Development of ultra precision straight-motion stage by referring a crystalline array on crystalline surface

参照晶体表面晶体阵列开发超精密直动平台

• 批准号: 10650109
• 负责人: TAKADA Koji
• 金额: $ 2.43万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650109/
• 关键词: scanning tunneling microscope; regular crystalline lattice; ultra precision straight-motion stage; sub-nanometer; Atomic tracking control; トラッキング制御

A lattice spacing of approximately 0.2 nm is stable and uniform over long range when the crystal are stress free. An atomic array on crystalline surface is also thought to be straightness-reference. Using a scanning tunneling microscope (STM), it is possible to obtain an atomic image on crystalline surface in air. An ultra precision straightness reference and digital lattice scale by referring a crystalline array on a crystalline surface can be achieved with STM. The following results were obtained.(1) Atomic tracking and movement control of the tip position of a STM by referring to atomic array on regular crystalline surface was developed. The maximum tracking length along atomic array on crystalline of graphite was around 100 nm. This control method can be extended to real-time length measurement with subnanometer resolution using regular crystalline lattice.(2) Ultra precision straight-motion stage by referring a crystalline array on crystalline surface was developed. The atomic tracking control was applied to the stage. The maximum tracking and moving length of 100 nm along atomic array on crystalline of graphite was achieved.

当晶体无应力时，大约 0.2 nm 的晶格间距在长范围内是稳定且均匀的。晶体表面上的原子阵列也被认为是直线度参考。使用扫描隧道显微镜（STM），可以获得空气中晶体表面的原子图像。通过STM，可以通过参考晶体表面上的晶体阵列来实现超精密直线度参考和数字晶格刻度。得到了以下结果：(1)提出了参考规则晶体表面原子阵列对STM尖端位置的原子跟踪和运动控制。石墨晶体上沿原子阵列的最大追踪长度约为100 nm。该控制方法可以扩展到使用规则晶格进行亚纳米分辨率的实时长度测量。(2)开发了参考晶体表面晶体阵列的超精密直动平台。舞台上应用了原子跟踪控制。实现了沿石墨晶体原子阵列100 nm的最大跟踪移动长度。

项目成果

Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface"Review of Scientific Instruments. Vol. 70, No. 4. 2053-2059 (1999)

Masato Aketakawa 等人：“通过参考规则晶体表面上的原子点和阵列来跟踪和步进控制扫描隧道显微镜的尖端位置”科学仪器评论。

Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface" Review of Scientific Instruments. 70・4未定. (1999)

Masato Aketakawa 等人：“通过参考规则晶体表面上的原子点和阵列来跟踪和步进控制扫描隧道显微镜的尖端位置”科学仪器评论 70・4 TBA（1999 年）。

明田川正人 他: "結晶格子を基準とする微小長さ測定(第3報)-熱ドリフト誤差の抑制と測定範囲の数μmレベルへの拡大-" 精密工学会誌. 65・1. 121-125 (1999)

Masato Aketakawa等人：“基于晶格的微小长度测量（第3次报告）-热漂移误差的抑制和测量范围扩大到数μm级-”日本精密工程学会杂志65・1-1。 125 (1999)

Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface"Review of Scientific Instruments. 70・4. 2053-2059 (1999)

Masato Aketakawa 等人：“通过参考规则晶体表面上的原子点和阵列来跟踪和步进控制扫描隧道显微镜的尖端位置”科学仪器评论 70・4（1999 年）。

Masato Aketagawa et al.: "Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface"Rev. Sci. Instrum.. 70・4. 2053-2059 (1999)

Masato Aketakawa 等人：“通过参考规则晶体表面上的原子点和阵列来跟踪和步进控制扫描隧道显微镜的尖端位置”Rev. 70・4。