Development of Super Resolution Phase Electron Microscopy

超分辨率相位电子显微镜的发展

• 批准号: 10450037
• 负责人: TAKAI Yoshizo
• 金额: $ 2.94万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-10450037/
• 关键词: Phase Electron Microscope; Defocus Image Modulation Processing; 3D Fourier Filtering; Spherical aberration Correction; Aberration-Free observation; Hollow Cone Illumination; Real-Time Correction; 実時間観察; 焦点位置変調型画像処理; 能動型画像処理; 非点収差補正; コマ収差補正; 超解

In a high-resolution transmission electron microscope, the influence of a spherical aberration which intrinsically remains in the conventional magnetic lenses disturbs the interpretation for the atomic structure directly from the observed images. Defocus image modulation processing (DIMP) is one of the most promising approaches for observing spherical aberration-free phase and amplitude images with a transmission electron microscope. Since DIMP is based on a bipolar weighted image integration of the observed defocus series, all the processing of DIMP is performed in real space without Fourier transform. Therefore, the method can be rather easily applied to real-time processing by using a method of irradiation time control of a primary electron beam during accelerating voltage modulation. We have developed a real-time DIMP-EM using accelerating voltage modulation, recently. The original DIMP has presumed the observation under axial illumination, but DIMP can be extended for hollow-cone … More illumination (HCI) to realize much higher resolution, which has been already confirmed in the experiment using an optical microscope. In the present research, DIMP has been extended to HCI using an electron microscope for the first time. The processed image showed 10% higher resolution than the information limit, resulting in the realization of super resolution phase electron microscope having higher resolution than its attainable resolution under axial illumination.As another method to achieve super resolution electron microscopy, three dimensional Fourier filtering method has been mathematically derived using a proposed three dimensional image formation theory. Phase and amplitude images with spherical aberration correction has been confirmed in experiments. In the results, the resolution of the reconstructed phase image was improved from Scherzer resolution limit to the information limit because of the correction of spherical aberration. The 3D Fourier filtering method can be also applied to correct comprehensive aberrations, such as astigmatic aberration and coma aberration. Less

在高分辨率的透射电子显微镜中，球形像差的影响本质地保留在常规磁性镜片中，使原子结构直接从观察到的图像中直接从原子结构中进行解释。 Defocus图像调制处理（DIMP）是使用透射电子显微镜观察无球畸变相和放大器图像的最有望的方法之一。由于DIMP是基于观察到的DeFocus系列的双极加权图像的整合，因此DIMP的所有处理均在无傅立叶变换的情况下在真实空间中执行。因此，通过在加速度电压调制过程中使用原代电子束的辐照时间控制方法，可以轻松地将该方法应用于实时处理。最近，我们使用加速度电压调制开发了实时DIMP-EM。原始的DIMP已在轴向照明下进行了观察，但是可以扩展DIMP以扩展到空心 - 更多的照明（HCI）以实现更高的分辨率，这已经在实验中使用光学显微镜进行了证实。在本研究中，DIMP首次使用电子显微镜扩展到HCI。处理后的图像显示，分辨率比信息限制高10％，从而导致超级分辨率相电子显微镜的分辨率高于其在轴向照明下可达到的分辨率高的分辨率。作为实现超级分辨率电子显微镜的另一种方法，使用提出的三维傅立叶滤波方法是使用拟议的三维三维图像形成的三维傅立叶滤波方法。实验已确认具有球形像差校正的相位和放大器图像。在结果中，由于球形畸变的校正，从Scherzer分辨率限制到信息限制，将重建相图像的分辨率提高了。 3D傅立叶过滤方法也可以应用于纠正综合畸变，例如敏锐的畸变和昏迷。较少的

项目成果

Y.Takai et al.: "Defocus Image Modulation Processing Electron Microscope : Dynamic Observation of Crystal Deformation"Proc.of the 7th Asia-Psific Electron Microscopy Conference. 1. 128-129 (2000)

Y.Takai等人：“散焦图像调制处理电子显微镜：晶体变形的动态观察”第七届亚洲电子显微镜会议论文集。

T.Kawasaki, Y.Takai, T.Ikuta and R.Shimizu: "Construction of local area electron diffraction pattern using through-focus images"Eighth Conference on Frontiers of Electron Microscopy in Materials Science of Electron Microscopy in Materials Science. 1. 100-

T.Kawasaki、Y.Takai、T.Ikuta 和 R.Shimizu：“使用离焦图像构建局部区域电子衍射图案”第八届材料科学电子显微镜前沿会议材料科学电子显微镜。

Y.Takai, H.Utsuro, T.Kawasaki, Y.Kimura, T.Ikuta and R.Shimizu: "Real Time Defocus Image Modulation Processing Electron Microscope"Proc.of the 7th NIRIM Int. Symposium on Advanced Materials. 1. 65-66 (2000)

Y.Takai、H.Utsuro、T.Kawasaki、Y.Kimura、T.Ikuta 和 R.Shimizu：“实时散焦图像调制处理电子显微镜”Proc. of the 7th NIRIM Int.

Y.Takai: "Real-time correction of spherical aberration by defocus-image modulation processing"Eighth Conference on Frontiers of Electron Microscopy in Materials Science of Electron Microscopy in Materials Science. 1. 57-57 (2000)

Y.Takai：“通过散焦图像调制处理实时校正球差”第八届材料科学电子显微镜前沿会议材料科学电子显微镜。

T.Ueda et al.: "Cross-sectional transmission electron microscopic observation of etch hillocks and etch pits in LiTa03 single crystal"Japan Journal Applied Physics. (submitted). (1999)

T.Ueda等：“LiTa03单晶中蚀刻小丘和蚀刻坑的横截面透射电子显微镜观察”日本应用物理杂志。