Studies on radical generation mechanism in the atmospheric plasma etching

大气等离子刻蚀中自由基产生机理的研究

• 批准号: 07455063
• 负责人: MORI Yuzo
• 金额: $ 4.99万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07455063/
• 关键词: Atmospheric plasma; Radical; Pulse modulation; Spatial resolution; SF6; プラズマCVM; プラズマCVD; 大気圧プラズマ; ラジカル; 分解過程

In the atmospheric plasma etching, the stronger electric field is required for generating radiacals efficiently because of a short mean free path. But, the stronger electric field brings about spreading of a plasma and getting worse of machining resolution. Although the atmospheric plasma is doing very well as both a machining rate and a spatial resolution, it is difficult to combine them on the high level.In this study, a pulse modulated R.F.power is suggested to realize both a high machining rate and a fine spatial resolution. To modulate a continuous R.F.power to a pulse, an extremely strong electric field is generated in a moment. Then it is expected to generate radicals efficiently in a R.F.-ON cycle. And it is expected to these radicals are disappear before diffusing in a R.F.-OFF cycle.We gave the existence R.F.power supply a function of a pulse modulation, and made several experiments changing a pulse width and a peak R.F.power. As a result, we found relationship between these parameters and a density of radials, and understood a process of decomposition of reactive gases. Specially in the case of using SF6 as a reactive gas, it was found that both a high machining rate and a fine spatial resolution are realized.

在大气等离子体蚀刻中，由于平均自由程短，需要更强的电场才能有效地产生自由基。但是，较强的电场会导致等离子体扩散，导致加工分辨率变差。虽然大气等离子体在加工速率和空间分辨率方面都做得很好，但很难将它们在高水平上结合起来。在这项研究中，建议使用脉冲调制射频功率来实现高加工速率和精细加工。空间分辨率。为了将连续的射频功率调制为脉冲，瞬间会产生极强的电场。然后预计在 R.F.-ON 循环中有效地产生自由基。预计这些自由基在射频关闭周期中扩散之前就会消失。我们将射频电源的存在赋予脉冲调制的函数，并进行了多次改变脉冲宽度和峰值射频功率的实验。结果，我们发现了这些参数与放射线密度之间的关系，并了解了反应气体的分解过程。特别是在使用SF6作为反应气体的情况下，发现可以实现高加工速率和精细的空间分辨率。