Formation of Thin Films and Surface Modification by Shock Wave Plasma.

通过冲击波等离子体形成薄膜和表面改性。

• 批准号: 61580014
• 负责人: EZUMI Hiromichi
• 金额: $ 1.22万
• 依托单位: Hirishima-Denki Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1986
• 资助国家: 日本
• 起止时间: 1986 至 1987
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-61580014/
• 关键词: Shock Wave; Plasma; Deposition-Thin Film; Superconductivity Mon; 超伝導; 窒化ニオブ; 窒化モリブデン

(1) The deposition of Cu, Nb and Mo on fused quartz substrates was made by the shock wave deposition(SWD) method, Using a plasma produced by the T-shaped electromagnetic shock tube.(2) The Cu deposits formed from powders placed between the electrode were not laminar but granular. Adhesion of the deposits was much higher than that of Cu films formed by the convetionl Vacuum deposition.(3) The Nb or Mo deposits formed in the carrier gas of nitrogen from Nb or Mo pellets placed between the electrodes were laminer, mainly composed of NbN or MoN and 50-60 nm thick for 2 plasma shots. In the case of MoN, Films of 200 nm thick could be produced on a substrate inclined at 60゜ to the flow direction.(4) All the films of MoN and NbN exhibited the superconductivity transition. The superconfuvyibity characteristics were improved with increasing the initial pressure P_1 of carrier gas.(5) For P_1 =400 Pa and shock velocity v=12 Km/s, temperature and pressure behind the incident shock wave were determined to be 13000 K and 0.6 MPa respectively.(6) It was concluded that the SWD method is especialy effective to the formation of transition metal nitride films.

(1) 利用 T 形电磁激波管产生的等离子体，通过冲击波沉积 (SWD) 方法在熔融石英基底上沉积 Cu、Nb 和 Mo。(2) 由放置的粉末形成的 Cu 沉积物电极之间的沉积物不是层状的而是颗粒状的，其附着力比传统真空沉积形成的Cu薄膜高得多。(3)载气中形成的Nb或Mo沉积物。将来自放置在电极之间的 Nb 或 Mo 颗粒的氮进行层压，主要由 NbN 或 MoN 组成，厚度为 50-60 nm，进行 2 次等离子体喷射，对于 MoN，可以在倾斜 60 度的基板上产生 200 nm 厚的薄膜。 (4)MoN和NbN薄膜均表现出超导转变,随着载流子初始压力P_1的增加,超共性特性得到改善。 (5) 当P_1=400 Pa、冲击速度v=12 Km/s时，入射冲击波后的温度和压力分别为13000 K和0.6 MPa。(6) 得出SWD方法确定的结论对过渡金属氮化物薄膜的形成特别有效。

项目成果

酒井恒: 広島電機大学・広島自動車工業短期大学研究報告. 20. 21-31 (1987)

酒井恒：广岛电机大学/广岛汽车技术学院研究报告。20. 21-31 (1987)。

江角弘道: 広島電機大学・広島自動車工業短期大学研究報告. 19. 13-20 (1986)

Hiromichi Esumi：广岛电机大学/广岛汽车技术学院研究报告 19. 13-20 (1986)。

Hiromichi Ezumi: "Point Contact Spectroscopy in (Superconduction Nb) -Ag past above 4.2 k" Memoirs of The Hiroshima-Denki Institute of Technology and The Hiroshima Junior College of Automotive Engineering. 19. 55-62 (1986)

Hiromichi Ezumi：“超过 4.2 k 的（超导 Nb）-Ag 中的点接触光谱”广岛电机工业学院和广岛汽车工程短期大学的回忆录。