Research on developement of the laser excited by a semiconductor diode in laser beam lithography

激光束光刻中半导体二极管激发激光器的研究进展

• 批准号: 06650064
• 负责人: SAIGA Noriaki
• 金额: $ 1.15万
• 依托单位: YONAGO NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06650064/
• 关键词: laser beam lithography; laser excited by a laser diode; second harmonic generation; astigmatic aberration; Nd ion; phase matching; temperature tuning; レーザ描画装置; 半導体レーザ; 楕円型ガウス光; ペルチェ素子; 青色レーザ光; レーザ遷移; 蛍光分光特性; 第2高調液発生

From the measurement on the absorption and the photoluminecent spectrums of Nd-doped LiNb03 (LN), we have obtained the following results(1) Two LN subtsrates, in which the Nd ion of 1 and 3 weight % had been doped, respectively, were compared on above efficiencies. As a result, the latter had the greatest photoluminecence of in the incidence of TM polarized light.(2) Their spectrums were found to exhibit the temperture dependence such that the magnitude was raised withthe increase of temperature untill 90ﾟ C, but dcreased from 90ﾟ C to 150ﾟ C.(3) For the 3% Nd-dopepd LN, we had observed only the spontaneous emission, not atainning to the population inversion.Next, the blue light generation due to the second harmonic generation (SHG) process in KNb03 crystal have been examined from both aspects of experiment and calculation. The results are as follows.(1) Due to the presence of astigamatic aberration in the laser diode, the conventional phase matching was modified so as to include the beam radius dependence of a focusing light.(2) Above aberration makes the phase matching wavelength shift into the side of longer wavelength. At room temperature, the phase matching angles are not existed in the crystalographic X-Y plane, due to the astigmatic aberration.(3) The blue light was occured in the phase matching conditions of the beam radius of 100mum, the lasing wavelength of 863.5nm under peltier-cooling of 12.5ﾟ C with respect to a laser diode, and keeping the SHG crystal of KNb03 at the temperature of 38.6ﾟ C.

通过对 Nd 掺杂 LiNbO3 (LN) 的吸收光谱和光致发光光谱的测量，我们得到了以下结果： (1) 两种 LN 基底，其中分别掺杂了 1 重量％和 3 重量％的 Nd 离子。与上述效率相比，后者在TM偏振光入射时具有最大的光致发光。(2)发现它们的光谱表现出温度依赖性使得强度随着温度的升高而增加，直到90°C，但从90°C到150°C降低。（3）对于3％Nd掺杂LN，我们只观察到自发辐射，而没有观察到自发辐射。接下来，从两个方面研究了 KNb03 晶体中二次谐波产生（SHG）过程产生的蓝光实验和计算结果如下：(1)由于激光二极管存在像散像差，对传统的相位匹配进行了修改，以包含聚焦光的光束半径依赖性。(2)上述像差。使相位匹配波长向较长波长一侧移动，在室温下，由于像散像差，在晶体X-Y平面上不存在相位匹配角。(3)在相位匹配条件下出现蓝光。激光二极管的光束半径为100μm，珀耳帖冷却温度为12.5°C，激光波长为863.5nm，KNb03的SHG晶体温度保持在38.6°C。

项目成果

N.Saiga: "Restoration of the intensity profile of a laser spot by means of combining optical correlation with a numerical method" Applied Optics. vol.33. 2083-2090 (1994)

N.Saiga：“通过将光学相关性与数值方法相结合来恢复激光光斑的强度分布”《应用光学》。

雑賀憲昭、山本英樹: "Temprerature corrected quartz-crytal microbalance for real time film thickness monitoring in vacuum evaporaion" Japan Journal of Applied Physics. (発表予定).

Noriaki Saiga、Hideki Yamamoto：“真空蒸发中实时膜厚监测的温度校正石英晶体微天平”《日本应用物理学杂志》（待出版）。

雑賀憲昭、山本英樹: "Vriable line-width laser beam lithography using a lens with spherical aberration" Optical Review. (発表予定).

Noriaki Saiga、Hideki Yamamoto：“使用具有球面像差的透镜进行可变线宽激光束光刻”光学评论（即将出版）。

H.Yamamoto & N.Saiga: "Temperature corrected quartz-crytal micro-balance for real-time film thickness monitoring in vacuum evaporation." Japan Journal of Applied Physics. (to be submitted).

山本

雑賀憲昭、山本英樹: "線幅可変レーザビーム描画装置" 光学技術コンタクト. 32. 18-27 (1994)

Noriaki Saiga、Hideki Yamamoto：“线宽可变激光束写入装置”光学技术接触。 32. 18-27 (1994)