted.2003.822473
发表时间：
2004-03-01
期刊：
IEEE TRANSACTIONS ON ELECTRON DEVICES
影响因子：
3.1
作者：
Kawano, T;Kato, Y;Ishida, M
通讯作者：
Ishida, M

Fabrication of varying-length micro Si probe arrays for neural activity recording by vapor-liquid-solid growth method

气液固生长法制备用于神经活动记录的不同长度微硅探针阵列

DOI：
发表时间：
2003
期刊：
The Japan Society of Applied Physics (The 50th Spring meeting) No.3
影响因子：
0
作者：
Ryoji Tani;Takeshi Kawano;Hiroshi Ishino;Hidekuni Takao;Kazuaki Sawada;Makoto Ishida
通讯作者：
Makoto Ishida

Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording

用于神经活动记录的多通道 5 x 5 点 3 维硅微探针电极阵列