System Development for Practical Education of Specialized Subjects, Research and Graduation Thesis Research in a College of Technology

某工学院专业实践教学、科研及毕业论文研究系统开发

基本信息

批准号：
10680207
负责人：
FUNATO Yasuyuki
金额：
$ 0.7万
依托单位：
Suzuka National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

项目摘要

1. A new type of educational system are developed and its experimental device was constructed. For the practical education of the subjects in a College of Technology, specialized subjects, research and graduation thesis research, it is important to tech practically the subjects by using real system.2. Electromagnetics, Electric circuits and related subjects are fundamental and important for the students of departments of electrical engineering.3. We developed the experimental device for measuring the electric and magnetic fields for these purpose. The system is mainly the device producing a glow plasma and constituted by measuring4. Parts and computer assemblies. The data acquisition from plasma and its processing are also the subjects for the system.5. Plasma experiments are as follows : Properties of NOx gas dynamics during a glow discharge sputtering with LaB6 cold cathode are studied experimentally. For the purpose of decomposing NOx gases, boron-compound cathode like an lanthanum … More hexaboride (LaB6) or BN is applied for the cathode material. The application of these materials for the cathode is due to the fact that the sputtered Boron is shown experimentally to be react satisfactorily with oxygen gases.6. A disk of 50mm in diameter with 5mm thick of LィイD2aィエD2BィイD26ィエD2 is arranged perpendicularly to the cylindrical anode. The anode has a diameter of 100 mm and is 300 mm in length. In the chamber, an electro-static probe for measurement of the electron density and plasma potential is arranged. The small sample tip for x-ray photoelectron spectroscopy (XPS) measurement is also installed near the cathode electrode. Dynamics of partial pressures of residual gases are measured by using a quadruple mass analyzer (QMA) during and after the discharge. The experiment show that the glow plasma by using LaB6 electrodes is apparently effective to decompose NOx gases during the sputter discharge.7. The results have been reported and discussed at international conference and foreign universities. Less

1.新型教育体系的开发和实验装置的构建对于工学院的学科实践教育、专业学科、研究和毕业论文研究来说，对学科进行实际应用具有重要意义。 2.电磁学、电路及相关学科对于电气工程系的学生来说是基础和重要的学科。3.我们开发了用于测量电磁场的装置。发光等离子体和测量部件构成。等离子体数据采集及其处理也是该系统的研究对象。 5．等离子体实验研究了LaB6冷阴极辉光放电溅射过程中NOx气体的动力学特性。分解NOx气体，阴极材料采用硼化合物阴极，如六硼化物（LaB6）或BN。这些材料用于阴极。这是由于实验表明溅射的硼与氧气的反应令人满意。 6. 直径为 50mm、厚度为 5mm 的 D2aD2B 圆盘垂直于圆柱形阳极布置，阳极直径为 100mm。室内有一个长 300 毫米的静电探针，用于测量电子。阴极附近还安装了用于X射线光电子能谱(XPS)测量的小样品尖，使用四重质量分析器(QMA)测量残余气体分压的动态。实验表明，LaB6电极的辉光等离子体在溅射放电过程中对NOx气体的分解效果明显。7．