EXPERIMENTAL STUDY ON SPUTTER ION PUMP FOR WIDE PRESSURE RANGE

宽压力范围溅射离子泵的实验研究

• 批准号: 05555011
• 负责人: FUNATO Yasuyuki
• 金额: $ 1.47万
• 依托单位: SUZUKA NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555011/
• 关键词: LaB6 Cathode; Wide pressure range; Water pumping; Sputter pump; QMS measurement; XPS measurement; Plasma parameter; Ultra high vacuum; LaB_6陰極; 水の排気; プラズマシース; グロー放電; イオンポンプ; 六ほう化ランタン; 四重極質量分析計; 膜評価; クリーン真空

The experimental investigation of a sputter ion pump were performed for wide pressure range. The vacuum chamber has a diameter of 6 inches and an length of 200mm. The Lanthanum hexaboride (LaB6) disk of 50mm diameter are used for sputter cathode. The experimental device consists of discharge section and analysis one. The measurements involves ionization gauge, partial pressure gauge, electro static probe for plasma parameters and XPS measurement. The experiment was done by using a glow discharge plasma' and to create boron like thin films on the chamber wall surface. The preliminary experiment showed that the boron film formed on the vacuum wall can pump effectively water vapor. The experiment investigate the correlations between partial pressures of H2O,H2, O2 and plasma parameters of density, temperature and sputter film characteristics during a sputter discharge. The application of LaB6 cathode is a characteristic point of the experiment for developing a new type of sputter vacuum pump. The plasma parameters were measured by Langumuir probe and were estimated to be (2-30) x10^9 of density and 3-5 eV of temperature. The partial pressure was measured by QMS.The most typical result of the experiment is that the water vapor is pumped effectively for wide pressure range by using the LaB6 sputter cathode. The pumping speed is estimated to be about 4m^3/ (m^2s). XPS was performed on the sample tip inserted in the sputter discharge. The signals of B,La, O and C were detected. And the depth profiles of their signals were also measured. The experiment indicated that the sputter discharge with LaB6 cathode can be used for a new type of sputter vacuum pump.

进行了溅射离子泵的实验研究，以实现较大的压力范围。真空室的直径为6英寸，长度为200mm。直径为50mm的灯笼六边形（LAB6）磁盘用于溅射阴极。实验设备由排放部分和分析组成。测量值涉及电离计，部分压力表，用于等离子体参数的电静态探针和XPS测量。实验是通过使用发光放电等离子体进行的，并在室壁表面上创建像薄膜一样的硼。初步实验表明，在真空壁上形成的硼膜可以有效抽水。该实验研究了溅射放电期间H2O，H2，O2的部分压力与密度，温度和溅射膜特征的等离子参数之间的相关性。 LAB6阴极的应用是开发一种新型的溅射真空泵的实验的特征点。血浆参数通过langumuir探针测量，估计为（2-30）x10^9的密度和3-5 eV。通过QM测量了部分压力。实验的最典型结果是，通过使用LAB6溅射阴极有效地为较大的压力范围泵送水蒸气。抽水速度估计约为4m^3/（M^2s）。 XPS在插入溅射放电的样品尖端上进行。检测到B，LA，O和C的信号。还测量了信号的深度曲线。实验表明，使用LAB6阴极的溅射排放可用于新型的溅射真空泵。

项目成果

Y.Funato: "CHARACTERISTICS OF PENNING TYPE DISCHARGE WITH LaB_6 CATHODE FOR SPUTTER ION PUMP" Proc.of 21 the Int.Conf.on Phenomena in Ionized Gases. VOl.11. 317-318 (1993)

Y.Funato：“用于溅射离子泵的 LaB_6 阴极的彭宁型放电的特性”Proc.of 21 the Int.Conf.on Phenomena in ionized Gases。

N.Takagi: "Characteristics of a Cold Cathode Gauge for ATF" Proc.of the 20th Linear Accelerator Meeting in Japan,. Sep. 162-162 (1995)

N.Takagi：“ATF 冷阴极真空计的特性”，第 20 届日本直线加速器会议论文集。

K.Akaishi: "Measurement of Outgassing Rate of Multilayer Insulation Material for LHD" Ann. Rep. of National Institute foe Fusion Science. Mar1993. 16-16 (1993)

K.Akaishi：“LHD 多层绝缘材料释气率的测量”Ann。

D.Kawamura: "Experiments on the Reduction of Oxygen Pertial Pressure by Glow Discharge Plasma" Memoirs of Suzuka College of Technol.22.9. 195-199 (1996)

D.Kawamura：“通过辉光放电等离子体降低氧分压的实验”铃鹿工业大学回忆录.22.9。

Y.Funato: "Distributions of Plasma Parameters in a Sputter Discharge" Proc.XXIII.Int.Conf.on Phenomena Ionized Gases,Toulouse(1997). (to be published). (1997)

Y.Funato：“溅射放电中等离子体参数的分布”Proc.XXIII.Int.Conf.on Phenomena Ionized Gases，图卢兹（1997）。