Micro-Machining by Nearfield Optics

近场光学微加工

• 批准号: 05555044
• 负责人: KATAOKA Toshihiko
• 金额: $ 4.35万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555044/
• 关键词: Scanning Near-field Optical Microscope; Polystirene Latex Sphere; High Spatial Resolution; Boundary Element Method; 近接場; レーザ; 高分解能; 微小突起; フォトレジスト; 光による微細加工

The probe of this scanning nearfield optical microscope (SNOM) is a dielectric sphere 500nm in diameter on a transparent substrate. The probe sphere is illuminated by evanescent waves which are formed by the incidence of a He-Ne laser with the wavelength of 632.8nm under the condition of total internal reflection. The light from the probe is collected by a conventional microscope through the substrate. The detected light intensity varies markedly when a sample is brought into the near-field around the probe. The variation of detected light intensity in the near-field depends on the complex index of refraction of samples ; the smaller the real part of the refractive index, the more marked the increase of detected light intensity. This result is explained through use of an electric dipole model for the electromagnetic interaction betweem probe and sample. The vertical and lateral resolutions of about 1nm and 10nm, respectively, are obtained for a standard sample which is prepared by vacuum evaporation of metal.We develop an SNOM that achieves high resolution which is not affected by a diffraction limit and that uses a polystirene latex sphere 500nm in diameter located on a quartz substrate as a probe. To investigate the spatial resolution of the SNOM,we prepared a standard sample and measured the shape of its surface. As a result, the vertical resolution of SNOM was found to be about 1nm and the lateral resolution about 10nm. Therefore the spatial resolution of the SNOM is much higher than that of a conventional optical microscope.Although the limit of the spatial resolution of the SNOM has not been theoretically determined, it will depend on the technique by which the probe is produced. Future improvement of the spatial resolution will require reliable and reproducible fabrication technology in order to produce a probe with a smaller tip curvature radius.

该扫描近场光学显微镜 (SNOM) 的探头是透明基板上直径 500 nm 的介电球。波长为632.8nm的氦氖激光在全内反射条件下入射形成倏逝波，对探测球体进行照明。来自探针的光由传统显微镜透过基底收集。当样品进入探头周围的近场时，检测到的光强度会发生显着变化。近场检测到的光强度的变化取决于样品的复折射率；折射率的实部越小，检测到的光强度的增加越显着。该结果通过使用探针和样品之间的电磁相互作用的电偶极子模型来解释。通过金属真空蒸镀制备的标准样品分别获得约 1nm 和 10nm 的垂直和横向分辨率。我们开发了一种 SNOM，它可以实现不受衍射极限影响的高分辨率，并使用聚苯乙烯乳胶直径500nm的球体位于石英基板上作为探针。为了研究SNOM的空间分辨率，我们制备了标准样品并测量了其表面形状。结果发现SNOM的垂直分辨率约为1nm，横向分辨率约为10nm。因此，SNOM 的空间分辨率远高于传统光学显微镜。虽然 SNOM 空间分辨率的极限尚未在理论上确定，但这将取决于探针的生产技术。未来空间分辨率的提高将需要可靠且可重复的制造技术，以生产具有更小的尖端曲率半径的探针。

项目成果

片岡俊彦,他: "走査型近接場光学顕微鏡の開発" 超精密. 4. 18-24 (1994)

Toshihiko Kataoka 等人：“扫描近场光学显微镜的发展”Ultra Precision。 4. 18-24 (1994)

T.Kataoka et al.: "Development of Scanning Near-field Optical Micrsoscope with a Probe consisting of a Small Spherical Protrusion" Journal of the Japan Society for Precision Engineering. 60 (8). 1122-1126 (1994)

T.Kataoka 等人：“带有由小球形突起组成的探头的扫描近场光学显微镜的开发”日本精密工程学会杂志。

T.Kataoka et al.: "Development of Scanning Near-field Optical Micrsoscope" Ultra Precision. 4. 18-24 (1994)

T.Kataoka 等人：“扫描近场光学显微镜的开发”超精密。

片岡俊彦,他: "球状微小突起をプローブにした走査型近接場光学顕微鏡の開発" 精密工学会誌. 60. 1122-1126 (1994)

Toshihiko Kataoka 等人：“使用球形微投影作为探针的扫描近场光学显微镜的开发”日本精密工程学会杂志 60. 1122-1126 (1994)。

片岡俊彦: "球術微小突起をプローブとした走査型近接場光学顕微鏡の開発" 精密工学会誌. (掲載予定).

Toshihiko Kataoka：“使用微突起作为探针的扫描近场光学显微镜的开发”日本精密工程学会杂志（待出版）。