Development of a standard vacuum gauge and a pressure sensor in the medium vacuum region using laser Rayleigh scattering

利用激光瑞利散射开发中真空区标准真空计和压力传感器

基本信息

批准号：
04555016
负责人：
MURAOKA Katsunori
金额：
$ 4.29万
依托单位：
Kyushu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

The feasibility of employing laser Rayleigh scattering as a standard vacuum gauge and a pressure sensor in the medium vacuum region (10^<-2>-1 Torr) was investigated.For the investigation of the standard gauge, a high sensitivity diaphragm gauge was used as a reference gauge. The rayleigh scattering signals showed a linear correlation with pressure values measured by the diaphragm gauge with a deviation of <5 % for the pressure region of >10^<-2> Torr. Standard deviations of Rayleigh scattering signals were in the range of 2-8 % for 10^<-2>-1 Torr, and these could be explained by an estimation based on photon statistics. In addition, it was shown that the absolute value of the pressure can be determined based on the atmospheric pressure and the Rayleigh scattering at this pressure.Two experiments were performed for the investigation of the pressure sensor. For the first experiment, a YLF laser pumped by a semiconductor laser (output 0.2 mJ in 7 ns, lambda=523 nm, repetition 1 kHz) was used as a light source and the beam was directed into a compact vacuum chamber. The stray light level was reduced to 20 m Torr, and the linear correlation between the Rayleigh scattering signal and the pressure value by the diaphragm gauge was obtained with an error of <7 % for 20 m Torr-1 Torr. These results showed that it is possible to make a compact pressure sensor using Rayleigh scattering.The second experiment was performed on a prototype pressure sensor. A cw semiconductor laser (output 500 m W, lambda=680 nm) was used as the light source and was modulated to give pulses with a 0.5 ms width. Rayleigh scattering signals were successfully detected down to 1 Torr with the error of <9 %. This measn that the sensor will be realized if the detection lower limit can be improved by a factor of 100.

研究了采用激光瑞利散射作为标准真空计和中真空区(10^-2>-1 Torr)压力传感器的可行性。对于标准真空计的研究，使用了高灵敏度隔膜真空计作为参考量规。瑞利散射信号显示与隔膜压力计测量的压力值呈线性相关，对于>10^-2Torr的压力区域偏差<5％。对于10 ^ -2 > -1 Torr，瑞利散射信号的标准偏差在2-8％的范围内，并且这些可以通过基于光子统计的估计来解释。此外，结果表明，可以根据大气压力和该压力下的瑞利散射来确定压力的绝对值。为了研究压力传感器，进行了两个实验。对于第一个实验，使用半导体激光器泵浦的 YLF 激光器（7 ns 内输出 0.2 mJ，λ=523 nm，重复频率 1 kHz）作为光源，并将光束引导到紧凑的真空室中。杂散光水平降低至20 m Torr，并获得瑞利散射信号与隔膜压力计压力值之间的线性相关性，对于20 m Torr-1 Torr，误差<7%。这些结果表明，利用瑞利散射制造紧凑型压力传感器是可能的。第二个实验是在原型压力传感器上进行的。使用连续波半导体激光器（输出500 m W，λ=680 nm）作为光源，并对其进行调制以给出宽度为0.5 ms的脉冲。成功检测到低至 1 Torr 的瑞利散射信号，误差 <9%。这意味着如果检测下限能够提高100倍，该传感器就可以实现。

项目成果

期刊论文数量（5）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

迫田忠則,宋一兵,内野喜一郎,村岡克紀,Mark Bowdan,山川洋幸: "中真空域の標準真空計及び実用真空計にレーザー光のレーリー散乱を用いる可能性に関する研究" 真空. 36. 563-567 (1993)

Tadanori Sakoda、Kazuhei Song、Kiichiro Uchino、Katsunori Muraoka、Mark Bowdan、Hiroyuki Yamakawa：“将激光瑞利散射用于标准真空计和中真空区域实用真空计的可能性的研究” 36. 563- 真空。 567（1993）