Open-air type ozone generator using high-pressure micro-hollow cathode plasmas

采用高压微型空心阴极等离子体的露天式臭氧发生器

• 批准号: 14350143
• 负责人: YASUOKA Koichi
• 金额: $ 8.58万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350143/
• 关键词: Ozone; micro-hollow cathode; microwave plasma; micro-plasma; electron energy; NOx; ozone decomposition; 大気圧プラズマ

Open-air type ozone generator has been developed using atmospheric micro-plasmas which were formed by DC or 2.45 GHz microwave source. Oxygen at a pressure higher than atmospheric pressure passed through a small cavity of 0.2-0.5 mm in diameter where micro-plasmas were generated. The residence time of feed gas within the plasma region was microsecond order. Therefore, the plasma formation can be separated from the radical formation such as ozone and consequently the generated radicals are not dissociated by electron impacts in the micro-plasma characteristics and the ozone generation efficiency were compared between DC and microwave systems. The effects of nitrogen gas on the ozone concentration was 8.2 g/Nm3 and only 25 ppm ozone were generated in the gas mixture of 4% and 80% nitrogen mixed oxygen gas respectively. There was a threshold value of specific energy over that the ozone concentration steeply decreased. High-energy electrons dissociate the nitrogen molecules and generate NO, NO2 which accelerate the ozone decomposition in high-power-density plasmas such as a micro-hollow cathode discharge.

露天型臭氧发电机是使用大气微型等质量开发的，这些大气微型质量是由DC或2.45 GHz微波源形成的。高于大气压的压力下的氧气通过直径为0.2-0.5 mm的小腔，在产生微等字的情况下。血浆区域内进料气的停留时间为微秒阶。因此，可以将血浆形成与自由基形成（例如臭氧）分离，因此，在微等化特征中，电子撞击不会分离产生的自由基，并比较了直流和微波系统之间的臭氧产生效率。氮气对臭氧浓度的影响为8.2 g/nm3，在4％和80％的氮混合氧气中仅产生25 ppm臭氧。比臭氧浓度急剧降低的特定能量的阈值值。高能电子分离氮分子并生成NO，NO2，在高功率密度等离子体中加速臭氧分解，例如微空阴极放电。

项目成果

白井直機, 渡邉英聡, 安岡康一, 石井彰三: "オゾナイザ用マイクロホローカソードプラズマの分光計測"平成15年電気学会全国大会講演論文集. 1-122. 159-159 (2003)

Naoki Shirai、Hidetoshi Watanabe、Koichi Yasuoka、Shozo Ishii：“臭氧发生器微型空心阴极等离子体的光谱测量”日本电气工程师协会 2003 年全国会议记录 1-122 (2003)。

Koichi Yasuoka, Yasunobu Endo, Shozo Ishii: "Experimental study on ozone generation using DC driven micro-plasma"The 8th International Symposium on High Pressure Low Temperature Plasma Chemistry. 217-221 (2002)

Koichi Yasuoka、Yasunobu Endo、Shozo Ishii：“利用直流驱动微等离子体产生臭氧的实验研究”第八届国际高压低温等离子体化学研讨会。

遠藤 康信, 安岡 康一, 石井 彰三: "マイクロホローカソード放電によるオゾン生成特性"電気学会論文誌A 基礎・材料・共通部門誌. 123・4. 364-369 (2003)

Yasunobu Endo、Koichi Yasuoka、Shozo Ishii：“微空心阴极放电的臭氧产生特性”IEEJ Transactions A，基础/材料/公共部分期刊 123・4（2003）。

Atsushi Yamatake, Koichi Yasuoka, Shozo Ishii: "Ozone Generation by a DC Driven Micro-Hollow Cathode Discharge in Nitrogen Mixed Oxygen"Japanese Journal of Applied Physics. (to be published). (2004)

Atsushi Yamatake、Koichi Yasuoka、Shozo Ishii：“氮混合氧中直流驱动微空心阴极放电产生臭氧”日本应用物理学杂志。

Y.Endo, K.Yasuoka, S.Ishii: "Characteristics of Ozone Generation using a Micro Hollow Cathode Discharge, Characteristics of Ozone Generation using a Micro Hollow Cathode Discharge"IEEJ Trans.FM. Vol.123,No.4. 364-369 (2004)

Y.Endo、K.Yasuoka、S.Ishii：“使用微型空心阴极放电产生臭氧的特性，使用微型空心阴极放电产生臭氧的特性”IEEJ Trans.FM。