Production of large-diameter plasmas for plasma processing

用于等离子体处理的大直径等离子体的生产

基本信息

批准号：
07044308
负责人：
SATO Noriyoshi
金额：
--
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for International Scientific Research.
财政年份：
1995
资助国家：
日本
起止时间：
1995 至无数据
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07044308/
关键词：
Plasma Uniform Plasma ECR Plasma RF Plasma Magnetron-Typed Plasma Helicon Wave Inductively Coupled Plasma Radical Plasma processing

项目摘要

Development of large-diameter uniform plasma sources is of crucial importance for performing a wide-area plasma processing.In order to produce such a uniform plasma a plane-slotted antenna with permanent magnets has been developed to produce an electron cyclotron resonance (ECR) plasma at Tohoku University. This method successfully provides a large-diameter ECR plasma with a uniformity of (]SY.+-.])(3-5)% over a diameter of 40-50 cm. Moreover, a modified magnetron typed plasma source developed at Tohoku University also provides large-diameter uniform radio-frequency (RF) plasmas.On the other hand, high density plasma sources are studied at the Korean Advanced Institute of Science and Technology (Kaist) by using helicon wave heating and inductively coupled plasma production methods at the RF frequency. The diagnostic method employing optical probe has also been developed to evaluate the radical density and its profile in reactive plasmas.The main purpose of this project is to combine such results obtained at Tohoku University and the KAIST to develop a large-diameter uniform plasma source for the wide-area plasma processing. During the project we had two seminars at the KAIST to discuss about the problems and techniques for detecting the uniformity of radical density supplied from the plane ECR antenna plasma source at Tohoku University. The experiments show the importance of radial profile of plasma parameters.

开发大直径均匀等离子体源对于进行大面积等离子体处理至关重要。为了产生这种均匀等离子体，开发了带有永磁体的平面缝隙天线来产生电子回旋共振（ECR）等离子体在东北大学。该方法成功地提供了大直径ECR等离子体，其在40-50 cm直径上的均匀性为(]SY.+-.])(3-5)%。此外，东北大学开发的改良磁控管型等离子体源还提供大直径均匀射频（RF）等离子体。另一方面，韩国高级科学技术研究所（Kaist）正在研究高密度等离子体源在射频频率下使用螺旋波加热和感应耦合等离子体生产方法。还开发了采用光学探针的诊断方法来评估反应等离子体中的自由基密度及其分布。该项目的主要目的是结合东北大学和韩国科学技术院获得的这些结果，开发一种大直径均匀等离子体源，用于广域等离子体处理。项目期间，我们在韩国科学技术院举办了两次研讨会，讨论了检测东北大学平面 ECR 天线等离子体源提供的自由基密度均匀性的问题和技术。实验表明等离子体参数径向分布的重要性。