Preparation of Tribological Materials for Microelectromechanical systems

微机电系统摩擦学材料的制备

基本信息

批准号：
13650766
负责人：
TAKAGI Makoto
金额：
$ 1.79万
依托单位：
Aichi Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650766/
关键词：
microtribology wear structure scanning probe microscope TEM silicon single crystal metallic glass ceramics thin film MEMS 非平衡材料マイクロマシン

项目摘要

(1) Microtribological properties of silicon single crystal and the wear structureMicrotribology of silicon single crystals is one of the important factors for the practical use of MEMS. In this study, the effect of crystal orientation on microwear of silicon single crystal and the wear structure were mainly investigated. Microfriction experiments using atomic force/friction force microscope (AFM/FFM) were carried out to investigate the effect of crystal orientation on the microwear depth of Silicon single crystals. In these experiments, the scanning-scratching directions of a tip of AFM/FFM were <100> and <110> on Si(100) surface and <112> on Si(111) surface. As a result, it was found that the depth of the wear marks generated on silicon surfaces increased in the following order : <112>, <100>, <100>. Cross-sectional TEM observations of the microwear marks were carried out. As a result, it was found that the small dislocation loops were generated in the surface region at the first stag … More e of the microwear, and the size and the number of dislocations increased with the progress of the microwear.(2) Tribological properties of Zr-based metallic glass and its compositesZr-based metallic glass and its composites reinforced with ZrC powder were prepared by arc-melting and casting. The tribological properties of the materials thus prepared were investigated by using pin-on-disk type wear testing machine. As a result, it was found that the wear resistance of Zr-based metallic glass and its composites was better than that of conventional aluminum alloy A4032(Lowex). Zr-based metallic glass composite reinforced with 15vol.% ZrC powder exhibited a good wear resistance and low friction coefficient among the materials tested in this study. The microstructure of the surface of of the wear traces was observed by TEM. As a result, it was found that amorphous phase of Zr-based metallic glass was preserved after the wear tests.(3) Mechanical properties of CN films prepared by ion-beam-assisted depositionCarbon nitride (CN) films were prepared on Si(001) substrates by ion-beam-assisted deposition. Carbon was evaporated by electron beam and N and Ar ions bombarded simultaneously from one ion source. The films prepared under Ar/N2 ratio of 1 exhibited high hardness and good wear resistance. Less

（1）硅单晶的磨损结构性脱水的特性是在这项研究中实际使用的重要ORS在这些经验中，原子力/摩擦力显微镜（AFM/FFM）在硅单晶的微真深度上进行f晶体方向。 100）结果是在Si（111）表面上在第一个雄鹿的表面区域中...更大的微粒E，微玻璃的进度数量及其基于Copositeszr的金属玻璃玻璃玻璃玻璃 @ Composites @ - 熔化和铸造。 A4032（LOWEX）在本研究中测试了磨损痕迹的表面。通过电子束蒸发碳在Si（001）底物上制备。