Study on surface coating of ultra-fine particles for EEM machining.

EEM加工用超细颗粒表面涂层研究

• 批准号: 04555035
• 负责人: MORI Yuzo
• 金额: $ 4.8万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04555035/
• 关键词: EEM; plasma CVD; ultra-fine particle; surface preparation; coating; マイクロ波プラズマ

This study aims at making ultra-fine particles for EEM(Elastic Emission Machining). EEM is one of the most precision machining method, utilizing chemical reaction in solid phase between the pariticle surface and the work surface. So that chemical properties and reactivities of each surface atoms is very important. And it is neccesary to select the optimum combination of the particle and the work to achieve efficient machining properties.Last year, the appratus for making the ultra-fine particles utilizing plasma CVD was designed and constructed. It was found that stable plasma state could be maintained with the condition of continuous feeding the powder particle, and classification of particles with the range from 0.03mum to 1.0mum was possible.This year, polystirene ultra-fine particle coated with alumina(Al_2O_3) was prepared, and applied to EEM machining of Si wafer. The results are shown as follows.These results shows ability of the coating system, and significance of coating method.

本研究旨在制造用于 EEM（弹性发射加工）的超细颗粒。 EEM是最精密的加工方法之一，利用颗粒表面和工作表面之间的固相化学反应。因此每个表面原子的化学性质和反应活性非常重要。为了实现高效的加工性能，必须选择颗粒和工件的最佳组合。去年，设计并建造了利用等离子体CVD制造超细颗粒的装置。结果发现，在连续喂入粉末颗粒的条件下，可以保持稳定的等离子体状态，并且可以对0.03μm至1.0μm范围内的颗粒进行分级。今年，包覆氧化铝（Al_2O_3）的聚苯乙烯超细颗粒制备并应用于硅片的EEM加工。结果如下所示。这些结果显示了涂层体系的能力以及涂层方法的意义。

项目成果

Yuzo Mori: "Microtribology in High Precision Machining" Journal of Japanese Society of Tribologists. 37. 37-41 (1992)

Yuzo Mori：“高精度加工中的微观摩擦学”日本摩擦学会杂志。

森勇藏: "超精密加工とマイクロトライボロジー" トライボロジスト. 37. 37-41 (1992)

Yuzo Mori：“超精密加工和微摩擦学”摩擦学家。37. 37-41 (1992)