Development of Functionally Graded Piezoelectric Actuator for MEMS(Micro Electro Mechanical System) by Powder Process Technology

利用粉末工艺技术开发MEMS（微机电系统）功能梯度压电执行器

• 批准号: 13650771
• 负责人: OKAMURA Hiroshi
• 金额: $ 2.3万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650771/
• 关键词: Piezoelectric material; PZT; Actuator; Functionally graded material; Porosity; Classic lamination theory; Infiltration; 国際研究者交流; 中国; 圧電複合材料; 圧電アクチュエータ; 粉体加工プロセス; 傾斜化プロセス; 圧電アクチュエータ設計; 気孔率傾斜化制御

The purpose of this research is to develop the piezoelectric actuator with functionally graded microstructure(FGM) that has a higher mechanical reliability than the conventional non-FGM actuator aiming at the application of the piezoelectric actuator to the micro electro mechanical system(MEMS). The obtained results are described as follows.1. The electrically induced strain in a PZT piezoelectric plate could be gradually changed by introducing compositionally graded structure of PZT/Pt or porosity-graded structure into a PZT piezoelectric plate. These actuators had no adhesive interface at which the fatigue failure take place, and could electrically make a bending deformation.2. The bending displacement property of the FGM piezoelectric actuator depended on the composition profile, and there existed the optimal composition profile that the bending displacement become the maximum. Moreover, the optimal composition profile could be easily predicted by the modified lamination theory.3. T … More he PZT/Pt compositionally graded piezoelectric bimorph actuator with the optimal composition profile exhibited nearly the same bending displacement as the non-graded bimorph actuator. Therefore, PZT/Pt compositionally graded piezoelectric bimorph actuator is estimated to have enhanced mechanical reliability without degradation the bending displacement characteristics. On the other hand, porosity-graded monomorph actuator exhibited a bending displacement characteristics that inferior to the non-graded unimorph actuator. Then, the profile design of physical properties for improvement of the bending displacement characteristics was attempted by modified lamination theory. As a result, it was predicted to be able to improve the bending displacement characteristics by introducing the profile with decreasing the piezoelectric constant and increasing the elastic modulus and the dielectric constant into the FGM monomorph actuator.4. The porosity-graded piezoelectric preform that have high open porosity and that is suitable for the achievement of the profile design for improvement of the bending displacement characteristics could be obtained by powder processing technology. This means that it is possible to fabricate the FGM monomorph actuator with the higher bending displacement and mechanical reliability by infiltration as a next process. Less

这项研究的目的是使用功能分级的微观结构（FGM）开发压电电执行器，其机械可靠性比传统的非FGM执行器具有更高的机械性可靠性，该非FGM执行器旨在将压电电执行器应用于微电机械系统（MEMS）。获得的结果描述如下1。 PZT压电板中的电诱导的应变可以通过将PZT/PT的合成分级结构或孔隙率分级结构引入PZT压电板，从而逐渐改变。这些执行器没有发生疲劳破坏的粘合剂界面，并且可以导致弯曲变形。2。 FGM压电执行器的弯曲位移属性取决于组成曲线，并且存在最佳组成曲线，即弯曲位移成为最大值。此外，修改后的层压理论可以很容易地预测最佳组成曲线3。 t…更多的PZT/PT组合分级的压电双层执行器，其最佳组成曲线暴露于几乎与非分级双摩尔指执行器相同的弯曲位移。因此，估计PZT/PT组合压电双层执行器具有增强的机械可靠性，而不会降解弯曲位移特性。另一方面，孔隙率毕业的单层执行器表现出弯曲的位移特性，低于非级的Unimorph驱动器。然后，通过修饰的层压理论尝试了物理特性改善弯曲位移特性的曲线设计。结果，预计它可以通过降低压电常数并增加弹性模量和增加二极管常数为FGM单体形状执行器来提高弯曲位移特性。4。具有高开放孔隙率的孔隙率分级的压电预形式，适用于通过粉末加工技术获得改善弯曲位移特性的曲线设计以改善弯曲位移的。这意味着可以通过渗透作为下一个过程来制造具有较高的弯曲位移和机械可靠性的FGM单晶执行器。较少的

项目成果

J.-F.Li: "Piezoelectric ceramic/metal bending actuators with functionally graded microstructures"Proceedings of the 7^<th> International Symposium on Functionally Graded Materials. 399-404 (2003)

J.-F.Li：“具有功能梯度微结构的压电陶瓷/金属弯曲执行器”第七届国际功能梯度材料研讨会论文集。

J.-F.Li: "Fabrication and evaluation of porous piezoelectric ceramics and porosity-graded piezoelectric actuators"Journal of American Ceramic Society. (in press). (2003)

J.-F.Li：“多孔压电陶瓷和孔隙率梯度压电执行器的制造和评估”美国陶瓷学会杂志。

J. -F. Li, K. Takagi, N. Terakubo and R. Watanabe: "Electrical and mechanical properties of piezoelectric ceramic/metal composites in the Pb(Zr,Ti)O_3/Pt system"Applied Physics Letters. 79. 2441-2443 (2001)

J.-F.

K. Takagi, J. -F. Li and R. Watanabe: "Development of piezoelectric ceramic actuators with graded porosity"Proceedings of the 7th International Symposium on Functionally Graded Materials, Beijing, (Materials Science Forum). 423-425. 405-410 (2003)

K.高木，J.-F。

李 敬鋒, 高木, 寺久保, 渡辺: "Electrical and mechanical properties of piezoelectric ceramics/metal composites in the Pb (Zr, Ti)O3/Pt system"Applied Physics Letters. 79・15. 2441-2443 (2001)

K. Lee、Takagi、Terakubo、Watanabe：“Pb (Zr, Ti)O3/Pt 系统中压电陶瓷/金属复合材料的电气和机械性能”应用物理快报 79・15 (2001)。