Investigations related to spatial non uniformly of discharge plasmas

放电等离子体空间不均匀性的相关研究

• 批准号: 10650274
• 负责人: OHE Kazuyuki
• 金额: $ 1.92万
• 依托单位: Nagoya Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650274/
• 关键词: EEDF; Ar plasma; Ar; CFィイD24ィエD2 plasma; Boltzman equation; Spatial variation of plasma; Global model; Capacitively coupled rf plasma; Inductively coupled rf plasma; Ar-C_2プラズマ; Ne; rfプラズマ; プローブ計測; Ar-O_2プラズマ; N_2プラズマ; ボルツマン方程式

In 1999, experimental and theoretical investigations were preformed for rf discharges and their results were published in scientific journal as follows,1. The electron energy distribution (EEDF) was measured using a single probe in an inductively coupled Ar/CFィイD24ィエD2 plasma over the pressure range from 3 to 30 mTorr keeping the input power at 50W. The EEDF is a bi-Maxwellian in the pressure lower than 10 mTorr in spite of varying the mixing ratio of Ar to CfィイD24ィエD2, while the EEDF becomes a Druyvesteyn one with increasing CFィイD24ィエD2 at 30 mTorr.2. The EEDF was measured in a capacitivity coupled Ar plasma over the pressure range from 0.03 to 0.1 Torr keeping the rf current constant at 140 mA by varying the gap length. The EEDF s a bi-Maxwellian in the pressure lower than 0.05 Torr, while it becomes a bi-Maxwellian to a maxwellian and a Druyvesteyn in the pressure higher than 0.07 Torr.These gap dependences of EEDF can be explained by the change of heating mechanism from the stochastic to joule heatings in the high energy region, while by the comparison of the elastic collision frequency and the e-e collision one in the low energy.

1999年，对射频放电进行了实验和理论研究，其结果发表在科学杂志上，如下：1.使用单个探针在电感耦合Ar/CF-D24 D2等离子体中测量电子能量分布（EEDF）。压力范围为 3 至 30 mTorr，尽管改变了压力，但 EEDF 在低于 10 mTorr 的压力下仍保持输入功率为 50W。 Ar 与 CF24D2 的混合比，而 EEDF 在 30 mTorr 下随着 CF24D24D2 的增加而变成 Druyvesteyn。2 EEDF 是在电容耦合 Ar 等离子体中在 0.03 至 0.1 Torr 的压力范围内测量的，保持射频电流恒定在 140 mA。通过改变间隙长度，EEDF 是双麦克斯韦方程组。压力低于 0.05 Torr 时，它变成双麦克斯韦式，而当压力高于 0.07 Torr 时，它变成麦克斯韦式和 Druyvesteyn 式。EEDF 的这些间隙依赖性可以通过加热机制从随机加热到焦耳加热的变化来解释。高能区的弹性碰撞频率与低能区的e-e碰撞频率进行比较。

项目成果

大村高志、加賀広持、大江一行: "Gap length dependence of electron energy distribution in low pressure Ar capacitively-coupled RF discharges"Jpn. J. Appl. Phys.. 39(in press). (2000)

Takashi Omura、Hiromochi Kaga、Kazuyuki Oe：“低压 Ar 电容耦合射频放电中电子能量分布的间隙长度依赖性”Jpn. J. Phys.. 39（出版中）。

大村高志、大江一行: "Probe measurements and global model of inductively coupled Ar/CF_4 discharges"Plasma Source. Sci. Tech.. 8. 553-560 (1999)

Takashi Omura、Kazuyuki Oe：“感应耦合 Ar/CF_4 放电的探针测量和全局模型”Plasma Source。8. 553-560 (1999)

T.Kimura and K.Ohe: "Probe measurements and global model of inductively-coupled Ar/CF_4 discharges"Plasma Sources Sci.Technol.. 8. 553-560 (1999)

T.Kimura 和 K.Ohe：“感应耦合 Ar/CF_4 放电的探针测量和全局模型”Plasma Sources Sci.Technol.. 8. 553-560 (1999)

T.Kimura,K.Kaga and K.Ohe: "Gap length dependence of electron energy distribution in low pressure Ar capacitively-coupled RF discharges"Jpn.J.Appl.Pbup.. (印刷中). (2000)

T.Kimura、K.Kaga 和 K.Ohe：“低压 Ar 电容耦合射频放电中电子能量分布的间隙长度依赖性”Jpn.J.Appl.Pbup..（出版中）。

T.Kimura,M.Nakamura and K.Ohe: "Formation of dip structure of electron energy distribution function in diffuced Nitrogen plasmas" J.Phys.Soc.Jpn.67. 3443-3449 (1998)

T.Kimura、M.Nakamura 和 K.Ohe：“扩散氮等离子体中电子能量分布函数的倾角结构的形成”J.Phys.Soc.Jpn.67。