Equipping a transmission electron microscope with a field emission electron gun.

配备带有场发射电子枪的透射电子显微镜。

• 批准号: 13555006
• 负责人: TANJI Takayoshi
• 金额: $ 8.51万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555006/
• 关键词: carbon nano-tube; field emission electron gun; surface decomposition of SiC; precise diamond cutter; focused ion beam (FIB); 収束イオンピーム(FIB)加工; 配向成長; 表面分解法; 炭化珪素; 精密ダイヤモンドカッター; FIB; 電界放出形電子銃; SiC

We investigated to apply carbon nano-tubes (CNT) to field emission electron guns for transmission electron microscopes (TEM). Fundamental tips of SiC are prepared by a precision diamond cutter and CNTs are grown by surface decomposition on the top (000-1) surface. The detail of the process is shown hereafter:1.A rod of SiC single crystal along <0001> orientation having a top surface of 0.5mmx0.5mm is cut out by the precise diamond sow with a blade of a special figure. 2.The strain introduced in the cutting process is removed by chemical etching and chemical washing. 3.Focused Ion Beam (FIB) processing are introduced to make the rod thinner. To avoid damaging the top surface, SiO_2, Al or Won Al was evaporated on the rods. 4.Removed the layer of SiO_2 or Al, the rods were heat-treated in a vacuum of 1Pa at 1700℃ for 6hours. The growth of CNTs was confirmed even on the top surface of 0.2μmx0.3μm. 5.In order to give a high conductivity to the tip, graphite layers were grown on a (1210) surface by a heat-treatment in the vacuum of 1x10^<-2>Pa at 1700℃ for 10hours.Field emission characteristics were measured in a high vacuum chamber less than 1x10^<-7>Pa and emission patterns were observed on a fluorescent screen.

我们研究了将碳纳米管（CNT）应用于透射电子显微镜（TEM）的场发射电子枪。SiC的基本尖端是通过精密金刚石刀具制备的，并且通过顶部的表面分解来生长CNT（000-1）。具体工艺流程如下： 1.采用精密金刚石母头切割出顶面为0.5mmx0.5mm的沿<0001>方向的SiC单晶棒。 2.通过化学蚀刻和化学清洗消除切割过程中引入的应变。3.引入聚焦离子束（FIB）处理，使棒材更薄，避免损坏顶面，SiO_2。 4.去除SiO_2或Al层，将棒材在1Pa真空中1700℃进行热处理。 6小时后，即使在0.2μmx0.3μm的顶面上也确认了CNT的生长。 5.为了使尖端具有高导电性，通过在真空中的热处理在(1210)表面上生长石墨层。 1x10^<-2>Pa、1700℃、10小时。场发射特性在高真空室中测量小于在荧光屏上观察到1×10 ^ -7 Pa和发射图案。

项目成果

T.Tanji et al.: "Holographic Observation of Magnetic Fine-Structures in New Magnetic Materials."Microscopy and Microanalysis 2002, Quebec City, Canada. Aug.4-8. 30-31 (2002)

T.Tanji 等人：“新型磁性材料中磁性精细结构的全息观察”。显微镜和微分析，2002 年，加拿大魁北克市。

M.Hibino et al.: "Phase Contrast Transfer Function of Spherical Aberration Corrected Objective Lens."Proc.15th Int.Cong.on Electron Microscopy, Durban, South Africa, Sept.1-6. Vol.3. 39-40 (2002)

M.Hibino 等人：“球差校正物镜的相衬传递函数”。Proc.15th Int.Cong.on Electron Microscopy，南非德班，9 月 1-6 日。

K.Yamamoto, T.Hirayama, T.Tanji, M.Hibino: "Effects of Fresnel corrections for Phase-shifting electron holography"Microscopy and Microanalysis. 8(suppl.2). 24-25 (2002)

K.Yamamoto、T.Hirayama、T.Tanji、M.Hibino：“菲涅尔校正对相移电子全息术的影响”显微镜和微分析。

丹司敬義: "電子顕微鏡による微細磁気構造の観察"電子顕微鏡. 36・3. 149-155 (2001)

Takayoshi Tanji：“使用电子显微镜观察精细磁结构”《电子显微镜》149-155（2001）。

Y.Murooka: "Self-assembling of hot carbon nanoparticles observed by short pulse-arc-discharge"Chemical Physics Letters. 341. 455-460 (2001)

Y.Murooka：“通过短脉冲电弧放电观察到的热碳纳米粒子的自组装”化学物理快报。