Fabrication and properties of nitride field emitter.

氮化物场发射体的制备和性能。

• 批准号: 06555086
• 负责人: ADACHI Hiroshi
• 金额: $ 1.34万
• 依托单位: Muroran Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555086/
• 关键词: Transition metal nitrides; Fabrication of fine needle; Field emission properties; Stability of field emission current; 遷移金属窒化物; 微小針の製作; 還移金属窒化物

Field emitters of NbN,Nb_2N,TiN,and ZrN were fabricated by nitriding elemental metal needles. The nitriding was carried out by heating metal needles in an ammonia gas.Before operating the field emitters, they are flash heated for several seconds. Their field emission properties changed with the increase of the flashing temperature. At the beginning the current fluctuation was fundamentally step-and spike-like. However, it changed to random-like when flashed higher than a certain temperature where field emission patterns changed.The NbN emitters, which had been flash heated at 900ﾟC,showed the most stable field emission current among the nitride emitters examined here.It is revealed by using of AES (Auger Electron Spectroscopy) that the field emission properties are largely affected by the concentric components at the emitter surface. Deficiency of nitrogen degrades the emission properties very much and occurred due to a flash heating higher than a temperature where the change of the emission pattern was observed.It is concluded that the nitride emitters gave stable emission when flash heated at a relatively low temperature, suggesting that the deficiency of nitrogen at the emitter surface does the important role in the stable operation.

NbN、Nb_2N、TiN 和 ZrN 的场发射体是通过对单质金属针进行氮化来制造的。氮化是通过在氨气中加热金属针来进行的。在操作场发射体之前，将其场发射加热几秒钟。随着闪蒸温度的升高，电流波动基本呈阶梯状、尖峰状，但当闪蒸温度高于一定值时，电流波动变为随机状。场发射模式发生变化的温度。在 900°C 下快速加热的 NbN 发射体在此处检查的氮化物发射体中表现出最稳定的场发射电流。通过使用 AES（俄歇电子能谱）显示场发射体发射体表面的同心部件对发射体的发射特性影响很大，氮的缺乏会极大地降低发射体的发射特性，并且这是由于高于发射图案发生变化的温度的闪光加热而发生的。结论是，氮化物发射极在相对较低的温度下快速加热时能够稳定发射，这表明发射极表面氮的缺乏对于稳定运行起着重要作用。

项目成果

Michiaki ENDO: "Field Emission Characteristics of Transition Metal Nitrides." Journal of Vacuum Science and Technology. (1996)

Michiaki ENDO：“过渡金属氮化物的场发射特性。”

遠藤 礼暁: "窒化ニオブ電界放射陰極の製作とその放射特性" 電子情報通信学会技術研究報告. Vol.93. 67-74 (1993)

Noriaki Endo：“氮化铌场发射阴极的制造及其辐射特性”IEICE技术研究报告Vol.93（1993）。

Michiaki ENDO,Hideaki NAKANE,Hiroshi ADACHI: "Field emission from transition metal nitrides." Applied surface science. (To be published). (1996)

Michiaki ENDO、Hideaki NAKANE、Hiroshi ADACHI：“过渡金属氮化物的场发射。”

Michiaki ENDO: "Field Emission from Transition Metal Nitrides" Applied Surface Science. (1995)

Michiaki ENDO：“过渡金属氮化物的场发射”应用表面科学。

Michiaki ENDO: "Field Emission from Transition Metal Nitrides" Applied Surface Science. (1996)

Michiaki ENDO：“过渡金属氮化物的场发射”应用表面科学。