Novel Numerical Technique for the Analysis of the MEMS Structures with Moving Part by Using the Body Fitted Grid Generation Method with Moving Boundaries and MRTD Method

采用移动边界贴体网格生成法和 MRTD 方法分析带有运动部件的 MEMS 结构的新型数值技术

• 批准号: 15560309
• 负责人: KURODA Michiko
• 金额: $ 1.98万
• 依托单位: Tokyo University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560309/
• 关键词: MEMS; Reconfigurable RF-MEMS; Body fitted grid generation method with moving boundaries; The coupling of the mechanical and electrical equations; FD-TD method; MRTD method; 可変機能デバイス; FDTD法

MEMS are minimized electromechanical devices and systems that are realized using integrated micro fabrication method. And the technology is growing rapidly in RF field, because of the advantage over p-i-n diode or FET switches. The main application areas of MEMS devices are IT(Information Technology), Bioelectromagnetics, Medical Science. An accurate knowledge of the electromagnetic evolution around a moving or rotating body is required for the realization of microwave devices, such as the RF MEMS structures used in phase-shifters, couplers, filters or tuners. But it is tedious to solve these problems numerically in electromagnetic field. Computational technique for the moving boundary problems have been pursued mainly in heat and fluid flow area. Kuroda expanded this novel method to analyze with the FD-TD method in EM field and MEMS devices with moving parts. This technique was applied for the analysis of the MEMS devices with moving parts. By using this technique, variable capacitors with moving parts are analyzed. Numerical results between the velocity, acceleration and displacements are shown and also the MEMS antenna, which has a shift of the resonance frequency for the moving case. This numerical technique has great promise for the realization of new RF-MEMS devices. These results were published in IEEJ Trans in 2003,IEICE Tarns and ACES Journal in 2004. And they were also presented in ACES2003, IEEE APS/URSI2003,PIERS2003,IEEE TCWCT2003,PIERS2004,ACES2004,IEEE APS/URSI2004,IEEE/ACES2005. and will be presented in IEEE APS/URSI2005.

MEMS是使用集成微制造方法实现的最小化机电设备和系统。由于与P-I-N二极管或FET开关相比，该技术在RF领域正在迅速增长。 MEMS设备的主要应用领域是（信息技术），生物电子磁学，医学科学。要实现微波设备，例如在相移，耦合器，滤镜或调谐器中使用的RF MEMS结构，需要对移动或旋转主体周围的电磁演化进行准确的了解。但是，在电磁场中以数字解决这些问题是很乏味的。移动边界问题的计算技术主要是在热和流体流动区域中进行的。 Kuroda扩展了这种新颖的方法，可以用EM领域的FD-TD方法和带有运动部件的MEMS设备进行分析。该技术用于分析具有运动部件的MEMS设备。通过使用此技术，可以分析具有运动部件的可变电容器。显示了速度，加速度和位移之间的数值结果以及MEMS天线，该天线具有移动情况的共振频率的变化。这种数值技术在实现新的RF-MEMS设备方面具有巨大的希望。 These results were published in IEEJ Trans in 2003,IEICE Tarns and ACES Journal in 2004. And they were also presented in ACES2003, IEEE APS/URSI2003,PIERS2003,IEEE TCWCT2003,PIERS2004,ACES2004,IEEE APS/URSI2004,IEEE/ACES2005.并将在IEEE APS/URSI2005中介绍。

项目成果

The Adaptive Body Fitted Grid Generation Method with Moving Boundaries and the Application

移动边界自适应贴体网格生成方法及应用

• 发表时间: 2004
• 期刊: PIERS2004 (Progress of International Electromagnetic Research Symposium)
• 作者: Michiko Kuroda;Kohei Kawano;Takashi Mori;Manos M.Tentzeris;Michiko Kuroda
• 通讯作者: Michiko Kuroda

Numerical Modeling of the Transient behavior of MEMS Structures Involving Motion in Arbitrary Directions

涉及任意方向运动的 MEMS 结构瞬态行为的数值模拟

• 发表时间: 2003
• 期刊: Proc.of the IEEE APS2003(Antenna & Propagation Society) I
• 作者: M.Kuroda;N.Miura;K.Kawano;M.Tentzeris
• 通讯作者: M.Tentzeris

K.Kawano, N.Miura, M.Kuroda, M.Tentzeris: "A Numerical Technique for the Analysis of MEMS Structures using the Coupling of Electromagnetic and Mechanical Equations"Progress of International Electromagnetic Research Symposium. (2004)

K.Kawano、N.Miura、M.Kuroda、M.Tentzeris：“利用电磁和机械方程耦合分析 MEMS 结构的数值技术”国际电磁研究研讨会进展。

Dynamic and electrical analysis of MEMS capacitor with accelerated motion effects

• DOI: 10.1109/wcacem.2005.1469696
• 发表时间: 2005-04
• 期刊: IEEE/ACES International Conference on Wireless Communications and Applied Computational Electromagnetics, 2005.
• 作者: K. Kawano;S. Shahrani;T. Mori;M. Kuroda;M. Tentzeris

M.Kuroda: "The Adaptive Body Fitted Grid Generation Method with Moving Boundaries and the Application"Progress of International Electromagnetic Research Symposium. (2004)

M.Kuroda：“移动边界自适应体贴合网格生成方法及其应用”国际电磁研究研讨会进展。