System Development for Practical Education of Specialized Subjects, Research and Graduation Thesis Research in a College of Technology

某工学院专业实践教学、科研及毕业论文研究系统开发

• 批准号: 10680207
• 负责人: FUNATO Yasuyuki
• 金额: $ 0.7万
• 依托单位: Suzuka National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10680207/
• 关键词: 電磁気学; 工学実験・卒業研究; 電磁場計測; グロー放電プラズマ; 実践教育; 特別研究; 国際学会; 国際協力; 電離気体現象; 靜伝プローブ測定; TiNコーテイング

1. A new type of educational system are developed and its experimental device was constructed. For the practical education of the subjects in a College of Technology, specialized subjects, research and graduation thesis research, it is important to tech practically the subjects by using real system.2. Electromagnetics, Electric circuits and related subjects are fundamental and important for the students of departments of electrical engineering.3. We developed the experimental device for measuring the electric and magnetic fields for these purpose. The system is mainly the device producing a glow plasma and constituted by measuring4. Parts and computer assemblies. The data acquisition from plasma and its processing are also the subjects for the system.5. Plasma experiments are as follows : Properties of NOx gas dynamics during a glow discharge sputtering with LaB6 cold cathode are studied experimentally. For the purpose of decomposing NOx gases, boron-compound cathode like an lanthanum … More hexaboride (LaB6) or BN is applied for the cathode material. The application of these materials for the cathode is due to the fact that the sputtered Boron is shown experimentally to be react satisfactorily with oxygen gases.6. A disk of 50mm in diameter with 5mm thick of LィイD2aィエD2BィイD26ィエD2 is arranged perpendicularly to the cylindrical anode. The anode has a diameter of 100 mm and is 300 mm in length. In the chamber, an electro-static probe for measurement of the electron density and plasma potential is arranged. The small sample tip for x-ray photoelectron spectroscopy (XPS) measurement is also installed near the cathode electrode. Dynamics of partial pressures of residual gases are measured by using a quadruple mass analyzer (QMA) during and after the discharge. The experiment show that the glow plasma by using LaB6 electrodes is apparently effective to decompose NOx gases during the sputter discharge.7. The results have been reported and discussed at international conference and foreign universities. Less

1。开发了一种新型的教育系统，并构建了其实验设备。对于科技学院，专业学科，研究和毕业论文研究中对学科的实践教育，使用实际系统在技术上实用的主题很重要。2。电子，电路和相关主题对电气工程系学生的学生至关重要。3。我们开发了用于测量这些目的的电场和磁场的实验装置。该系统主要是产生发光等离子体的设备，并由Mesuiting4构成4。零件和计算机组件。从等离子体及其处理的数据获取也是系统的主题5。血浆实验如下：通过实验研究了使用LAB6冷阴极在发光放电过程中NOX气体动力学的性质。为了分解NOX气体，将硼（像灯笼）等硼（硼）阴极……用于阴极材料的更多六斗（LAB6）或BN。这些材料在阴极中的应用是由于以下事实：溅射的硼在实验上显示为与氧气令人满意的反应。6。直径为50mm的磁盘，其厚度为5mm的LII D2AIE D2BIE D26IE D2垂直于圆柱阳极垂直排列。阳极的直径为100毫米，长度为300毫米。在腔室中，安排了用于测量电子密度和等离子体电势的电静电探针。 X射线光电子光谱（XPS）测量的小样品尖端也安装在阴极电极附近。在放电期间和之后，通过使用四倍体质量分析仪（QMA）来测量残留气体部分压力的动力学。该实验表明，使用LAB6电极的发光血浆显然可以在溅射放电期间分解NOX气体。7。结果已在国际会议和外国大学中进行了报道和讨论。较少的

项目成果

南条徹: "ボロン化合物陰極を用いたN2/O2混合ガスグロー放置プラズマの特性"鈴鹿工業高等専門学校紀要. 33. 63-66 (2000)

Toru Nanjo：“使用硼化合物阴极的 N2/O2 混合气体辉光左等离子体的特性”国立技术研究所通报，铃鹿 33. 63-66 (2000)。

西ノ坊泰樹、船戸康幸: "RFプラズマスパッタ薄膜生成における電力整合の最適化" 鈴鹿工業高等専門学校紀要. 31. 75-78 (1998)

Yasuki Nishinobo、Yasuyuki Funato：“射频等离子体溅射薄膜生产中功率匹配的优化”国立技术研究所通报，铃鹿市，31. 75-78 (1998)。

清岡千晶: "スパッタ放電のプラズマ密度、電位分布の測定"鈴鹿工業高等専門学校紀要. 31. 65-70 (1998)

Chiaki Kiyooka：“溅射放电的等离子体密度和电势分布的测量”国立技术学院通报，铃鹿31. 65-70 (1998)。

Y. FUNATO: "Studies on Magnetic Field Configuration for Plasma Processing"MEMOIRS of Suzuka National College of Technology. 32. 43-48 (1999)

Y. FUNATO：“等离子体处理的磁场配置研究”铃鹿国立工业大学回忆录。

Y.Funato and C.Kiyooka: "Experiments on Plasma Parameter Control for Processing" MEMOIRES of Suzuka National College of Technology. 31. 83-87 (1998)

Y.Funato 和 C.Kiyooka：“加工等离子体参数控制实验”铃鹿国立工业大学回忆录。