Study on Laser Crystallization Process in Semiconductor

半导体激光晶化工艺研究

基本信息

批准号：
61550016
负责人：
YAMADA Masayoshi
金额：
$ 1.34万
依托单位：
Kyoto Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1986
资助国家：
日本
起止时间：
1986 至 1987
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-61550016/
关键词：
Laser crystallization Heat Analysis Three dimensional integrated circuits Laser annealing Semiconductor 温度

项目摘要

1) A numerical calculation algorism has been developped to solve the nonlinear heat equation including the temperature dependences of optical constant, themal conductivity and diffusivity, based on the linear solution of heat equation in a semi-infinite multilayer structure.2) An effective temperature, denoting the absorption rate of latent heat, has been intriduced to include the latent heat on phase transition between solid and liquid to the nonlinear numerical calculation algorism. If the effective temperature is between 1412゜C and 2857゜C, it means a partial melting. If it is above 2857゜C, then it means a melting.3) The numerical calculation results have been compared with the experimental results on melting width in Si/SiO_2/Si. It is found that the melting occurs effectively at the effective temperature of 2100゜C corresponding to the absorption of half a latent heat.4) By using a microscopic infrared camera, the radiation images have been observed to distinguish the boundaries between solid and liquid and recorded by VTR.5) A digital image input/output instrument has been made to process the images recorded by the VTR. It is found that there are mixtures of solid and liquid and that the part of solid is the nucleation center of crystallization.6) It is found that the mixtures of solid and liquid are strongly influenced by the intensity distribution of irradiating laser; that is, the temperature distribution. At the present moment, it is not clear what dominates over the physical mechanism on mixtures of solid and liquid. On this problem further investigation is needed.

1）已经开发了一种数值计算算法来求解非线性热方程，包括基于光学常数的温度依赖性，电导率和难度，基于在半无限多层结构中热方程的线性溶液，2）有效的温度，表明固体热量的固体速度和较差的固体速率是在较差的固体速率，该阶段是在较差的固体速率，在较差的速度上是在逐步识别的，该阶段是在逐步识别的，该阶段是在近距离的固体速率，而持续的持续性是在逐步的。算法。温度在1412°C和2857°C之间，意味着部分熔化。如果它高于2857°C，则表示熔化。3）已将数值计算结果与SI/SIO_2/SI中熔化宽度的实验结果进行了比较。发现熔化在2100°C的有效温度有效发生，对应于半部潜热的抽象。4）通过使用显微镜红外摄像头，已经观察到辐射图像可以区分固体和液体之间的边界，并通过vtr.5记录了数字图像/输出仪器，以通过数字图像/输出仪器来处理图像记录VTR。发现存在固体和液体的混合物，固体的一部分是结晶的成核中心。6）发现，固体和液体的混合物受辐照激光的强度分布的强烈影响；也就是说，温度分布。目前，尚不清楚在固体和液体混合物上的物理机制上占主导地位。在此问题上需要进一步调查。