DEVELOPMENT OF UV ACTIVE AMORPHOUS TIO2 THIN FILMS AND APPLICATION TO ENVIRONMENTAL SENSOR

紫外活性非晶二氧化钛薄膜的研制及其在环境传感器中的应用

基本信息

批准号：
15560312
负责人：
HATANAKA Yoshinori
金额：
$ 2.3万
依托单位：
AICHI UNIVERSITY OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560312/
关键词：
Environmental Material TiO2 Plasma CVD photo-catalytic material Hydrophilic function Oxygen sensor titanium tetra-isoropoxide Coating technology 酸化チタン TiO2 浄化作用環境材料

项目摘要

Titanium oxide films prepared by a remote plasma enhanced (RPE) CVD are in amorphous state and show high sensitive photo-conduction for UV radiation and excellent wet ability. These films contain a lot of OH groups in its film. These are attributed to the compensation of the defect states by OH groups included. In this study, it is also shown that the responses of the photo-conductive current are very slow with time constant of over 10 minutes. When the light was removed, the photocurrent continued to flow for long time with several hour time constants. These mean that photo-excited carriers could not recombine with the excited holes or electrons and iterated capture and emission between conduction band and capture states. Furthermore, photo-current is drastically influenced by the environmental gas, especially oxygen gas. In the environmental gas including oxygen, photocurrent decreases with reverse proportional relation for oxygen partial pressure. It is shown from considering the life time of the photo-excited carriers, these surface reactions of the film between environmental gasses and film surface are well suggested as to be an linear reaction. An application target for these materials has been suggested to be effective for an environmental oxygen gas sensor and coating materials for plastics.

通过远程等离子体增强（RPE）CVD 制备的氧化钛薄膜处于非晶态，对紫外辐射表现出高灵敏度的光电导和优异的润湿能力。这些薄膜在其薄膜中含有大量的OH基团。这些归因于所包含的 OH 基团对缺陷态的补偿。在这项研究中，还表明光导电流的响应非常慢，时间常数超过10分钟。当光被移除时，光电流继续长时间流动，具有几个小时的时间常数。这意味着光激发载流子不能与激发的空穴或电子复合，并且在导带和捕获态之间重复捕获和发射。此外，光电流受环境气体，尤其是氧气的影响很大。在包含氧气的环境气体中，光电流与氧分压成反比例关系而减小。考虑到光激发载流子的寿命，表明环境气体和薄膜表面之间的薄膜表面反应是线性反应。这些材料的应用目标被认为对于环境氧气传感器和塑料涂层材料是有效的。