Applied Study on Ion Absorption Pump for Oxygen by a Reactive Cathode Sputter Discharge

反应阴极溅射放电制氧离子吸收泵的应用研究

基本信息

批准号：
11555008
负责人：
FUNATO Yasuyuki
金额：
$ 2.82万
依托单位：
Suzuka National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11555008/
关键词：
Ion Pump Reactive Cathode LaB6 Sputter Discharge Oxygen Partial Pressure Plasma Parameter Out Gases

项目摘要

1. Basic experiment for production and improvement of the LaB6 cathode sputtering ion pump was carried out. In pump container of diameter of 6 cm and made of SUS-304 of the 200mm length, LaB6 disk of 5 mm thickness and 50mm diameter is installed as a cathode electrode.2. The experimental device consists of trial manufacture LaB6 ion pump, traditional-model titanium pump, and differential evacuation pump sysytem. The measurement system was made to be satisfactory by using ultrahigh-vacuum ionization gauge, mass filter type analyzer and Pirani vacuum system.3. The detailed experiment was carried out on the correlation of discharge parameters and pumping characteristic (Pump-down characteristics, exhaust velocity, partial pressure dynamics), and the experimental verification of high exhaust speed of oxygen and water for boron and LaB6 film was got.4. The measurement of plasma parameters. In respect of electron density, electron temperature and space potential of glow-discharge plasma, Langmuir probe was used. The relation of pump exhaust characteristic and sputter discharge became the evidence, and the condition for getting the more high-efficient exhaust was pursued Gas release, absorption behavior during the discharge, recycling behavior with the wall, partial pressure characteristics were analyzed numerically and the results were repored everywhere in the conferences.5. Image diagnostic. The shape of the sputter plasma column was pursued by photographing of the cross sectional photograph and the image processing. These are necessary for the optimization of the plasma production condition for application of the plasma.6. The precise measurement of the residual gas analysis. Especially, each exhaust speed for the partial pressure was measured, and the relation between partial pressure pattern and arrival degree of vacuum was pursued.

1。进行LAB6阴极溅射离子泵的生产和改进的基本实验。在直径为6 cm的泵容器中，由200mm长度的SUS-304制成，LAB6磁盘为5 mm，直径为50mm，作为阴极电极2。实验设备由试验制造实验室泵，传统模型钛泵和差速液泵Sysytem组成。通过使用超高维库仪，质量过滤器类型分析仪和Pirani真空系统，使测量系统令人满意。3。对排放参数和泵送特征的相关性进行了详细的实验（泵向下特征，排气速度，部分压力动力学），以及对硼和Lab6膜的氧气和水的高排气速度的实验验证。。血浆参数的测量。在电子密度，电子温度和发光血浆的空间电位方面，使用了langmuir探针。泵的排气特性和溅射排放的关系成为证据，追求更高效率的排气释放，放电期间的吸收行为，对墙壁的回收行为，分析局部压力特征，并进行了结果分析和结果。在会议上到处都有记录。5。图像诊断。通过拍摄横截面照片和图像处理来追求溅射等离子体柱的形状。这些对于优化等离子的血浆生产条件是必不可少的。6。残余气体分析的精确测量。特别是，测量了部分压力的每个排气速度，并追求了二压模式与到达程度之间的关系。