A New Environmental Chamber for Nano-meter Position Measurement and control on Ultra-precision Machine Tools with Interferometry

干涉测量超精密机床纳米位置测量与控制的新型环境室

• 批准号: 17560112
• 负责人: YAMAGUCHI Katsumi
• 金额: $ 1.02万
• 依托单位: Technology Research Institute of Osaka Prefecture
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-17560112/
• 关键词: Atmospheric Compensation; Environmental Chamber; Laser Interferometer; Ultra-precision Machining; Air pressure; Temperature; Relative humidity; Positioning, Accuracy; 環境-定制御チャンバー

Since laser interferometer systems are high accuracy, non-contact measurement and easy installation, the systems have been incorporated into such manufacturing equipment as precision cutting machines, measuring machines and lithographic systems. The unit of measure for a laser measurement system is dependent on the wavelength of the laser source. The wavelength in atmosphere is affected by the refractive index of surrounding air, which depends on the temperature, relative humidity and air pressure. Without proper environmental control, degradation in system accuracy and repeatability will occur and limit the quality of final products. We have designed and produced a new environmental chamber for precision machine tools with laser interferometer system. The chamber consists of a precise air conditioner, a negative/positive pressure controller and a closed workspace surrounded with the insulating panels. The air conditioner provides the controlled environment within temperature change of 0.2℃ P-V (peak-to-valley) and humidity change of 4% P-V. The negative/positive controller can maintain an even pressure within an accuracy of 0.4hPa P-V by adjusting inside pressure to either negative or positive relative to outside. To utilize the insulating panels for making the chamber frame allows for low cost and easy construction. The fluctuation in the relative tool displacement to the workpiece and the surface profile formed by raster flycutting are measured to verify the environmental control performance for a long period. A fluctuation of 109nm P-V in the displacement and a form accuracy of 91nm P-V are obtained ; both the results demonstrate the highly compensated accuracy due to the new environmental chamber.

由于激光干涉仪系统的精度高，非接触式测量和易于安装，因此将系统纳入了精确切割机，测量机和光刻系统等制造设备中。激光测量系统的测量单元取决于激光源的波长。大气中的波长受周围空气的折射率的影响，这取决于温度，相对湿度和气压。如果没有适当的环境控制，系统的准确性和可重复性会降解并限制最终产品的质量。我们设计并生产了一个新的环境室，用于使用激光干涉仪系统的精密机床。腔室由精密空调，负/正压控制器和隔热面板周围的闭合工作区组成。空调在温度变化0.2℃p-V（峰值到谷）中提供受控环境，湿度变化为4％P-V。负/正控制器可以通过将内部压力调节到外部的负数或正面，可以在0.4HPa P-V的精度内保持压力。利用绝缘面板制造腔室框架可以实现低成本和易于构造。测量了相对工具位移到工作场所的波动和由栅格蝇架形成的表面轮廓的波动，以长期验证环境控制性能。位移中109nm P-V的波动和91nm P-V的形式精度得到了波动；两种结果都证明了由于新的环境室的高度补偿准确性。

项目成果

Improvement of Atmospheric Compensator to Reduce the Laser Measurement Error for Ultra-Precision Machine Tools(in Japanese)

大气补偿器的改进减少超精密机床激光测量误差（日文）

• 发表时间: 2005
• 期刊: Proceeding of Autumn Conference of Japan Society for Precision Engineering
• 作者: Kazutoshi ADACHI;Katsumi YAMAGUCHI;Sakuro HONDA;Kazuo Murata;Hideki IWAI;Nobutaka TAKAMI;Shoichi SHIMADA;Naoya IKAWA
• 通讯作者: Naoya IKAWA

ナノ加工・計測計測のための環境一定制御チャンバーの開発

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• 发表时间: 2007
• 期刊: 日本機械学会論文集C編 73-731
• 作者: Kazutoshi ADACHI;Katsumi YAMAGUCHI;Hideki IWAI;Sakuro HONDA;Yuzo OKAWA;Shoichi SHIMADA;山口勝己(他5名 1番目)
• 通讯作者: 山口勝己(他5名 1番目)

超精密加工機におけるレーザー測長誤差のための環境補正装置の開発

超精密加工机激光测长误差环境校正装置的研制

• 发表时间: 2007
• 期刊: 精密工学会誌 73-4
• 作者: 足立和俊;山口勝己(他4名 2番目)
• 通讯作者: 山口勝己(他4名 2番目)

レーザ測長誤差低減のための環境補償技術-環境補正装置の開発と超精密加工機への適用-

减少激光测长误差的环境补偿技术 - 环境补偿装置的开发及其在超精密加工机上的应用 -

• 发表时间: 2006
• 期刊: 光アライアンス 17・12
• 作者: 足立和俊;山口勝己(他1名 2番目)
• 通讯作者: 山口勝己(他1名 2番目)

ナノ加工・計測を実現する環境補償装置の開発

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• 发表时间: 2006
• 期刊: 日本機械学会 第6回生産加工・工作機械部門講演会講演論文集
• 作者: 足立和俊;山口勝己(他1名 2番目);山口勝己(他5名 1番目)
• 通讯作者: 山口勝己(他5名 1番目)