Spatiotemporal optical emission spectroscopy of atmospheric VHF plasma process

大气VHF等离子体过程的时空发射光谱

• 批准号: 08405014
• 负责人: KATAOKA Toshihiko
• 金额: $ 14.85万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08405014/
• 关键词: Atmospheric VHF plasma; Spatiotemporal optical emission spectroscopy; Mean free path; Sheath; Free radicals; Helium; 準安定粒子; 負グロー; 吸収分光; 温度計測; 粒子密度計測; 容量結合型プラズマ; 時空間分解発光分光; 中性Heラジカル; 局所電界近似法; プラズマシミュレーション; プラズマシース

Capacitively coupled atmospheric VIF(Very High Frequency) helium plasma was investigated. The plasma chamber was consisted of a cavity resonator and vacuum chamber. VIIF electric power was amplified and is conducted to the vacuum chamber via the resonator.The plasma was generated in 1 nun gap between the parallel plate electrodes with 150 MHz electric power. The spatiotemporal characteristics of the plasma was diagnosed by optical emission spectroscopy with streak camera.The resultant spatiotemporal image of the plasma was compared with the exact VHF voltage waveform which appeared on the electrodes. The voltage waveform was indirectry observed as the temporal emission profile of the laser diode which was installed between the gap. As a result of comparison between the waveforms, the plasma emission was occured near the surface of the negative electrode. So the atmospheric VHF plasma was basically negative glow. The sheath width estimated with the spat iotemporal image of the plasma was about 30 micron.The plasma spectrum of the sheath contained the strong line emission from the helium metastables. Use 388.8Cnm (3^3P*2^3P) line, the metastable number density was measured by absorption spectroscopy with hollow cathode lamp. In the sheath region, the density was about 1.1 * 10^<14> cm^3. This means that the activated region of the plasma could be formed near the surface of the electrode, i.e., semiconductor wafer. The disposition of the atmospheric VHF plasma is advantagious in plasma CVM and atmospheric plasma CVD processes.

研究了电容耦合大气 VIF（甚高频）氦等离子体。等离子体室由空腔谐振器和真空室组成。 VIIF电功率被放大并通过谐振器传导到真空室。在150MHz电功率的平行板电极之间的1nn间隙中产生等离子体。通过带有条纹相机的光学发射光谱仪诊断等离子体的时空特征。将所得的等离子体时空图像与电极上出现的精确 VHF 电压波形进行比较。电压波形被间接观察为安装在间隙之间的激光二极管的时间发射轮廓。比较波形的结果，在负极表面附近发生等离子体发射。所以大气中的甚高频等离子体基本上是负辉光。用等离子体的时空图像估计的鞘宽度约为30微米。鞘的等离子体光谱包含来自氦亚稳态的强线发射。采用388.8Cnm(3^3P*2^3P)线，利用空心阴极灯吸收光谱法测定亚稳态数密度。在鞘区域，密度约为1.1×10^14cm^3。这意味着等离子体的激活区域可以形成在电极（即半导体晶片）的表面附近。大气VHF等离子体的配置在等离子体CVM和大气等离子体CVD工艺中具有优势。

项目成果

押鐘 寧 他: "大気圧・高周波プラズマの計測とシミュレーション" 日本物理学会1996年秋の分科会第4分冊. 131 (1996)

Yasushi Oshikane等人：“大气压力/高频等离子体的测量和模拟”日本物理学会1996年秋季分会第4卷131（1996）。

押鐘 他: "He高圧力・高周波プラズマの特性-電極材質による相違-" 1997年度精密工学会春季大会学術講演会講演論文集. H52 (1997)

Oshikane 等人：“He 高压/高频等离子体的特性 - 取决于电极材料的差异”1997 年日本精密工程学会春季会议记录，H52 (1997)

K.Endo et al.: "He metastable density measurement by hollow cathode absorption spectroscopy in atmospheric VHF plasma" Proceedings of annual Kansai meeting of Japan Society for Precision Engineering. A03 (1998)

K.Endo 等人：“在大气 VHF 等离子体中通过空心阴极吸收光谱测量亚稳态密度”日本精密工程学会关西年度会议论文集。

遠藤 他: "高圧力・高周波プラズマの計測と制御-プラズマの時空間分解発光分光計測-" 1997年度精密工学会秋季大会学術講演会講演論文集. C05 (1997)

Endo 等人：“高压、高频等离子体的测量和控制 - 等离子体的时空分辨发射光谱测量 -”1997 年日本精密工程学会秋季会议学术会议记录 C05 (1997)。

Y.Oshikane et al.: "He metastable density measurement in atmospheric VHF plasma by hollow cathode lamp absorption spectroscopy" Proceedings of fall meeting of Japan Society for Precision Engineering. K13 (1998)

Y.Oshikane 等人：“通过空心阴极灯吸收光谱法测量大气 VHF 等离子体中的亚稳态密度”日本精密工程学会秋季会议记录。