Fundamental research on tactile sensor system using the longitudinal mode quartz crystal resonator

使用纵模石英晶体谐振器的触觉传感器系统的基础研究

基本信息

批准号：
06650460
负责人：
ITO Hideaki
金额：
$ 1.28万
依托单位：
Shinshu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

项目摘要

The author developed the tactile sensor consisting of a longitudinal mode quartz ctystal resonator, the length-extensional quartz crystal operated at 600 kHz, which was 4.6mm in length and 106 mum width and 200mum thickness. Its quartz crystal has been used as a clock time source. After the author removed a capsule of the quartz resonator, which was fixed in the center of an acrylic resin cylinder case 1cm in diameter and 1cm height in the condition of the quartz resonator being 1mm higher than it with epoxy resin. The author call it the quartz tactile sensor.The author analyzed the behavior of a longitudinal mode quartz crystal resonator attached to viscoelastic medium based on a Mason's equivalent circuit. The Mason's equivalent circuit has two acoustic ports which correspond to quartz surfaces. One surface is stress-free and another one is attached to viscoelastric medium. The problem of acoustic impedence of an oscillating sphere attached to semi-infinite viscoelastic medium was already analyzed by H.L.Oestreicher. The author assumed that the top shape of the quartz resonator was sphere and applied this acoustic impedance to a Manson's equivalent circuit. Finally the author obtained the theoretical equations of the frequency and the impedance change.Silicone rubber used in this experiment is isotropic and incompressible medium and Poisson's ratio of it is 0.49. Therefore the theoretical equation of frequency comprises both the density and the shear modulus of it as a parameter. When the quartz tactile sensor is attached vereically to sillicone rubber with its weight 2g, the shift in frequency correlate the measurements of both viscoelatic and rubber tester. The frequency change shows hardness or softness of it.In conclusion, it has been confirmed that the theoretical equation of frequency change is in good agreement with the experimental results.

作者开发了由纵模石英晶体谐振器组成的触觉传感器，工作频率为600kHz的长度延伸石英晶体，长度为4.6mm，宽度为106μm，厚度为200μm。其石英晶体已被用作时钟时间源。笔者拆下石英谐振器的一个胶囊后，用环氧树脂将石英谐振器比石英谐振器高1mm的情况下固定在直径1cm、高1cm的丙烯酸树脂圆柱壳的中心。作者将其称为石英触觉传感器。作者基于梅森等效电路分析了附着在粘弹性介质上的纵模石英晶体谐振器的行为。梅森的等效电路有两个与石英表面相对应的声学端口。一个表面是无应力的，另一个表面附着在粘弹性介质上。 H.L.Oestreicher 已经分析了附着在半无限粘弹性介质上的振荡球体的声阻抗问题。作者假设石英谐振器的顶部形状为球形，并将该声阻抗应用于曼森等效电路。最后作者得到了频率和阻抗变化的理论方程。本实验使用的硅橡胶是各向同性不可压缩介质，其泊松比为0.49。因此，频率的理论方程包括其密度和剪切模量作为参数。当石英触觉传感器垂直附着在重量为 2g 的硅橡胶上时，频率的变化与粘弹性和橡胶测试仪的测量结果相关。频率的变化体现了其硬度或软度。综上所述，已证实频率变化的理论方程与实验结果吻合较好。