Fabrication of Bismuth Thin Films Nano-Hall Sensors for Room Temperature Scanning Micro-Hall Probe Microscope Imaging of Ferromagnetic Microstructures

用于铁磁微结构室温扫描微霍尔探针显微镜成像的铋薄膜纳米霍尔传感器的制造

基本信息

批准号：
15560271
负责人：
SANDHU Adarsh
金额：
$ 2.37万
依托单位：
TOKYO INSTITUTE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

A fundamental understanding of the behavior of magnetic domains in external magnetic fields is important for the development of information technology such as ultra-high density magnetic recording media, high coercivity permanent magnets and multilayered ferromagnetic structures used for fabricating novel ‘spintronic'' devices. We have developed a room temperature scanning Hall probe microscopy (RT-SHPM) for the non-invasive and quantitative imaging of localized stray fields at the surfaces of ferromagnetic magnetic microstructures in the presence of pulsed external magnetic fields of 3 T Oe. However, advances in magnetic recording media have led to increasing demands for improvements in the spatial resolution of SHPM which using semiconducting GaAs/AlGaAs micro-Hall sensors is limited to 1.0 x 1.0μm due to surface depletion effects.The use of bismuth (Bi)(a semimetal, which exhibits a large Hall coefficient and negligible surface depletion) for fabrication of submicron Hall sensors sh … More ows promise as a means of improving the spatial resolution of RT-SHPM technology. Conventional MFM systems have a spatial resolution of 〜100nm, a figure which serves as a benchmark and target for studies on spatial resolution.In this research we succeeded in fabricating 50nm x 50nm Hall sensors using Bi thin films deposited by thermal evaporation. The electrical properties of the films were improved by post-deposition annealing in vacuum. The nano-Hall sensors were successfully used for magnetic imaging the surface of crystalline garnet thin films.This report describes the research carried out on "Fabrication of Bismuth Thin Films Nano-Hall Sensors for Room Temperature Scanning Micro-Hall Probe Microscope Imaging of Ferromagnetic Microstructures" as part of the Grant-in-Aid for Scientific Research (c)(2)for two years between 2003 and 2004. The fabrication and electrical characteristics of the Bi nano-Hall sensors are described. Also, the use of the Bi-nanosensors for imaging garnet thin films is demonstrated. Less

对外部磁场中磁畴行为的基本了解对于信息技术的发展非常重要，例如用于制造新型“自旋电子”器件的超高密度磁记录介质、高矫顽力永磁体和多层铁磁结构。开发了一种室温扫描霍尔探针显微镜（RT-SHPM），用于在存在脉冲外磁的情况下对铁磁磁性微结构表面的局部杂散场进行非侵入性定量成像然而，磁记录介质的进步导致对提高 SHPM 空间分辨率的需求不断增加，由于表面耗尽效应，使用半导体 GaAs/AlGaAs 微霍尔传感器的空间分辨率仅限于 1.0 x 1.0μm。使用铋 (Bi)（一种半金属，具有较大的霍尔系数和可忽略不计的表面损耗）来制造亚微米霍尔传感器，有望实现以下效果：一种提高RT-SHPM技术空间分辨率的方法，传统的MFM系统的空间分辨率约为100nm，这个数字可以作为空间分辨率研究的基准和目标。在这项研究中，我们成功地制造了50nm x 50nm霍尔。使用热蒸发沉积的 Bi 薄膜的传感器通过真空沉积后退火改善了薄膜的电性能，纳米霍尔传感器成功用于晶体表面的磁成像。石榴石薄膜。本报告介绍了“用于铁磁微结构的室温扫描微霍尔探针显微镜成像的铋薄膜纳米霍尔传感器的制造”的研究，作为科学研究补助金（c）的一部分)(2) 2003 年至 2004 年两年。Bi 纳米霍尔传感器的制造和电气特性也被描述。展示了用于石榴石薄膜成像的双纳米传感器。

项目成果

期刊论文数量（36）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

High Sensitivity InSb Ultra-Thin Film Micro-Hall Sensors for Bioscreening Applications

DOI：
10.1143/jjap.43.l868
发表时间：
2004-06
期刊：
Japanese Journal of Applied Physics
影响因子：
1.5
作者：
A. Sandhu;H. Sanbonsugi;I. Shibasaki;M. Abe;H. Handa
通讯作者：
A. Sandhu;H. Sanbonsugi;I. Shibasaki;M. Abe;H. Handa

Nano and micro Hall-effect sensors for room-temperature scanning hall probe microscopy

DOI：
10.1016/j.mee.2004.03.029
发表时间：
2004-06
期刊：
Microelectronic Engineering
影响因子：
2.3
作者：
A. Sandhu;A. Okamoto;I. Shibasaki;A. Oral
通讯作者：
A. Sandhu;A. Okamoto;I. Shibasaki;A. Oral

A.Sandhu et al.: "Nano and micro Hall-effect sensors for room-temperature scanning hall probe microscopy"Microelectronic Engineering. (accepted for publication). (2004)

A.Sandhu 等人：“用于室温扫描霍尔探针显微镜的纳米和微型霍尔效应传感器”微电子工程。

DOI：
发表时间：
期刊：
影响因子：
0
作者：
通讯作者：

50 nm Hall sensors for room temperature scanning Hall probe microscopy

DOI：
10.1143/jjap.43.777
发表时间：
2004-02-01
期刊：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
影响因子：
0
作者：
Sandhu, A;Kurosawa, K;Oral, A
通讯作者：
Oral, A

Micro-Hall Devices for Scanning Hall Probe Microscopy

用于扫描霍尔探针显微镜的微霍尔器件