DYNAMIC CHARACTERISTICS OF MICROMACHINE COMPONENTS IN BIONIC LIQUID

仿生液体中微型机械部件的动态特性

• 批准号: 07650311
• 负责人: TANAKA Yoshio
• 金额: $ 1.34万
• 依托单位: OSAKA PREFECTURE UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07650311/
• 关键词: micro cantilever; large deflection; electric field; drag force; viscous fluid; resonance; カンチレバ-; 大たわみ理論; 3次元静電場; ヤング率; 薄膜; 原子間力顕微鏡; 力平衡方式; 力・距離曲線; マイクロマシン; マイクロ梁; 減圧気相堆積法; 屈折率; 光リソグラフィ; 熱励起振動; 周波数応答; micro cantilever; large deflection; electric field; drag force; viscous fluid; resonance; カンチレバ-; 大たわみ理論; 3次元静電場; ヤング率; 薄膜; 原子間力顕微鏡; 力平衡方式; 力・距離曲線; マイクロマシン; マイクロ梁; 減圧気相堆積法; 屈折率; 光リソグラフィ; 熱励起振動; 周波数応答

For investigation of dynamic characteristics in bionic liquid, static and dynamic behaviors of micro cantilever are typically studied. The main results were as follows.(1)Young's modulus of thin Si_3N_4 films are extracted from the resonance characteristics in air. The cantilevers are excited by Laser beams and the amplitudes are measured by optical methods.(2)To study large deflection of micro cantilever in 3-dimensional static electric field, computer analysis system is developed based on large deflection elastic theory in thin films and electrostatic field theory. Relations between the Young's modulus of the poly-Si cantilever and the applied voltages, which is applied between the cantilever and the substrate, are obtained.(3)Analytical model is proposed to control the force curve measurement system for AFM (Atomic Force Microscopy) proves based on the force balanced method. Based on this method, PID control system for AFM prove is designed to approach quick measurement period within 1/100 seconds.(4)Resonance characteristics in water are measured for micro cantilevers by optical lever, which is excited by Laser beam. The resonance frequency in water shows around 1/10 times lower than that of in air. Using the string of beads model for estimating the drag force by viscous fluids, the resonance characteristics are theoretically derived based on the strings of beads model and the results show good agreements with the experimental results.

为了研究仿生液体中的动态特征，通常研究微悬臂的静态和动态行为。主要结果如下。（1）从空气中的共振特征中提取了薄si_3n_4薄膜的杨氏模量。悬臂通过激光束激发，振幅通过光学方法进行测量。（2）研究在三维静态电场中微悬臂的大偏转，计算机分析系统是基于薄膜中的大偏转弹性理论和静电场理论而开发的。 （3）提出了分析模型来控制AFM（原子力显微镜）的力曲线测量系统，根据力平衡方法，提出了分析模型，以控制悬臂和底物之间的应用电压之间的关系。（3）提出分析模型。基于此方法，AFM的PID控制系统旨在在1/100秒内接近快速测量周期。（4）通过光杆通过激光束激发的微悬臂测量水的共振特性。水的共振频率显示出比空气中的1/10倍。使用珠子模型的串线来估算粘性流体的阻力，理论上是根据珠子模型的字符串得出的，并且结果与实验结果显示了良好的协议。