Micro-Machining by Nearfield Optics

近场光学微加工

• 批准号: 05555044
• 负责人: KATAOKA Toshihiko
• 金额: $ 4.35万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555044/
• 关键词: Scanning Near-field Optical Microscope; Polystirene Latex Sphere; High Spatial Resolution; Boundary Element Method; 近接場; レーザ; 高分解能; 微小突起; フォトレジスト; 光による微細加工

The probe of this scanning nearfield optical microscope (SNOM) is a dielectric sphere 500nm in diameter on a transparent substrate. The probe sphere is illuminated by evanescent waves which are formed by the incidence of a He-Ne laser with the wavelength of 632.8nm under the condition of total internal reflection. The light from the probe is collected by a conventional microscope through the substrate. The detected light intensity varies markedly when a sample is brought into the near-field around the probe. The variation of detected light intensity in the near-field depends on the complex index of refraction of samples ; the smaller the real part of the refractive index, the more marked the increase of detected light intensity. This result is explained through use of an electric dipole model for the electromagnetic interaction betweem probe and sample. The vertical and lateral resolutions of about 1nm and 10nm, respectively, are obtained for a standard sample which is prepared by vacuum evaporation of metal.We develop an SNOM that achieves high resolution which is not affected by a diffraction limit and that uses a polystirene latex sphere 500nm in diameter located on a quartz substrate as a probe. To investigate the spatial resolution of the SNOM,we prepared a standard sample and measured the shape of its surface. As a result, the vertical resolution of SNOM was found to be about 1nm and the lateral resolution about 10nm. Therefore the spatial resolution of the SNOM is much higher than that of a conventional optical microscope.Although the limit of the spatial resolution of the SNOM has not been theoretically determined, it will depend on the technique by which the probe is produced. Future improvement of the spatial resolution will require reliable and reproducible fabrication technology in order to produce a probe with a smaller tip curvature radius.

该扫描近场光学显微镜（SNOM）的探针是透明底物上直径为500nm的介电球。探针球是由evanevanscent波照明的，而evanevanscent波则是由HE-NE激光器的发生率在总内反射状态下的波长为632.8nm的发生率所形成的。探针的光是通过底物通过常规显微镜收集的。当将样品带入探针周围的近场时，检测到的光强度明显变化。近场中检测到的光强度的变化取决于样品折射的复杂指数。折射率的实际部分越小，检测到的光强度的增加就越明显。通过将电偶极模型用于电磁相互作用的探针和样品来解释该结果。对于标准样品，获得了大约1nm和10nm的垂直和侧向分辨率，该样品是通过真空蒸发来制备的。我们开发出一种实现高分辨率的SNOM，该SNOM不受衍射极限的影响，并且使用Polystirene late latex Sphere使用Polystirene latex Sphere使用500nm的Diameter在imottrate上的ProbeTrate as probeTrate as probeTrate as a -PipeTrate as prope subtrate。为了研究SNOM的空间分辨率，我们准备了标准样品并测量其表面的形状。结果，发现SNOM的垂直分辨率约为1nm，横向分辨率约为10nm。因此，SNOM的空间分辨率远高于常规光学显微镜的空间分辨率。尽管尚未确定SNOM的空间分辨率的极限，但它将取决于产生探针的技术。空间分辨率的未来改进将需要可靠且可重复的制造技术，以便产生较小的尖端曲率半径的探针。

项目成果

片岡俊彦,他: "走査型近接場光学顕微鏡の開発" 超精密. 4. 18-24 (1994)

Toshihiko Kataoka 等人：“扫描近场光学显微镜的发展”Ultra Precision。 4. 18-24 (1994)

T.Kataoka et al.: "Development of Scanning Near-field Optical Micrsoscope with a Probe consisting of a Small Spherical Protrusion" Journal of the Japan Society for Precision Engineering. 60 (8). 1122-1126 (1994)

T.Kataoka 等人：“带有由小球形突起组成的探头的扫描近场光学显微镜的开发”日本精密工程学会杂志。

T.Kataoka et al.: "Development of Scanning Near-field Optical Micrsoscope" Ultra Precision. 4. 18-24 (1994)

T.Kataoka 等人：“扫描近场光学显微镜的开发”超精密。

T. Kataoka,et al.: "Development of Scanning Near-field Optical Microscope with a Probe consisting of a Small Spherical Protrusion" Ultramicroscopy. (to be published). (1996)

T. Kataoka 等人：“开发带有由小球形突出物组成的探头的扫描近场光学显微镜”超显微镜。

片岡俊彦,他: "球状微小突起をプローブにした走査型近接場光学顕微鏡の開発" 精密工学会誌. 60. 1122-1126 (1994)

Toshihiko Kataoka 等人：“使用球形微投影作为探针的扫描近场光学显微镜的开发”日本精密工程学会杂志 60. 1122-1126 (1994)。