Advanced application of atmospheric-pressure plasma jet using a surgical needle to microfabrication

使用手术针的大气压等离子体射流在微加工中的高级应用

基本信息

批准号：
17560645
负责人：
YOSHIKI Hiroyuki
金额：
$ 2.3万
依托单位：
Tsuruoka National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-17560645/
关键词：
Plasma processing Plasma jet Surgical needle Atmospheric-pressure plasma Removal of insulator films Localized etching Carbon nanotubes Localized CVD プラズマ加工局所CVD成長

项目摘要

Atmospheric-pressure microplasma jets (AP μ PJs) of Ar, Ar/0_2 and air were generated from the tip of a stainless steel surgical needle having outer and inner diameter of 0.4 and 0.2 mm, respectively, with a rf excitation of 13.56 MHz. The steel needle functions both as a powered electrode and gas nozzle. The operating power is 1-6 W and the corresponding peak-to-peak voltage is about 1.5 kV. The AP μ PJ was applied to the localized etching of a polyamide-imide insulator film (thickness of 10 μ m) of a copper winding wire of 90μ m diameter. The insulator film around the copper wire was completely removed by the irradiated plasma from a certain direction without fusing the wire. The removal time under the Ar AP μ PJ irradiation was only 3 s at a rf power of 4 W. Fluorescence microscopy and scanning electron microscope images reveal that good selectivity of the insulator film to the copper wire was achieved.Vertically aligned bundles of multiwalled carbon nanotubes (MWNTs) were grown on the tip of a φ 0.5 mm Ni wire using an AP μ PJ generated by a RF-powered surgical needle. A CH_4/H_2 gas mixture was used for the source gas, and the Ni wire used as the substrate was negatively biased to heat it by ion bombardment. At a ratio of CH_4:H_2=1:35,a RF power of 6 W, a DC bias voltage of-100 V and a growth time of 2 min, the tip of the Ni wire was covered by bamboo-like MWNT bundles, whose diameter and length were about 600 nm and 2-3μm, respectively. Each bundle consisted of about 1500 tubes with diameters of 10-25 nm. The growth temperature of the MWNT bundles was approximately 500℃.

Ar、Ar/0_2 和空气的大气压微等离子体射流 (AP μ PJs) 从外径和内径分别为 0.4 和 0.2 mm 的不锈钢手术针尖端产生，射频激励为 13.56 MHz。钢针既可作为通电电极，又可作为气体喷嘴，工作功率为1-6 W，相应的峰峰值电压约为1.5 kV。 APμPJ应用于直径为90μm的铜绕组的聚酰胺酰亚胺绝缘膜（厚度为10μm）的局部蚀刻，通过照射等离子体将铜线周围的绝缘膜完全去除。射频功率为 4 W 时，Ar AP μ PJ 照射下的去除时间仅为 3 s。荧光显微镜和扫描电子显微镜。图像显示，绝缘体薄膜对铜线具有良好的选择性。使用射频驱动手术产生的 AP μ PJ 在 φ 0.5 mm 镍线的尖端上生长垂直排列的多壁碳纳米管 (MWNT) 束使用CH_4/H_2气体混合物作为源气体，并以负偏压的方式通过离子轰击对其进行加热。 CH_4:H_2=1:35，射频功率6 W，直流偏压-100 V，生长时间2 min，镍丝尖端被竹状MWNT束覆盖，其直径和长度MWNT束的生长温度分别约为600 nm和2-3μm。 500℃。