Synthesis of compound-semiconductor superlattice structures with isotopic modulation and their properties

同位素调制化合物半导体超晶格结构的合成及其性能

• 批准号: 19201019
• 负责人: HANEDA Hajime
• 金额: $ 30.78万
• 依托单位: National Institute for Materials Science
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2007
• 资助国家: 日本
• 起止时间: 2007 至 2009
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-19201019/
• 关键词: 同位体; フォノン; 酸化物半導体; 窒化物半導体; 人工超格子; 拡散; SIMS

The isotope-modulated superlattice structures of zinc oxide (ZnO), gallium nitride (GaN) and aluminum nitride (AlN), that are wide bandgap semiconductors, were synthesized successfully. The isotope with same electronic state and different mass number were intentionally distributed in these thin films. The changes of lattice vibrations, crystallographic properties and optical properties of these thin films were investigated. Furthermore, precisely measurements of the mass difference of isotope using a secondary ion mass spectrometry (SIMS) were carried out to calculate the diffusion coefficients exactly. Based on these experimental results, the lattice defect structure of thin films and the growth mechanism of particles were clarified successfully.

成功合成了宽带隙半导体氧化锌（ZnO）、氮化镓（GaN）和氮化铝（AlN）的同位素调制超晶格结构。具有相同电子态和不同质量数的同位素被故意分布在这些薄膜中。研究了这些薄膜的晶格振动、晶体学性质和光学性质的变化。此外，使用二次离子质谱（SIMS）精确测量同位素的质量差，以准确计算扩散系数。基于这些实验结果，成功阐明了薄膜的晶格缺陷结构和颗粒的生长机制。

项目成果

Bicrystal Study on grain boundary diffusion of Al_2O_3

Al_2O_3晶界扩散的双晶研究

• 发表时间: 2009
• 作者: K. Tateyama;K. Fukui;H. Shimoda;Shotaro Uto;Shuki Ushio;T.Nakagawa
• 通讯作者: T.Nakagawa

High-presure phase transition to the Gd_2S_3 structure in Sc_2O_3 : A new trend in dense structures in sesquioxides

Sc_2O_3 中向 Gd_2S_3 结构的高压相变：倍半氧化物致密结构的新趋势

• 发表时间: 2009
• 期刊: Inorganic Chemistry 48
• 作者: H.Yusa;et al.
• 通讯作者: et al.

Periodic Supply of Indium as Surfactant for N-Polar InN Growth by Plasma-Assisted Molecular-Beam Epitaxy

通过等离子体辅助分子束外延定期供应铟作为 N 极 InN 生长的表面活性剂

• 发表时间: 2009
• 期刊: Applied Physics Letters 95
• 作者: YZ.Yao;et al.
• 通讯作者: et al.

Oxygen defect characterization in barium titanate ceramics by a Nano-SIMS

利用 Nano-SIMS 表征钛酸钡陶瓷中的氧缺陷

• 发表时间: 2007
• 作者: Prem Pal;K. Sato;Hajime Haneda
• 通讯作者: Hajime Haneda

Hard x-ray photoemission spectroscopy in wurtzite-type zinc magnesium oxide solid-solution films grown by pulsed-laser deposition

脉冲激光沉积生长的纤锌矿型氧化锌镁固溶体薄膜的硬 X 射线光电子能谱

• 发表时间: 2008
• 期刊: Appl Phys. Lett. 92
• 作者: T. Ohsawa;et al.
• 通讯作者: et al.