RF MEMS device based on micromachining

基于微机械加工的射频MEMS器件

基本信息

  • 批准号:
    16201027
  • 负责人:
  • 金额:
    $ 31.2万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
  • 财政年份:
    2004
  • 资助国家:
    日本
  • 起止时间:
    2004 至 2006
  • 项目状态:
    已结题

项目摘要

Three-dimensional microstructures, sensors and actuators can be fabricated on a silicon chip using micromachining which is an extended technology based microfabrication for integrated circuits. RF MEMS (Radio Frequency Micro Electro Mechanical Systems) has been developed to produce RF components for wireless systems. Switches (relays), variable capacitors, micromechanical resonators for time (frequency) references or RF filters, RF interconnection and coils which are fabricated on thin self supported membranes and hence have small stray capacitances can be made by this technology. Following achievements are obtained in this research program.Packaging technologies for the RF MEMS as wafer level packaging processes and electrical feedthrough structures for an electrical interconnection for high speed signal from the top side to the backside of silicon chips were developed. MEMS switches as contact type and capacitive type which are actuated electrostatically were developed.MEMS switches … More were applied for a flexible flat panel display and commercialized as components for high speed LSI testers.Micromechanical resonators can have high resonant frequencies. The extension mode enables higher resonant frequency than the bending mode because of the high spring constant of the extension mode. By making the resonant frequency determined by the lateral dimension multiple resonators with different resonant frequencies can be integrated on a chip. An electrostatically driven wine glass mode silicon disk resonator of witch diameter is 20 μm demonstrated a resonant frequencies of approximately 100 MHz. Since the resonant frequency of such small resonators can be fluctuated by absorbing gas MEMS resonator was fabricated in a vacuum cavity in a silicon chip to stabilize the resonant frequency. Micromechanical resonators have an inherent problem of phase noise caused by thermomechanical noise.The thermomechanical noise also limit the resolution of resonating sensors. Extreme sensitivity is required for MRFM (Magnetic Resonance Force Microscopy) for the MRI (Magnetic Resonance Microscopy) of small samples as biological cell. The noise problems were studied and the phase noise could be reduced by a parametric squeeze damping. Cantilever resonant sensors which have high quality factor in atmosphere were.developed by using quartz material with thickness share mode.High aspect ratio planer coils.were fabricated to reduce the resistance.and high quality factor as high as 85 at 1.6 GHz was achieved for the purpose of the MRI for the small samples. Less
可以使用微加工在硅芯片上制造三维微结构,传感器和执行器,这是用于集成电路的扩展基于技术的微型制造。 RF MEMS(射频微电动机械系统)已开发出来为无线系统生产RF组件。开关(继电器),可变电容器,时间(频率)引用或RF过滤器的微机械谐振器,RF互连和线圈是在薄的自动支撑机制上制造的,因此可以由该技术制成较小的流量电容。在此研究计划中获得了以下成就。RF MEMS的包装技术是摇动级别的包装过程和电馈电结构,用于从硅芯片的顶部到背面的高速信号的电气连接的电源。 MEMS开关作为接触类型和电容类型,它们是通过静电开发的。MEMS开关……更多用于灵活的平板显示屏,并将其作为高速LSI测试仪的组件进行商业化。Micromechanical谐振器可能具有高共振频率。由于扩展模式的高弹簧常数,扩展模式比弯曲模式更高的谐振频率。通过使通过横向尺寸确定具有不同谐振频率的谐振频率可以集成在芯片上。静电驱动的酒玻璃模式硅盘直径为20μm,显示出约100 MHz的谐振频率。由于可以通过吸收气体mems谐振器在硅芯片中的真空腔中制造,因此可以通过吸收气体mems谐振器来波动,以稳定谐振频率。微机械谐振器具有由热机械噪声引起的继承的相位噪声问题。热机械噪声还限制了共振传感器的分辨率。对于小样品作为生物细胞的MRI(磁共振显微镜),需要MRFM(磁共振显微镜)的MRFM(磁共振力显微镜)。研究了噪声问题,可以通过参数挤压阻尼来减少相位噪声。在大气中具有高质量因子的悬臂谐振传感器是通过使用具有厚度共享模式的石英材料来开发的。高宽高比刨花器线圈制造以降低电阻,高质量的高质量在1.6 GHz时为小样品的MRI目的达到了1.6 GHz。较少的

项目成果

期刊论文数量(139)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Parametrically amplified thermal resonant sensor with pseudo-cooling effect
Fabrication and characterization of high aspect ratio microcoils using silicon lost molding process
使用硅消失模工艺制造高纵横比微线圈并表征
Frontiers in Electronics (Recent Progress of Application-oriented MEMS through Industry-university Collaboration)
电子前沿(面向应用的MEMS产学合作最新进展)
  • DOI:
  • 发表时间:
    2006
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Said Suleiman Bakari;Said Ali Vuai;A. Tokuyama;M.Esashi et al.
  • 通讯作者:
    M.Esashi et al.
Electrical Interconnection through Silicon wafer for High Speed Signal Transmission (in Japanese)
通过硅片进行电气互连以实现高速信号传输(日语)
Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier
采用轻掺杂硅片载体的无谐振毫米波共面波导硅微机电系统封装
  • DOI:
  • 发表时间:
    2005
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Khan;M.N.I.;R.Suwa;A.Hagihara;荒井 晃作;Y.T.Song et al.
  • 通讯作者:
    Y.T.Song et al.
{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ monograph.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ sciAawards.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ conferencePapers.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ patent.updateTime }}

ESASHI Masayoshi其他文献

ESASHI Masayoshi的其他文献

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

{{ truncateString('ESASHI Masayoshi', 18)}}的其他基金

Massive Parallel Electron Beam Lithography System
大规模并行电子束光刻系统
  • 批准号:
    19101005
  • 财政年份:
    2007
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Scientific Research (S)
Multi-functional Active Catheter
多功能主动导管
  • 批准号:
    10359001
  • 财政年份:
    1998
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A).
Joint Research on Micro Fluid Control System
微流体控制系统联合研究
  • 批准号:
    10044112
  • 财政年份:
    1998
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B).
Ultra Sensing Using Highly Precise Micromachining
使用高精度微机械加工实现超传感
  • 批准号:
    10305033
  • 财政年份:
    1998
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A).
Joint study on high performance resonant sensors
高性能谐振传感器联合研究
  • 批准号:
    07044114
  • 财政年份:
    1995
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for international Scientific Research
Integrated Inertia Measurement Systems
集成惯性测量系统
  • 批准号:
    07555125
  • 财政年份:
    1995
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Flexible micro motion-systems having distributed actuators
具有分布式执行器的灵活微运动系统
  • 批准号:
    07405006
  • 财政年份:
    1995
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Microactuator by Photofabrication
光加工微致动器
  • 批准号:
    03102001
  • 财政年份:
    1991
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Specially Promoted Research
Joint Study on Integrated Clinical Analysis System
综合临床分析系统联合研究
  • 批准号:
    03044019
  • 财政年份:
    1991
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for international Scientific Research
Implantable Pressure Measurement System
植入式压力测量系统
  • 批准号:
    63850084
  • 财政年份:
    1988
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Developmental Scientific Research

相似国自然基金

有机微纳单晶屈曲结构电学和光电性能研究
  • 批准号:
    12302144
  • 批准年份:
    2023
  • 资助金额:
    30.00 万元
  • 项目类别:
    青年科学基金项目
电学微环境调控尖端细胞和茎细胞分化
  • 批准号:
    82201123
  • 批准年份:
    2022
  • 资助金额:
    30.00 万元
  • 项目类别:
    青年科学基金项目
电学微环境调控尖端细胞和茎细胞分化
  • 批准号:
  • 批准年份:
    2022
  • 资助金额:
    30 万元
  • 项目类别:
    青年科学基金项目
SrTiO3基陶瓷的电学微区构建、微结构局域特征随成分演变依赖关系及其多功能性起源
  • 批准号:
    12264009
  • 批准年份:
    2022
  • 资助金额:
    32.00 万元
  • 项目类别:
    地区科学基金项目
SrTiO3基陶瓷的电学微区构建、微结构局域特征随成分演变依赖关系及其多功能性起源
  • 批准号:
  • 批准年份:
    2022
  • 资助金额:
    32 万元
  • 项目类别:
    地区科学基金项目

相似海外基金

Development of All Elastic Type Micromachine Based on Euglenoid Movement
基于裸眼运动的全弹性微型机械的研制
  • 批准号:
    15K16337
  • 财政年份:
    2015
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Young Scientists (B)
An openable tubular artificial gastrointestinal micromachine for medicine effect evaluation
一种用于药效评价的可开放式管状人工胃肠微机
  • 批准号:
    15K12526
  • 财政年份:
    2015
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
Development of endodontic robots using microimage sensor and micromachine
使用微图像传感器和微机械开发牙髓机器人
  • 批准号:
    15K15698
  • 财政年份:
    2015
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
A development of neural micromachine and genetic multicolor fluorescent imaging of autonomic nervous system to identify cellular neural dynamics
神经微机器和自主神经系统遗传多色荧光成像的发展,以识别细胞神经动力学
  • 批准号:
    26560230
  • 财政年份:
    2014
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
Challenge of On-chip Precise Enucleation of Oocyte Using 3D 6DOF Manipulation
使用 3D 6DOF 操作进行片上精确卵母细胞去核的挑战
  • 批准号:
    25630090
  • 财政年份:
    2013
  • 资助金额:
    $ 31.2万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
{{ showInfoDetail.title }}

作者:{{ showInfoDetail.author }}

知道了