Application of Solvent Extraction to the Treatment of Waste Acid Mixture discharged from IT relating Industry

溶剂萃取在IT相关行业排放废酸混合物处理中的应用

• 批准号: 15360485
• 负责人: SHIBATA Junji
• 金额: $ 4.42万
• 依托单位: Kansai University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360485/
• 关键词: IT industry; Liquid crystal display; Etching waste; Solvent extraction; Waste acid mixture; Separation; シリコンウエハー

In this study the separation technology of waste acid mixture discharged in the production of semi-conductor and liquid crystal display, namely the separation method of acid mixture with solvent extraction was investigated and the process for separation was established The separation methed of acids from waste acid mixture in the production of liquid crystal display was investigated based on the research results carried out last year, where we found that the solvent extraction was a suitable method to separate each acid from waste acid mixture in the production of semi-conductor,The basic study on extraction and stripping of phosphoric, acetic, nitric, sulphuric and hydrochloric acids was carried out by using decanol, TBP(tri-butyl phosphate), TOP(tri-octyl phosphate) etc. as extractants. We clarified the extraction mechanism of each acid with these extractants as well as the characteristics of extraction and stripping of each acid. It was found that the extraction behavior of acid in single compornent is largely different from that of acid in two or three acid components. Though in the extraction process of acid generally the separation of acids is possible, but the concentration of acid is impossible, the concentration and separation of acids will he possible if the characteristics of acid extraction is suitably applied to the acid mixture. For example, if other mineral acids are intentionally added to dilute phosphoric acid waste, the phosphoric acid is recovered in the separated and concentrated form.Based on the fundamental experimental data, the acid separation process was established and the demonstaration test for the proposed separation process was carried out using a small scale pilot plant At the same time the method to improve the recovery with keepinghigh purity was investigated.

本研究对半导体和液晶显示器生产过程中排出的废酸混合物的分离技术，即溶剂萃取分离酸混合物的方法进行了研究，建立了分离工艺流程。基于去年的研究成果，我们对液晶显示器生产中的废酸混合物进行了研究，发现溶剂萃取是从半导体生产中的废酸混合物中分离各种酸的合适方法，基础研究磷酸、醋酸的萃取和反萃，以癸醇、TBP（磷酸三丁酯）、TOP（磷酸三辛酯）等为萃取剂，进行硝酸、硫酸和盐酸的萃取。我们阐明了这些萃取剂对各酸的萃取机理以及各酸的萃取和反萃特性。研究发现，酸在单一组分中的萃取行为与酸在两种或三种酸组分中的萃取行为有很大不同。虽然在酸的萃取过程中，一般可以实现酸的分离，但酸的浓缩是不可能的，但如果将酸萃取的特点适当地应用到酸混合物中，则酸的浓缩和分离是可能的。例如，如果有意向稀磷酸废物中添加其他无机酸，则可以以分离和浓缩的形式回收磷酸。基于基本实验数据，建立了酸分离工艺并对所提出的分离工艺进行了验证测试采用小规模中试装置进行，同时研究了提高回收率并保持高纯度的方法。

项目成果

芝田隼次: "廃棄物処理装置の中の分離技術"分離技術. 33・4. 260-264 (2003)

柴田淳二：《废弃物处理装置的分离技术》33・4（2003）。

J.Shibata, M.Morikawa, N.Yoshikawa, N.Murayama, H.Yamamoto: "Recovery of phosphoric acid in waste acid mixture discharged from the liquid crystal industry"Proceedings of HYDRO 2003. 853-860 (2003)

J.Shibata、M.Morikawa、N.Yoshikawa、N.Murayama、H.Yamamoto：“从液晶工业排出的废酸混合物中回收磷酸”Proceedings of HYDRO 2003. 853-860 (2003)

Separation and Recovery of Acids from Waste Acid Mixture Containing Phosphoric, Nitric and Acetic Acids with Solvent Extraction

溶剂萃取法从含磷酸、硝酸和乙酸的废酸混合物中分离和回收酸

• 发表时间: 2004
• 期刊: Proceedings of CHISA 2004 2
• 作者: J.SHIBATA;N.MURAYAMA;H.YAMAMOTO et al.
• 通讯作者: H.YAMAMOTO et al.

Separation of Acids from Waste Solution Containing Phosphoric, Nitric and Acetic Acids with Solvent Extraction

通过溶剂萃取从含有磷酸、硝酸和乙酸的废液中分离酸

• 发表时间: 2005
• 期刊: Solvent Extraction Research and Development, Japan 12(印刷中)
• 作者: J.SHIBATA;N.MURAYAMA;H.YAMAMOTO et al.
• 通讯作者: H.YAMAMOTO et al.

芝田隼次, 森川正貴, 芳川典生, 山田智子, 村山憲弘, 山本秀樹: "液晶製造工程から排出されるリン酸を主成分とする廃液からの酸の分離回収"化学工学論文集. 29・4. 521-525 (2003)

Junji Shibata、Masataka Morikawa、Norio Yoshikawa、Tomoko Yamada、Norihiro Murayama、Hideki Yamamoto：“从液晶制造过程中排出的以磷酸为主要成分的废液中分离和回收酸”化学工程学报29・4。 .521-525（2003）