Research on developement of the laser excited by a semiconductor diode in laser beam lithography

激光束光刻中半导体二极管激发激光器的研究进展

基本信息

批准号：
06650064
负责人：
SAIGA Noriaki
金额：
$ 1.15万
依托单位：
YONAGO NATIONAL COLLEGE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

项目摘要

From the measurement on the absorption and the photoluminecent spectrums of Nd-doped LiNb03 (LN), we have obtained the following results(1) Two LN subtsrates, in which the Nd ion of 1 and 3 weight % had been doped, respectively, were compared on above efficiencies. As a result, the latter had the greatest photoluminecence of in the incidence of TM polarized light.(2) Their spectrums were found to exhibit the temperture dependence such that the magnitude was raised withthe increase of temperature untill 90ﾟ C, but dcreased from 90ﾟ C to 150ﾟ C.(3) For the 3% Nd-dopepd LN, we had observed only the spontaneous emission, not atainning to the population inversion.Next, the blue light generation due to the second harmonic generation (SHG) process in KNb03 crystal have been examined from both aspects of experiment and calculation. The results are as follows.(1) Due to the presence of astigamatic aberration in the laser diode, the conventional phase matching was modified so as to include the beam radius dependence of a focusing light.(2) Above aberration makes the phase matching wavelength shift into the side of longer wavelength. At room temperature, the phase matching angles are not existed in the crystalographic X-Y plane, due to the astigmatic aberration.(3) The blue light was occured in the phase matching conditions of the beam radius of 100mum, the lasing wavelength of 863.5nm under peltier-cooling of 12.5ﾟ C with respect to a laser diode, and keeping the SHG crystal of KNb03 at the temperature of 38.6ﾟ C.

根据ND掺杂LINB03（LN）的分析的测量和光光谱，我们获得了以下结果（1）两个LN亚三酸盐，其中分别比较了上述效率的ND离子1和3量％和3个重量％。 As a result, the latter had the greatest photolumine of incidence of TM polarized light.(2) Their spectra were found to exhibit the temperature dependence such that the magnitude was raised with the increase of temperature until 90ﾟ C, but demosed from 90ﾟ C to 150ﾟ C.(3) For the 3% Nd-dopepd LN, we had observed only the sponsor-spontaneous emission, not ataining to the population invernion.next，从实验和计算的两个方面都检查了KNB03晶体中第二次谐波产生（SHG）过程引起的蓝光生成。结果如下。（1）由于激光二极管中存在散焦像差，因此对传统的相匹配进行了修改，以包括聚焦光的光束半径依赖性。（2）在异常上方使相匹配的波长转移到更长波长的一侧。 At room temperature, the phase matching angles are not existed in the crystallographic X-Y plane, due to the astigmatic aberration.(3) The blue light was occurred in the phase matching conditions of the beam radius of 100mum, the lasing wavelength of 863.5nm under peltier-cooling of 12.5ﾟ C with respect to a laser diode, and keeping the SHG crystal of KNb03 at the temperature of 38.6 ﾟC。