Research on atomic force microscope using photothermal vibration and optical detection of micro cantilever

光热振动原子力显微镜及微悬臂梁光学检测研究

• 批准号: 02650026
• 负责人: UMEDA Norihiro
• 金额: $ 1.28万
• 依托单位: Tokyo University of Agriculture and Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1991
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650026/
• 关键词: Photothermal vibration; Optical deflection method; Atomic force microscope; scanning force microscope; micro-cantilever

In this research, a new atomic force microscope based on a photothermal vibration of force sensing cantilever was developed. A surface profile of sample is obtained by scanning the fine needle tip over the sample so as to maintain a force derivative applied to the tip. The force derivative is detected by the use of loCK-in amplifier of which reference frequency is that of photothermal vibration of the cantilever. In the term of research project, we have obtained the results as follow.1) The cantilever was fabricated by a laser assisted etching.2) The atomic force microscope (AFM) system was constructed. The tripod scanner composed of stacking PZTs is used as a fine positioner, and the motorized micrometer is also used as a coarse positioner. The vibration of the cantilever caused by a amplitude modulated laser diode was detected by the optical deflection method with He-Ne laser. The system was mounted on the vibration isolation table. The feedback circuit including the interface of personal computer was constructed.3) In order to estimate the lateral and vertical resolution of the AFM, the samples of known structure around the size of submicrometer was observed by the AFM. As a result the lateral and vertical resolution of the AFM was 2 and 50 nm, respectively.

在这项研究中，开发了一种基于力传感悬臂光热振动的新型原子力显微镜。通过在样品上扫描细针尖端以保持施加到尖端的力导数来获得样品的表面轮廓。利用锁定放大器检测力导数，锁定放大器的参考频率是悬臂梁的光热振动频率。在课题研究过程中，我们取得了以下成果：1）采用激光辅助刻蚀技术制作了悬臂梁。2）搭建了原子力显微镜（AFM）系统。由堆叠PZT组成的三脚架扫描仪用作精定位器，电动千分尺也用作粗定位器。采用氦氖激光光学偏转法检测了调幅激光二极管引起的悬臂振动。该系统安装在隔振台上。构建了包括个人计算机接口的反馈电路。3)为了估计AFM的横向和纵向分辨率，利用AFM对亚微米尺寸的已知结构样品进行观察。结果，AFM 的横向和垂直分辨率分别为 2 和 50 nm。

项目成果

N.Umeda,S.Ishizaki,H.Uwai: "Scanning Attractive Force Microscope Using Photothesmal Vibration" Journal of Vacuum Scieuce & Technology B. (1991)

N.Umeda、S.Ishizaki、H.Uwai：“利用光热振动扫描吸引力显微镜”真空科学杂志

石崎 繁利,梅田 倫弘: "フォトサ-マル振動走査型引力顕微鏡による電荷の堆積" 第8回光波センシング技術研究会講演論文集. 12月. 143-148 (1991)

Shigetoshi Ishizaki、Tomohiro Umeda：“使用光热振动扫描重力显微镜进行电荷沉积”第 8 届光波传感技术研究组论文集（1991 年 12 月）。

N. Umeda and S. Ishizaki: "Present status and trends on scanning force microscope" Kinzoku. No. 5. 30-34 (1991)

N. Umeda 和 S. Ishizaki：“扫描力显微镜的现状和趋势”Kinzoku。

N.Umeda,S.Ishizaki,H.Uwai: "Scanning attractive force microscope using photothermal vibration" J.Vac.Sci.Technol.B. B9. 1318-1322 (1991)

N.Umeda、S.Ishizaki、H.Uwai：“利用光热振动扫描吸引力显微镜”J.Vac.Sci.Technol.B。

N. Umeda, S. Ishizaki and H. Uwai: "Scanning attractive force microscope using photothermal vibration" J. Vac. Sci. Technol.B9, (2). 1318-1322 (1991)

N. Umeda、S. Ishizaki 和 H. Uwai：“使用光热振动扫描吸引力显微镜”J. Vac。